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US3988767A Expired / Lapsed US ⏱️ 0.0 years remaining

High voltage deep diode power semiconductor switch

Assignee: General Electric Co
•
Filing: 1975-03-10
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Granted: 1976-10-26
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Expires: 1995-03-10
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Abstract

Abstract A semiconductor switch is a lamellar body of semiconductor material having two major opposed surfaces and at least one group of four regions of alternate type conductivity. At least three of the four regions have recrystallized semiconductor material having a solid solubility of metal therein to impart the type conductivity thereto. Each of the first and third regions have the same type conductivity but different levels of impurity concentration. Each of the second and fourth regions have the same type conductivity but different levels of impurity concentration.

Inventors

  • 👤 Thomas R. Anthony
  • 👤 Harvey E. Cline

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 04:22
CPC Classifications
H; H10; H10D; H10D8/00; H10D8/01; H10D62/00; H10D62/40; H10D8/041; H10D8/80; H10P; H10P95/00; H10P95/50

Claims Analysis

Total Claims: 17
Claim 1
Independent Claim 387 words
A semiconductor switch comprising a body of semiconductor material having two major opposed surfaces forming respectively the top and bottom surfaces of the body, a predetermined level of resistivity, a predetermined type conductivity, a preferred crystal structure and a vertical axis substantially perpendicular to the major opposed surfaces; at least one of the major surfaces having a predetermined crystal planar orientation; at least one group of four planar regions of alternate and opposite type conductivity and a P-N junction formed by the abutting and contiguous surfaces of each pair of regions of opposite type conductivity disposed in the body and so arranged that the P-N junctions and planar regions are substantially perpendicular to, and terminate in, the major opposed surfaces of the body; the material of at least three of the four planar regions consisting of recrystallized semiconductor material of the body; the recrystallized material of the at least three planar regions having been formed by the migration of a melt of metal-rich semiconductor material through the material of the body by thermal gradient zone melting at a predetermined elevated temperature along a thermal gradient which has a predetermined crystal axis orientation which is substantially parallel to the vertical axis of the body; the recrystallized material of each of the at least three regions having a substantially uniform level of concentration of the metal migrated through the body throughout the entire region as determined by the solid solubility of that metal in that semiconductor material at that predetermined elevated temperature of migration; the metal containing at least one material for imparting a predetermined level of resistivity and a predetermined type conductivity to its respective planar region; each of the first and third regions having the same type conductivity as that of the body; each of the first and third regions having a different level of resistivity from each other; each of the second and fourth regions having a second and opposite type conductivity than the first and second regions and a different level of resistivity from each other; each of the three regions of recrystallized semiconductor material having a preferred crystal direction; a first electrical contact affixed in an electrical conductive relationship to the first region of the group, and a second electrical contact affixed in an electrical conductive relationship to the fourth region of the group.
Claim 2
Dependent Claim 387 words
A semiconductor switch comprising a body of semiconductor material having two major opposed surfaces forming respectively the top and bottom surfaces of the body, a predetermined level of resistivity, a predetermined type conductivity, a preferred crystal structure and a vertical axis substantially perpendicular to the major opposed surfaces; at least one of the major surfaces having a predetermined crystal planar orientation; at least one group of four planar regions of alternate and opposite type conductivity and a P-N junction formed by the abutting and contiguous surfaces of each pair of regions of opposite type conductivity disposed in the body and so arranged that the P-N junctions and planar regions are substantially perpendicular to, and terminate in, the major opposed surfaces of the body; the material of at least three of the four planar regions consisting of recrystallized semiconductor material of the body; the recrystallized material of the at least three planar regions having been formed by the migration of a melt of metal-rich semiconductor material through the material of the body by thermal gradient zone melting at a predetermined elevated temperature along a thermal gradient which has a predetermined crystal axis orientation which is substantially parallel to the vertical axis of the body; the recrystallized material of each of the at least three regions having a substantially uniform level of concentration of the metal migrated through the body throughout the entire region as determined by the solid solubility of that metal in that semiconductor material at that predetermined elevated temperature of migration; the metal containing at least one material for imparting a predetermined level of resistivity and a predetermined type conductivity to its respective planar region; each of the first and third regions having the same type conductivity as that of the body; each of the first and third regions having a different level of resistivity from each other; each of the second and fourth regions having a second and opposite type conductivity than the first and second regions and a different level of resistivity from each other; each of the three regions of recrystallized semiconductor material having a preferred crystal direction; a first electrical contact affixed in an electrical conductive relationship to the first region of the group, and a second electrical contact affixed in an electrical conductive relationship to the fourth region of the group.
Claim 3
Dependent Claim 27 words
The semiconductor switch of claim 1 wherein the material of the body is one selected from the group consisting of silicon, silicon carbide, germanium and gallium arsenide.
Claim 4
Dependent Claim 15 words
The semiconductor switch of claim 2 wherein the semiconductor material of the body is silicon.
Claim 5
Dependent Claim 26 words
The semiconductor switch of claim 3 wherein the first and third regions are of P-type conductivity, and the second and fourth regions are of N-type conductivity.
Claim 6
Dependent Claim 93 words
The semiconductor switch of claim 4 wherein the metal in the material of the first region is aluminum and the resistivity is approximately 7 × 10 - 3 ohm-centimeter; the resistivity of the second region is approximately 10 ohm-centimeter and is the original starting material of the body; the metal in the material of the third region is tin-aluminum and the resistivity is approximately 3 × 10 - 1 ohm-centimeter, and the metal in the material of the fourth region is gold-antimony and the resistivity is approximately 1 × 10 - 3 ohm-centimeter.
Claim 7
Dependent Claim 37 words
The semiconductor switch of claim 5 wherein the number of groups of 4 regions of alternate type conductivity is one, and the first and second electrical contacts are affixed respectively to the first and fourth regions thereof.
Claim 8
Dependent Claim 104 words
The semiconductor switch of claim 6 wherein the number of groups of four planar regions of alternate and opposite type conductivity is five, the group being integral with each other, the fourth region of one group being in an abutting contact relationship with the first region of the next adjacent group, a P-N junction formed by the abutting surfaces of the material of opposite type conductivity of each pair of fourth and first planar regions, the first electrical contact is affixed to the first region of the first group, and the second electrical contact is affixed to the fourth region of the fifth group.
Claim 9
Dependent Claim 37 words
The semiconductor switch of claim 1 wherein the number of groups of 4 regions of alternate type conductivity os one, and the first and second electrical contacts are affixed respectively to the first and fourth regions thereof.
Claim 10
Dependent Claim 27 words
The semiconductor device of claim 1 wherein the opposed major surfaces have a preferred planar crystal orientation selected from the group consisting of (111), (110) and (100).
Claim 11
Dependent Claim 27 words
The semiconductor device of claim 9 wherein the material of the body is one selected from the group consisting of silicon, silicon carbide, germanium and gallium arsenide.
Claim 12
Dependent Claim 41 words
The semiconductor device of claim 9 wherein the opposed major surfaces have a preferred planar crystal orientation of (100) and each recrystallized region has a preferred crystal direction selected from the group consisting of < 011 > and < 011 >.
Claim 13
Dependent Claim 28 words
The semiconductor device of claim 11 wherein the semiconductor material of the body is one selected from the group consisting of silicon, germanium, silicon carbide and gallium arsenide.
Claim 14
Dependent Claim 32 words
The semiconductor device of claim 9 wherein the opposed major surfaces have a preferred planar crystal orientation of (110) and each recrystallized region has a preferred crystal direction of < 110 >.
Claim 15
Dependent Claim 20 words
The semiconductor device of claim 13 wherein the material of the body is silicon, silicon carbide, germanium and gallium arsenide.
Claim 16
Dependent Claim 53 words
The semiconductor device of claim 9 wherein the opposed major surfaces have a preferred planar crystal orientation of (111) and each recrystallized region has a preferred crystal direction selected from the group consisting of < 011 >, < 101 >, < 110 >, < 112 >, < 211 > and < 121 >.
Claim 17
Dependent Claim 27 words
The semiconductor device of claim 15 wherein the material of the body is one selected from the group consisting of silicon, silicon carbide, germanium and gallium arsenide.

References Cited (Backward Citations)

US3514715A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1979-10-26 1980-04-26 1980-10-26 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1983-10-26 1984-04-26 1984-10-26 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1987-10-26 1988-04-26 1988-10-26 $7700.00 Window Closed / Lapsed

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