US3983012A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Epitaxial growth of silicon or germanium by electrodeposition from molten salts
Assignee: Leland Stanford Junior University
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Filing: 1975-10-08
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Granted: 1976-09-28
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Expires: 1995-10-08
Abstract
Abstract A method for electrodepositing an epitaxial crystal layer of germanium or silicon onto a single crystal substrate formed of germanium or silicon less noble than the layer. The substrate forms the cathode of an electrolytic cell containing a fused electrolytic salt bath which includes a salt source of plating ion (e.g., dipotassium silicon hexafluoride) and at least one alkali metal fluoride as the bath solvent. A vacuum is applied to remove gaseous impurities from the bath. Essentially all oxide is removed from the bath prior to electrolysis by reaction with a reagent (e.g., hydrogen fluoride) to form water vapor which is removed from the system by the vacuum. The bath may be doped with a different type or level of dopant than the substrate to form a junction.
Inventors
- 👤 Uri Cohen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 11:04
CPC Classifications
C; C25; C25D; C25D3/00; C25D3/66; Y; Y10; Y10S; Y10S148/00; Y10S148/153
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
223 words
A method for electrodepositing an epitaxial crystal layer of a group IVb element plating ion selected from the group consisting of silicon and germanium onto a lattice matching substrate selected from said group IVb elements at least as noble as said plating ion, said substrate comprising the cathode of an electrolytic cell, said method comprising: a. forming an electrolytic salt bath for said electrolytic cell including a salt source of said plating ion and a solvent comprising at least one alkali metal fluoride, said salt source of plating ion comprising at least 0.1 mole percent of said bath composition, b. removing essentially all oxides from the electrolytic bath by the following steps: 1. applying a vacuum to the bath, 2. supplying in the bath a source of reagent chemically reactive with oxide ions in sufficient quantity to react with any oxide ion in the bath, 3. reacting said oxygen reactive reagent with oxygen in the bath at a molten bath temperature, and 4. removing the reaction product from the bath, and c. passing a current between an anode in the bath and said cathode at a sufficient current density to electrodeposit silicon as an epitaxial crystal layer onto said cathode, said bath being maintained under an inert gas atmosphere at a temperature sufficient for said bath to be in a totally molten state.
Claim 2
Independent Claim
223 words
A method for electrodepositing an epitaxial crystal layer of a group IVb element plating ion selected from the group consisting of silicon and germanium onto a lattice matching substrate selected from said group IVb elements at least as noble as said plating ion, said substrate comprising the cathode of an electrolytic cell, said method comprising: a. forming an electrolytic salt bath for said electrolytic cell including a salt source of said plating ion and a solvent comprising at least one alkali metal fluoride, said salt source of plating ion comprising at least 0.1 mole percent of said bath composition, b. removing essentially all oxides from the electrolytic bath by the following steps: 1. applying a vacuum to the bath, 2. supplying in the bath a source of reagent chemically reactive with oxide ions in sufficient quantity to react with any oxide ion in the bath, 3. reacting said oxygen reactive reagent with oxygen in the bath at a molten bath temperature, and 4. removing the reaction product from the bath, and c. passing a current between an anode in the bath and said cathode at a sufficient current density to electrodeposit silicon as an epitaxial crystal layer onto said cathode, said bath being maintained under an inert gas atmosphere at a temperature sufficient for said bath to be in a totally molten state.
Claim 3
Dependent Claim
18 words
The method of claim 1 in which the temperature of said bath varies between 600° C and 850°.
Claim 4
Dependent Claim
22 words
The method of claim 1 in which said oxide reaction product is gaseous and is removed from said bath under said vacuum.
Claim 5
Dependent Claim
26 words
The method of claim 3 in which said oxygen reactive reagent is selected from the group consisting of hydrogen fluoride and a source of hydrogen fluoride.
Claim 6
Dependent Claim
27 words
The method of claim 1 in which said oxygen reactive reagent is hydrogen fluoride formed in situ in said bath by the decomposition of potassium hydrogen difluoride.
Claim 7
Dependent Claim
42 words
The method of claim 1 in which said plating ion is silicon and said salt source of plating ion is selected from the group consisting of alkali metal silicon fluoride, ammonium silicon fluoride, calcium silicon fluoride, barium silicon fluoride and silicon tetrafluoride.
Claim 8
Dependent Claim
33 words
The method of claim 1 in which said cathode is p-type and said bath includes n-type dopant which is electroplated simultaneously with said crystal layer in proportions to form a desired p-n junction.
Claim 9
Dependent Claim
33 words
The method of claim 1 in which said cathode is n-type and said bath includes p-type dopant which is electroplated simultaneously with said crystal layer in proportions to form a desired p-n junction.
Claim 10
Dependent Claim
37 words
The method of claim 1 in which said cathode substrate is essentially flat and includes on one side a metal layer significantly more conductive and noble than said cathode to improve the uniformity of epitaxial crystalline growth.
Claim 11
Dependent Claim
44 words
The method of claim 1 in which an electrically insulative layer including at least one open window is disposed on the surface of said cathode prior to contacting the same with said electrolytic bath, whereby said epitaxial crystal selectively grows only in the window.
Claim 12
Dependent Claim
15 words
The method of claim 1 in which the plating ion and cathode substrate are silicon.
Claim 13
Dependent Claim
14 words
The method of claim 1 in which said plating ion and anode are silicon.
Claim 14
Dependent Claim
23 words
The method of claim 1 in which the current density varies in the range of from one to 20 milliamperes per square centimeter.
Claim 15
Dependent Claim
15 words
The method of claim 1 in which the plating ion and cathode substrate are germanium.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1979-09-28 | 1980-03-29 | 1980-09-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1983-09-28 | 1984-03-29 | 1984-09-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1987-09-28 | 1988-03-29 | 1988-09-28 | $7700.00 | Window Closed / Lapsed |