Abstract The disclosure relates to the growth of single crystal material from polycrystalline material by combining the pedestal and cold crucible techniques to yield a method of producing large, high purity single crystals on a commercial scale. The method includes feeding a bar of polycrystalline material, such as silicon, into a cold cage which can be a cold silver crucible or the like having an aperture in the bottom thereof to permit insertion of the polycrystalline feed bar. An RF coil surrounds the cold cage and melts the silicon as it reaches into the cage, the RF coil providing a temperature to the silicon material which is slightly above the melting point thereof. A rod of single crystal material, the same as the feed bar, is positioned in the melt from the top surface of the cold cage and acts as a seed crystal. The single crystal rod is then pulled upwardly from the cage while polycrystalline silicon is fed into the cage through the aperture in the bottom thereof. By continuously forcing the polycrystalline rod into the cage and pulling a rod at the top of the cage, a large single crystal can be grown while maintaining only a small melt volume. The diameter of the single crystal rod being pulled will have a relation to the upper diameter of the cold cage as well as the ratio of the feed rate of the polycrystalline bar relative to the pull rate of the single crystalline bar.
A method of forming single crystal material from polycrystalline material which comprises the steps of a. Providing an electrically conducting cold cage container having top and bottom apertures surrounded by RF coils, b. feeding a rod of polycrystalline material into said bottom aperture, c. inducing an electrical current in said container and said material to melt and levitate said material within said container, and to maintain said material free of said container, d. placing a seed crystal in said metl to initiate crystal growth, and e. continuing the crystal growth by pulling said seed away from said melt at a controlled rate while maintaining levitation of said melt.
Claim 2
Independent Claim
108 words
A method of forming single crystal material from polycrystalline material which comprises the steps of a. Providing an electrically conducting cold cage container having top and bottom apertures surrounded by RF coils, b. feeding a rod of polycrystalline material into said bottom aperture, c. inducing an electrical current in said container and said material to melt and levitate said material within said container, and to maintain said material free of said container, d. placing a seed crystal in said metl to initiate crystal growth, and e. continuing the crystal growth by pulling said seed away from said melt at a controlled rate while maintaining levitation of said melt.
Claim 3
Dependent Claim
34 words
A method as set forth in claim 1 wherein the rate of feed of said rod in step (b) and the rate of pulling said seed in step (e) are predetermined and relatively independent.
Claim 4
Dependent Claim
18 words
A method as set forth in claim 1 wherein said rod is silicon and said seed is silicon.
Claim 5
Dependent Claim
18 words
A method as set forth in claim 2 wherein said rod is silicon and said seed is silicon.
Claim 6
Dependent Claim
13 words
A method as set forth in claim 4 wherein said container is silver.
Claim 7
Dependent Claim
21 words
A method as set forth in claim 4 wherein said electrical current is induced by an RF coil surrounding said container.
Claim 8
Dependent Claim
21 words
A method as set forth in claim 5 wherein said electrical current is induced by an RF coil surrounding said container.