US3974382A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Lithographic mask attraction system
Assignee: Massachusetts Institute of Technology
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Filing: 1975-01-06
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Granted: 1976-08-10
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Expires: 1995-01-06
Abstract
Abstract An electrical voltage is connected between a flexible soft-X-ray mask and a substrate causing the mask to make intimate contact and thereby conform to slight irregularities of the surface of the X-ray sensitive polymer on the substrate to minimize the effect of these irregularities during exposure to soft-X-rays.
Inventors
- 👤 Stephen E. Bernacki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 17:59
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70216; G03F7/7035
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
60 words
Apparatus for lithography comprising: an electrically-conductive substrate, an electrically-insulating, soft-X-ray radiation-sensitive layer on said substrate, an electrically-conductive mask in physical contact with said layer, a source of electrical voltage continuously connected between said mask and said substrate to pull said mask into intimate physical contact with said layer, a source of soft-X-ray radiation to expose said layer through said mask.
Claim 2
Dependent Claim
60 words
Apparatus for lithography comprising: an electrically-conductive substrate, an electrically-insulating, soft-X-ray radiation-sensitive layer on said substrate, an electrically-conductive mask in physical contact with said layer, a source of electrical voltage continuously connected between said mask and said substrate to pull said mask into intimate physical contact with said layer, a source of soft-X-ray radiation to expose said layer through said mask.
Claim 3
Dependent Claim
48 words
The apparatus of claim 1 wherein: said mask has thin flexible regions, and said electrical voltage is sufficiently large to deflect at least said flexible regions into contact with said radiation-sensitive layer over the entire flexible region because of the electrostatic force between said mask and said substrate.
Claim 4
Dependent Claim
12 words
The apparatus of claim 2 wherein: said voltage is a direct voltage.
Claim 5
Dependent Claim
12 words
The apparatus of claim 2 wherein: said voltage is an alternating voltage.
Claim 6
Dependent Claim
12 words
The apparatus of claim 2 wherein: said voltage is a square wave.
Claim 7
Dependent Claim
11 words
The apparatus of claim 1 wherein: said substrate is a semiconductor.
Claim 8
Dependent Claim
22 words
The apparatus of claim 1 wherein: said substrate is an electrical insulator having an electrically conductive coating on at least one surface.
Claim 9
Dependent Claim
11 words
The apparatus of claim 1 wherein: said mask is a semiconductor.
Claim 10
Dependent Claim
25 words
The apparatus of claim 1 wherein: said mask is an electrical insulator with a layer of metal on at least one face of said mask.
Claim 11
Dependent Claim
12 words
The apparatus of claim 1 wherein: said radiation-sensitive layer is polymethyl methacrylate.
Claim 12
Independent Claim
96 words
A method for lithographic printing comprising: coating an electrically conductive substrate with a soft-X-ray radiation sensitive electrically-insulating layer, placing an electrically conductive mask in contact with said layer, applying a voltage between said substrate and said mask of sufficient magnitude to cause said mask to be electrostatically attracted to said substrate to cause radiation transparent regions of said mask to conform to the surface of said layer, exposing said layer through said mask to soft-X-ray radiation to change the effective molecular weight of the layer in conformity with the soft X-ray absorption pattern of said mask.
Claim 13
Independent Claim
96 words
A method for lithographic printing comprising: coating an electrically conductive substrate with a soft-X-ray radiation sensitive electrically-insulating layer, placing an electrically conductive mask in contact with said layer, applying a voltage between said substrate and said mask of sufficient magnitude to cause said mask to be electrostatically attracted to said substrate to cause radiation transparent regions of said mask to conform to the surface of said layer, exposing said layer through said mask to soft-X-ray radiation to change the effective molecular weight of the layer in conformity with the soft X-ray absorption pattern of said mask.
Claim 14
Dependent Claim
13 words
The method of claim 11 where said radiation-sensitive layer is polymethyl methacrylate polymer.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1979-08-10 | 1980-02-09 | 1980-08-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1983-08-10 | 1984-02-09 | 1984-08-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1987-08-10 | 1988-02-09 | 1988-08-10 | $7700.00 | Window Closed / Lapsed |