US3902240A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Integrated cathode and channel plate multiplier
Assignee: United States Department of the Army
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Filing: 1974-07-03
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Granted: 1975-09-02
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Expires: 1994-07-03
Abstract
Abstract A microchannel plate in which a novel input electrode is made of one material that integrally functions as a photocathode as well as a conductive layer. An output electrode is made from vacuum deposited thin metallic film of, for example, nickel, chromium, inconel, nicrome, etc. The input electrode may be made of some multi-alkali photocathode or made of a semiconductor, such as a gallium arsenide single crystal film. The microchannel plate is ordinarily made of glass. However, the plate may be made of a highly resistive semiconductor, such as gallium phosphide. The input electrode may further contain any conventionally available photocathode, such as S-20, or a single crystalline semiconductor epitaxially grown on the input side of a semiconductor microchannel plate.
Inventors
- 👤 Keun Ho Chang
- 👤 John Rennie
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 18:39
CPC Classifications
H; H01; H01J; H01J43/00; H01J43/04; H01J43/06; H01J43/18; H01J43/24; H01J43/246; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
144 words
A METHOD OF FABRICATING A MICROCHANNEL PLATE ELECTRON MULTIPLIER COMPRISING THE STEPS OF: PROVIDING A MICROCHANNEL PLATE WAFER HAVING AN INPUT SIDE AND AN OUTPUT SIDE WITH A PLURALITY OF MICROCHANNELS THERETHROUGH, CHEMICALLY ETCHING SAID INPUT SIDE OF THE WAFER TO FORM OVAL SHAPE SOLID PORTIONS AROUND THE PLURALITY OF MICROCHANNELS AT THE INPUT SIDE, EPITAXIALLY DEPOSITING AN INPUT ELECTRODE MATERIAL CONTAINING PHOTOCATHODIC MATERIAL THEREIN OVER SAID OVAL SHAPE SOLID PORTIONS FORMING A BEVELED EDGE AROUND EACH OF SAID PLURALITY OF MICROCHANNELS, DEPOSITING AN OUTPUT ELECTRODE ON SAID OUTPUT SIDE OF SAID WAFER, PROVIDING A DIRECT CURRENT VOLTAGE SOURCE, AND CONNECTING SAID VOLTAGE SOURCE ACROSS SAID INPUT AND OUTPUT ELECTRODES FOR PROVIDING ELECTRON ACCELERATION BIAS ACROSS SAID WAFER WHEREBY PHOTONS IMPINGING ON SAID INPUT ELECTRODE CAUSE ELECTRONS TO BE EMITTED THEREFROM AND ACCELERATED THROUGH SAID PLURALITY OF MICROCHANNELS AND OUT OF SAID OUTPUT ELECTRODE.
Claim 2
Independent Claim
144 words
A METHOD OF FABRICATING A MICROCHANNEL PLATE ELECTRON MULTIPLIER COMPRISING THE STEPS OF: PROVIDING A MICROCHANNEL PLATE WAFER HAVING AN INPUT SIDE AND AN OUTPUT SIDE WITH A PLURALITY OF MICROCHANNELS THERETHROUGH, CHEMICALLY ETCHING SAID INPUT SIDE OF THE WAFER TO FORM OVAL SHAPE SOLID PORTIONS AROUND THE PLURALITY OF MICROCHANNELS AT THE INPUT SIDE, EPITAXIALLY DEPOSITING AN INPUT ELECTRODE MATERIAL CONTAINING PHOTOCATHODIC MATERIAL THEREIN OVER SAID OVAL SHAPE SOLID PORTIONS FORMING A BEVELED EDGE AROUND EACH OF SAID PLURALITY OF MICROCHANNELS, DEPOSITING AN OUTPUT ELECTRODE ON SAID OUTPUT SIDE OF SAID WAFER, PROVIDING A DIRECT CURRENT VOLTAGE SOURCE, AND CONNECTING SAID VOLTAGE SOURCE ACROSS SAID INPUT AND OUTPUT ELECTRODES FOR PROVIDING ELECTRON ACCELERATION BIAS ACROSS SAID WAFER WHEREBY PHOTONS IMPINGING ON SAID INPUT ELECTRODE CAUSE ELECTRONS TO BE EMITTED THEREFROM AND ACCELERATED THROUGH SAID PLURALITY OF MICROCHANNELS AND OUT OF SAID OUTPUT ELECTRODE.
Claim 3
Dependent Claim
35 words
A method of fabricating a microchannel plate electron multiplier as set forth in claim 1 wherein said input electrode is made of gallium arsenide single crystal film and said wafer is made of gallium phosphide.
Claim 4
Dependent Claim
26 words
A method of fabricating a microchannel plate electron multiplier as set forth in claim 1 wherein said input electrode is made of some multialkali photocathode material.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-09-01 | 1979-03-03 | 1979-09-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-09-01 | 1983-03-03 | 1983-09-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-09-01 | 1987-03-03 | 1987-09-02 | $7700.00 | Window Closed / Lapsed |