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US3962057A Expired / Lapsed US ⏱️ 0.0 years remaining

Method of imparting contrast to a microscope object

Assignee: Ernst Leitz Wetzlar GmbH
•
Filing: 1974-06-07
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Granted: 1976-06-08
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Expires: 1994-06-07
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Abstract

Abstract The method of imparting contrast to the surface of an object to be viewed microscopically comprises the steps of introducing the object into a vacuum chamber, connecting the object to the positive pole of a high voltage d.c. source, evacuating the chamber, bombarding the surface of the object with a gas-concentrated electron-ion beam, and feeding into the chamber a gas which reacts chemically with the bombarded object surface. Under the effect of the electron beam and negative or neutralized ions a reaction layer then forms which is characteristic of the component parts of the object material. This layer, after the conclusion of the contrasting process can be observed and evaluated under a microscope.

Inventors

  • 👤 Gunter Bartz

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-24 16:11
CPC Classifications
H; H01; H01H; H01H37/00; H01H37/02; H01H37/32; H01H37/34; H01J; H01J2237/00; H01J2237/30; H01J2237/31; H01J2237/3151

Claims Analysis

Total Claims: 6
Claim 1
Independent Claim 163 words
A method of imparting contrast to a surface portion of an object to be investigated microscopically, comprising the steps of: a. introducing the object into a non-grounded vacuum chamber; b. connecting the object to the positive pole of a regulatable high voltage direct current source; c. evacuating the chamber to a partial vacuum; d. bombarding a surface portion of the object with a combined electron-ion gun of the gas discharging type mounted in the wall of the vacuum chamber opposite the object, said combined electron-ion gun having a cathode connected to a negative pole of the direct current source; e. regulating the gas source connected to the ion gun of the combined electron-ion gun for bombarding the surface portion of the object with a gas concentrated electron-ion beam; f. adjusting the gas concentrated electron-ion beam to impinge on the object which is electrically conducting; and g. feeding into the vacuum chamber gas which reacts chemically with the bombarded surface portion of the object.
Claim 2
Independent Claim 163 words
A method of imparting contrast to a surface portion of an object to be investigated microscopically, comprising the steps of: a. introducing the object into a non-grounded vacuum chamber; b. connecting the object to the positive pole of a regulatable high voltage direct current source; c. evacuating the chamber to a partial vacuum; d. bombarding a surface portion of the object with a combined electron-ion gun of the gas discharging type mounted in the wall of the vacuum chamber opposite the object, said combined electron-ion gun having a cathode connected to a negative pole of the direct current source; e. regulating the gas source connected to the ion gun of the combined electron-ion gun for bombarding the surface portion of the object with a gas concentrated electron-ion beam; f. adjusting the gas concentrated electron-ion beam to impinge on the object which is electrically conducting; and g. feeding into the vacuum chamber gas which reacts chemically with the bombarded surface portion of the object.
Claim 3
Dependent Claim 19 words
A method as claimed in claim 1, wherein different gases are fed into the chamber one after the other.
Claim 4
Dependent Claim 21 words
A method as claimed in claim 1, wherein a mixture of different gases is fed into the chamber during the bombardment.
Claim 5
Dependent Claim 22 words
A method as claimed in claim 1, wherein the object is bombarded simultaneously by beams derived from a plurality of electron-ion-beam sources.
Claim 6
Dependent Claim 22 words
A method as claimed in claim 1, wherein during the bombardment the object is displaced relative to the or each bombarding beam.

References Cited (Backward Citations)

US2935418A Cited
US3171539A Cited
US3308049A Cited
US3418229A Cited
US3600122A Cited
US3477936A Cited
US3604970A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1979-06-08 1979-12-08 1980-06-08 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1983-06-08 1983-12-08 1984-06-08 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1987-06-08 1987-12-08 1988-06-08 $7700.00 Window Closed / Lapsed

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