US3969164A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Native oxide technique for preparing clean substrate surfaces
Assignee: AT&T Inc
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Filing: 1975-08-15
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Granted: 1976-07-13
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Expires: 1995-08-15
Abstract
Abstract Surface contamination of Group III(a)-V(a) substrates prior to epitaxial growth can influence structural, optical, and electrical properties of the resulting layers. Of the common contaminants, sulfur, nitrogen, carbon, and oxygen, which are found on substrate surfaces, only carbon cannot be removed by simple heating. By passivating the substrate surface with a native oxide coating after chemical etching and before atmospheric exposure, the carbon-containing contamination can be virtually eliminated since these compounds have low sticking coefficients on the native oxide. The oxide can then be readily stripped off by heating in a vacuum to leave essentially an atomically clean substrate surface.
Inventors
- 👤 Alfred Yi Cho
- 👤 Joseph Charles Tracy, Jr.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 21:30
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/10; H10P70/18; H10P70/12; H10P70/15; Y; Y10; Y10S; Y10S148/00; Y10S148/056; Y10S148/065; Y10S148/118; Y10S148/169; Y10S438/00; Y10S438/974
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
152 words
A method of preparing a gallium arsenide substrate surface for molecular beam epitaxy comprising the steps of: a) etch-polishing the substrate surface by submerging it in bromine-methanol; b) while said substrate is still submerged in said bromine-methanol, diluting said bromine-methanol with pure methanol effective to virtually stop the etching action of said bromine-methanol; c) while said substrate is still submerged in said methanol, forming a native oxide coating on said surface by diluting said methanol with deionized water; d) drying said substrate with a stream of dried freon effective to remove the water before any particulate matter contained therein can precipitate on the surface; e) mounting said substrate in an evacuable chamber of an apparatus adapted for molecular beam epitaxy; f) reducing pressure of said chamber; g) heating said substrate to a temperature sufficient to remove said native oxide coating; and h) growing at least one epitaxial layer on said substrate surface.
Claim 2
Independent Claim
152 words
A method of preparing a gallium arsenide substrate surface for molecular beam epitaxy comprising the steps of: a) etch-polishing the substrate surface by submerging it in bromine-methanol; b) while said substrate is still submerged in said bromine-methanol, diluting said bromine-methanol with pure methanol effective to virtually stop the etching action of said bromine-methanol; c) while said substrate is still submerged in said methanol, forming a native oxide coating on said surface by diluting said methanol with deionized water; d) drying said substrate with a stream of dried freon effective to remove the water before any particulate matter contained therein can precipitate on the surface; e) mounting said substrate in an evacuable chamber of an apparatus adapted for molecular beam epitaxy; f) reducing pressure of said chamber; g) heating said substrate to a temperature sufficient to remove said native oxide coating; and h) growing at least one epitaxial layer on said substrate surface.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1979-07-13 | 1980-01-12 | 1980-07-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1983-07-13 | 1984-01-12 | 1984-07-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1987-07-13 | 1988-01-12 | 1988-07-13 | $7700.00 | Window Closed / Lapsed |