US4004045A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for fluid film application
Assignee: Individual
•
Filing: 1974-08-09
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Granted: 1977-01-18
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Expires: 1994-08-09
Abstract
Abstract Apparatus and method for depositing a uniformly micro-thin layer of fluid on the face of a panel or substrate by moving the panel face down in oppositely moving contiguously juxtaposed position with a thin sheet of said fluid substantially laminarly flowing across a horizontal weir. The weir is so arranged as to form an acute angle between direction of fluid travel and the plane of movement of the piece to be coated. Once the panel touches the surface of the moving sheet of fluid, the surface tension between the fluid and panel causes a uniform micro-thin layer of the fluid to be deposited on the panel. If the method is used for lacquer or resist application, the layer of fluid is then baked onto the panel until it is dried into a solid. If the method is used for developing or rinsing photo plates or semi-conductor wafers, a slightly turbulent flow across the weir is desirable and the excess liquid remaining on the substrates may be blown off by a stream of high velocity gases.
Inventors
- 👤 Manfred K. Stelter
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 16:19
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/16; G03F7/26; G03F7/30; G03F7/3042
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
123 words
A method for applying a uniform micro-thin coating of fluid onto the surface of a panel comprising the steps of mounting said panel onto an incline guide means which aligns said panel in an inverted position for preventing the contamination of said panel surface by falling dust particles or the like, and moving said inverted panel in said incline guide means through a position contiguous with the path of a laminar flowing curtain of coating fluid which is moving in a substantially opposite direction to said moving surface across the horizontal top edge of a wall defining a weir, said coating fluid contacting said panel surface and a micro-thin layer of said fluid is transferred to said surface by means of surface tension.
Claim 2
Independent Claim
123 words
A method for applying a uniform micro-thin coating of fluid onto the surface of a panel comprising the steps of mounting said panel onto an incline guide means which aligns said panel in an inverted position for preventing the contamination of said panel surface by falling dust particles or the like, and moving said inverted panel in said incline guide means through a position contiguous with the path of a laminar flowing curtain of coating fluid which is moving in a substantially opposite direction to said moving surface across the horizontal top edge of a wall defining a weir, said coating fluid contacting said panel surface and a micro-thin layer of said fluid is transferred to said surface by means of surface tension.
Claim 3
Dependent Claim
28 words
The method of claim 1 further including cleaning said panel surface while said panel is mounted in an inverted position before said coating is applied to said surface.
Claim 4
Dependent Claim
33 words
The method of claim 2 wherein said cleaning includes the steps of scrubbing said surface with a cleaning solution, rinsing said cleaning solution from said surface, and drying said rinsed and scrubbed surface.
Claim 5
Dependent Claim
48 words
The method of claim 3 wherein said rinsing includes moving said panel surface through a position contiguous with and in a direction substantially opposite the path of a traveling curtain of a de-ionized liquid which is moving across the horizontal top edge of a wall defining a weir.
Claim 6
Dependent Claim
30 words
The method of claim 3 wherein said drying rinsed and scrubbed surface includes the step of blowing gas across the panel surface to move any foreign matter from said surface.
Claim 7
Dependent Claim
26 words
The method of claim 4 wherein said drying further includes the step of evaporating any remaining liquid rinse by moving said surface across an infra-red radiator.
Claim 8
Dependent Claim
22 words
The method of claim 1 wherein said drying said coating includes the step of moving said coated surface across an infra-red radiator.
Claim 9
Independent Claim
241 words
A method of applying a uniform micro-thin coating of fluid material onto the surface of a substrate comprising the steps of: mounting said substrate in an inverted position on a guide means for preventing foreign particle contamination of said substrate surface to be coated; moving said substrate in said guide means across scrubbing means containing a cleaning solution for cleaning said substrate surface; rinsing said cleaning solution from said surface by moving said cleaned inverted substrate surface through a position adjacent to and in a direction substantially opposite the path of a curtain of de-ionized rinsing liquid which is moving across the horizontal top edge of a wall defining a weir; drying said cleaned and rinsed inverted substrate surface by blowing gas across said surface to remove foreign matter therefrom, and heating said substrate surface by moving it across an infra-red radiator to evaporate any remaining liquid rinse thereon, then moving said inverted substrate surface in said guide means at an ascending incline angle through a positon contiguous with the path of a laminarly flowing curtain of coating fluid which is moving in a substantially opposite direction to said moving surface across the horizontal top edge of a wall defining a weir, said coating fluid contacting said substrate surface and a micro-thin layer of said fluid is transferred to said surface by means of surface tension, and baking said coating on said surface by moving said surface across an infra-red radiator.
Claim 10
Independent Claim
241 words
A method of applying a uniform micro-thin coating of fluid material onto the surface of a substrate comprising the steps of: mounting said substrate in an inverted position on a guide means for preventing foreign particle contamination of said substrate surface to be coated; moving said substrate in said guide means across scrubbing means containing a cleaning solution for cleaning said substrate surface; rinsing said cleaning solution from said surface by moving said cleaned inverted substrate surface through a position adjacent to and in a direction substantially opposite the path of a curtain of de-ionized rinsing liquid which is moving across the horizontal top edge of a wall defining a weir; drying said cleaned and rinsed inverted substrate surface by blowing gas across said surface to remove foreign matter therefrom, and heating said substrate surface by moving it across an infra-red radiator to evaporate any remaining liquid rinse thereon, then moving said inverted substrate surface in said guide means at an ascending incline angle through a positon contiguous with the path of a laminarly flowing curtain of coating fluid which is moving in a substantially opposite direction to said moving surface across the horizontal top edge of a wall defining a weir, said coating fluid contacting said substrate surface and a micro-thin layer of said fluid is transferred to said surface by means of surface tension, and baking said coating on said surface by moving said surface across an infra-red radiator.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1980-01-18 | 1980-07-19 | 1981-01-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1984-01-18 | 1984-07-19 | 1985-01-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1988-01-18 | 1988-07-19 | 1989-01-18 | $7700.00 | Window Closed / Lapsed |