US3949463A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of applying an anti-reflective coating to a solar cell
Assignee: Comsat Corp
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Filing: 1973-02-13
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Granted: 1976-04-13
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Expires: 1993-02-13
Abstract
Abstract A method of applying an anti-reflective coating, particularly a metal oxide coating to a solar cell during the manufacture of such cell.
Inventors
- 👤 Joseph Lindmayer
- 👤 James F. Allison
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 06:51
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/091; H; H10; H10F; H10F77/00; H10F77/30; H10F77/306; H10F77/311; H10F77/315; Y; Y02; Y02E; Y02E10/00; Y02E10/50
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
111 words
The method of applying to a surface of a silicon wafer, adapted for use as a solar cell, an anti-reflective coating and a desired pattern of a metal electrode for current collection, comprising the steps of: a. coating said surface with a first metal layer of the type which can be oxidized to form said anti-reflective coating, b. forming on top of said coating a metal electrode having said desired pattern, said first metal layer having parts thereof exposed which are not covered by said metal electrode pattern, and c. oxidizing the said exposed parts of said first metal layer to convert said exposed parts into a metal oxide anti-reflective coating.
Claim 2
Independent Claim
111 words
The method of applying to a surface of a silicon wafer, adapted for use as a solar cell, an anti-reflective coating and a desired pattern of a metal electrode for current collection, comprising the steps of: a. coating said surface with a first metal layer of the type which can be oxidized to form said anti-reflective coating, b. forming on top of said coating a metal electrode having said desired pattern, said first metal layer having parts thereof exposed which are not covered by said metal electrode pattern, and c. oxidizing the said exposed parts of said first metal layer to convert said exposed parts into a metal oxide anti-reflective coating.
Claim 3
Dependent Claim
89 words
The method of claim 1 wherein the step of forming a metal electrode comprises: a. forming on said first metal layer a photoresist mask having openings therein corresponding to said desired pattern, b. coating said photoresist mask and the parts of said first metal layer not covered by said photoresist mask, with a second layer of metal suitable for use as an electrode for said solar cell, and c. lifting off and removing said photoresist mask and the portions of said second layer of metal overlying said photoresist mask.
Claim 4
Dependent Claim
58 words
The method of claim 2 wherein the step of forming a photoresist mask comprises the ordered steps of placing a photoresist material on said first metal layer, exposing the photoresist material to light through a mask means having a pattern identical to said desired pattern, developing said photoresist material previously exposed to light and removing said developed photoresist.
Claim 5
Dependent Claim
22 words
The method of claim 2 further comprising, prior to said oxidation step, the step of electroplating silver onto said patterned metal electrode.
Claim 6
Dependent Claim
15 words
The method of claim 4 wherein said layer of second metal comprises chromium and gold.
Claim 7
Dependent Claim
12 words
The method of claim 5 wherein said first metal layer is niobium.
Claim 8
Dependent Claim
12 words
The method of claim 5 wherein said first metal layer is tantalum.
Claim 9
Dependent Claim
12 words
The method of claim 5 wherein said first metal layer is titanium.
Claim 10
Dependent Claim
12 words
The method of claim 5 wherein said first metal layer is yttrium.
Claim 11
Dependent Claim
12 words
The method of claim 5 wherein said first metal layer is erbium.
Claim 12
Dependent Claim
12 words
The method of claim 5 wherein said first metal layer is manganese.
Claim 13
Dependent Claim
12 words
The method of claim 5 wherein said first metal layer is thorium.
Claim 14
Dependent Claim
12 words
The method of claim 5 wherein said first metal layer is tellurium.
Claim 15
Dependent Claim
34 words
The method as claimed in claim 6 wherein the step of oxidizing comprises heating the solar cell in the presence of oxygen to a temperature in the range of 350°-450° centigrade for 3-15 minutes.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1979-04-13 | 1979-10-13 | 1980-04-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1983-04-13 | 1983-10-13 | 1984-04-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1987-04-13 | 1987-10-13 | 1988-04-13 | $7700.00 | Window Closed / Lapsed |