US3916201A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electron microscope having a plurality of coaxial cryogenically cooled lenses
Assignee: Siemens AG
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Filing: 1974-02-07
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Granted: 1975-10-28
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Expires: 1994-02-07
Abstract
Abstract The present invention relates to a lens system for particle radiation devices, particularly electron microscopes, which includes means for adjusting the particle beam, a plurality of superconducting cryogenically cooled magnetic lenses, a cryostat in which the lenses are received and a central supporting tube in the cryostat on which the lenses are mounted. An electron microscope produced according to the present invention is substantially free from thermal drift phenomena, is substantially insensitive to mechanical vibrations, can be readily protected against the influence of external magnetic fields, and can be assembled and disassembled conveniently for cleaning or exchanging parts.
Inventors
- 👤 Karl-Heinz Herrmann
- 👤 Reinhard Weyl
- 👤 Helmut Zerbst
- 👤 Isolde Dietrich
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 13:11
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/04; H01J37/09; H01J37/10; H01J37/14; H01J37/141; H01J37/1416; H01J37/147; H01J37/1471; Y; Y10; Y10S; Y10S505/00; Y10S505/825; Y10S505/871
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
46 words
A lens system for a beam of particle radiation comprising means for adjusting the particle beam, a plurality of superconducting cryogenically cooled magnetic lenses, a cryostat in which said lenses are received, and a central support tube in said cryostat on which said lenses are mounted.
Claim 2
Dependent Claim
46 words
A lens system for a beam of particle radiation comprising means for adjusting the particle beam, a plurality of superconducting cryogenically cooled magnetic lenses, a cryostat in which said lenses are received, and a central support tube in said cryostat on which said lenses are mounted.
Claim 3
Dependent Claim
22 words
The system of claim 1 in which said magnetic lenses include an objective lens and an intermediate lens having coinciding optical axes.
Claim 4
Dependent Claim
18 words
The lens system of claim 1 in which there is at least one diaphragm within said support tube.
Claim 5
Dependent Claim
43 words
The lens system according to claim 1, wherein said lens system includes at least one magnetic lens with ferromagnetic pole pieces arranged inside said support tube, said support tube in proximity to said pole pieces being composed at least partially of ferromagnetic material.
Claim 6
Dependent Claim
46 words
A lens system according to claim 1 in which shielding elements of superconducting materials associated with at least one magnetic lens are located inside said support tube, and the support tube in the vincinity of said shielding elements is composed at least partially of superconducting material.
Claim 7
Dependent Claim
18 words
A lens system according to claim 1 which includes at least one adjusting system within said support tube.
Claim 8
Dependent Claim
21 words
A lens system according to claim 1 including at least one magnetic lens with pole pieces located outside said support tube.
Claim 9
Dependent Claim
21 words
A lens system according to claim 1 including at least one magnetic lens with shielding elements located outside said support tube.
Claim 10
Dependent Claim
32 words
A lens system according to claim 1 including at least one adjusting system located outside said support tube, said support tube being neither ferromagnetic nor superconducting in proximity to said adjusting system.
Claim 11
Dependent Claim
31 words
A lens system according to claim 1 which includes a sleeve of electrically conductive material in said support tube, said sleeve being closely fit into said support tube but removable therefrom.
Claim 12
Dependent Claim
16 words
A lens system according to claim 10 in which a diaphragm is positioned within said sleeve.
Claim 13
Dependent Claim
19 words
A lens system according to claim 10 in which a pair of pole pieces is positioned within said sleeve.
Claim 14
Dependent Claim
17 words
A lens system according to cLaim 10 in which an adjusting system is positioned within said sleeve.
Claim 15
Dependent Claim
49 words
A lens system according to claim 1 including an objective lens, a plate in proximity to said objective lens, said plate containing at least one radial bore for the introduction of a specimen, and containing at least one axially extending bore for the circulation of coolant in said cryostat.
Claim 16
Dependent Claim
20 words
A lens system according to claim 1 including several magnetic lenses connected in series with respect to their energizing means.
Claim 17
Dependent Claim
55 words
A lens arrangement which includes a plurality of lens systems in superimposed relation, each of said lens systems comprising means for adjusting a particle beam, a plurality of superconducting cryogenically cooled magnetic lenses, a cryostat in which said lenses are received, and a central support tube in said cryostat on which said lenses are mounted.
Claim 18
Dependent Claim
55 words
A lens arrangement which includes a plurality of lens systems in superimposed relation, each of said lens systems comprising means for adjusting a particle beam, a plurality of superconducting cryogenically cooled magnetic lenses, a cryostat in which said lenses are received, and a central support tube in said cryostat on which said lenses are mounted.
Claim 19
Dependent Claim
45 words
A lens arrangement according to claim 16 in which said lens arrangement includes a condenser lens system, a lens system consisting of an objective lens and a first intermediate lens, and a magnification lens system including at least one intermediate lens and a projective lens.
Claim 20
Dependent Claim
25 words
A lens arrangement according to claim 16 in which the individual lens systems are assembled so as to provide a single internal space for coolant.
Claim 21
Dependent Claim
19 words
A lens arrangement according to claim 16 in which all the lens systems are disposed in a single cryostat.
Claim 22
Dependent Claim
20 words
A lens arrangement according to claim 16 in which all the lens systems are arranged on a single support tube.
Claim 23
Dependent Claim
40 words
The lens arrangement according to claim 16 which includes ferromagnetic polepieces of at least one magnetic lens arranged inside of the support tube, the support tube in proximity to said pole pieces being composed at least partially of ferromagnetic material.
Claim 24
Dependent Claim
46 words
A lens arrangement according to claim 16 in which shielding elements of superconducting materials associated with at least one magnetic lens are located inside said support tube, and the support tube in the vicinity of said shielding elements is composed at least partially of superconducting material.
Claim 25
Dependent Claim
18 words
A lens arrangement according to claim 16 which includes at least one adjusting system within said support tube.
Claim 26
Dependent Claim
31 words
A lens arrangement according to claim 16 which includes a sleeve of electrically conductive material in said support tube, said sleeve being closely fit into said support tube but removable therefrom.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-10-27 | 1979-04-28 | 1979-10-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-10-27 | 1983-04-28 | 1983-10-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-10-27 | 1987-04-28 | 1987-10-28 | $7700.00 | Window Closed / Lapsed |