US3908263A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Separate interdigital electrodes without using any special photolithographic techniques
Assignee: RCA Corp
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Filing: 1974-11-14
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Granted: 1975-09-30
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Expires: 1994-11-14
Abstract
Abstract A plurality of substantially parallel, spaced, raised strips are provided on a surface of a substrate. The strips are disposed in such a manner wherein interdigitated electrodes are formed through one evaporation step of a metal from a predetermined angle.
Inventors
- 👤 Ralph Jerome Matarese
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 21:32
CPC Classifications
H; H10; H10D; H10D44/00; H10D44/40; H10D44/45; H10D64/00; H10D64/01; H10D64/011; H10P; H10P50/00; H10P50/60; H10P50/64; H10P50/642; H10P50/646; H10W; H10W20/00; H10W20/40; H05; H05K; H05K3/00; H05K3/10; H05K3/14; H05K3/146; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
253 words
In a method of forming interdigitated electrodes comprising the steps of: a. forming a plurality of substantially parallel, spaced, raised strips on a surface of a substrate with said strips disposed such that at one end of said strips the end portions of one set of alternate strips project beyond the end portions of the remaining set of alternate strips while at the other end of said strips the end portions of said remaining set of alternate strips project beyond the end portions of said one set of alternate strips, each one of said strips having a surface spaced from said surface of the substrate with a portion of the strip surface being spaced a greater distance from said substrate surface than the remaining portion of the strip surface, b. creating a flow of metal vapors from a source which is spaced from said substrate surface with the flow of vapors extending along planes which are at an angle less than 90* with respect to said substrate surface, and c. depositing said metal vApors on said strip surfaces and substrate surface so as to form through shadow effect deposition a plurality of metal film electrodes on said strip surfaces with the electrodes on the one set of alternate strips being connected by a metal film on the substrate surface at the one end of the strips and the electrodes on the remaining set of alternate strips being connected by a metal film on the substrate surface at the other end of the strips.
Claim 2
Dependent Claim
253 words
In a method of forming interdigitated electrodes comprising the steps of: a. forming a plurality of substantially parallel, spaced, raised strips on a surface of a substrate with said strips disposed such that at one end of said strips the end portions of one set of alternate strips project beyond the end portions of the remaining set of alternate strips while at the other end of said strips the end portions of said remaining set of alternate strips project beyond the end portions of said one set of alternate strips, each one of said strips having a surface spaced from said surface of the substrate with a portion of the strip surface being spaced a greater distance from said substrate surface than the remaining portion of the strip surface, b. creating a flow of metal vapors from a source which is spaced from said substrate surface with the flow of vapors extending along planes which are at an angle less than 90* with respect to said substrate surface, and c. depositing said metal vApors on said strip surfaces and substrate surface so as to form through shadow effect deposition a plurality of metal film electrodes on said strip surfaces with the electrodes on the one set of alternate strips being connected by a metal film on the substrate surface at the one end of the strips and the electrodes on the remaining set of alternate strips being connected by a metal film on the substrate surface at the other end of the strips.
Claim 3
Dependent Claim
22 words
A method in accordance with claim 1 in which the flow of vapors extends along planes which are parallel to said strips.
Claim 4
Dependent Claim
49 words
A method in accordance with claim 2 in which the step of forming said strips includes forming said strips such that the end surfaces of the one set of alternate strips are respectively coplanar and the end surfaces of the remaining set of alternate strips are also respectively coplanar.
Claim 5
Dependent Claim
40 words
A method in accordance with claim 2 in which the step of forming said strips includes forming said strips such that said portion of said strip surface is disposed on opposite ends of said remaining portion of the strip surface.
Claim 6
Dependent Claim
79 words
A method in accordance with claim 4 in which the step of forming said strips includes forming said strips with at least one of said strips having a greater length than the lengths of the remaining strips such that when the metal vapors are deposited all of the metal film electrodes on the one set of alternate strips and all of the metal film electrodes on the remaining set of alternate strips are respectively connected by the metal film.
Claim 7
Dependent Claim
64 words
A method in accordance with claim 4 in which the step of forming said strips comprises: forming a plurality of substantially parallel, spaced, raised strips on the surface of the substrate with said strips of the same thickness along their lengths, and then increasing the thickness of each one of said strips along portions thereof so as to form said surface of said strips.
Claim 8
Dependent Claim
41 words
A method in accordance with claim 6 in which the step of forming said strips of the same thickness comprises: forming a plurality of masking strips on said substrate, and then removing portions of said substrate extending between said masking strips.
Claim 9
Dependent Claim
36 words
A method in accordance with claim 7 in which the step of forming said surface of each one of said strips comprises removing additional portions of said substrate extending between said strips of the same thickness.
Claim 10
Dependent Claim
18 words
A method in accordance with claim 8 in which said portions of said substrate are removed through etching.
Claim 11
Dependent Claim
32 words
A method in accordance with claim 7 in which the step of forming said surface of each one of said strips comprises applying additional material onto said strips of the same thickness.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-09-29 | 1979-03-31 | 1979-09-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-09-29 | 1983-03-31 | 1983-09-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-09-29 | 1987-03-31 | 1987-09-30 | $7700.00 | Window Closed / Lapsed |