US3961099A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Thermally stable positive polycarbonate electron beam resists
Assignee: International Business Machines Corp
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Filing: 1974-09-26
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Granted: 1976-06-01
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Expires: 1994-09-26
Abstract
Abstract Electron beam positive resists which are sensitive to electron beam radiation and simultaneously thermally stable are prepared using polycarbonates.
Inventors
- 👤 Edward Gipstein
- 👤 Wayne M. Moreau
- 👤 Omar U. Need, III
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 09:31
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/30; G03F7/004; G03F7/039; Y; Y10; Y10S; Y10S430/00; Y10S430/143
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
54 words
A process for forming an image with a high resolution radiation sensitive thermally stable positive resist comprising the steps of: 1. forming on a substrate a film comprising a propanebis-4-phenyl polycarbonate, 2. exposing said film in a predetermined pattern to radiation, and 3. removing the radiation exposed position of said film with a solvent.
Claim 2
Dependent Claim
54 words
A process for forming an image with a high resolution radiation sensitive thermally stable positive resist comprising the steps of: 1. forming on a substrate a film comprising a propanebis-4-phenyl polycarbonate, 2. exposing said film in a predetermined pattern to radiation, and 3. removing the radiation exposed position of said film with a solvent.
Claim 3
Dependent Claim
24 words
A process as claimed in claim 1 wherein the radiation is low energy electron beam radiation of from about 10 to about 30 KeV.
Claim 4
Dependent Claim
29 words
A process as claimed in claim 1 wherein a thin film of metal is deposited on the polycarbonate film after exposure to radiation and before treatment with a solvent.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1979-06-01 | 1979-12-01 | 1980-06-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1983-06-01 | 1983-12-01 | 1984-06-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1987-06-01 | 1987-12-01 | 1988-06-01 | $7700.00 | Window Closed / Lapsed |