US3899338A
Expired / Lapsed
US
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Photosensitive material suitable for use as a photoresist
Assignee: HECULES INCORPORATED A CORP OF DE
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Filing: 1974-07-15
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Granted: 1975-08-12
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Expires: 1994-07-15
Abstract
Abstract A photosensitive material and its use as a photoresist, the material comprising otherwise known photosensitive compositions dissolved in a binder which is a suitable polyvinyl compound such as a polyvinyl ester, ketone, acetal, alcohol, or keto ester, suitable polyvinyl compounds being those which are soluble in aliphatic alcohols or in azeotropes of said alcohols with water. In the compositions of this invention the amount of binder must always exceed the total weight of the other solid constituents in order to insure that crystallization of such constituents does not occur. Crystallization of the free radical source, e.g. iodoform, in the film destroys the photographic properties e.g. resolution, speed, and others, necessary for use of the material as a photoresist.
Inventors
- 👤 James M Lewis
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 16:17
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/027; G03F7/032; G03F7/033; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/106; Y10S430/108; Y10S430/11; Y10S430/114; Y10S430/122; Y10S430/126
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
53 words
A PHOTOSENSITIVE MATERIAL SUITABLE FOR USE AS A PHOTORESIST AND CONSISTING ESSENTIALLY OF THE FOLLOWING MTERIALS DISSOLVED IN A RESIN BINDER EXHIBITING A GOOD DEGREE OF SOLUBILITY IN AN ALKANOL SELECTED FROM THE GROUP CONSISTING OF METHANOL, ETHANOL AND PROPANOLS, AND AT LEAST 2% SOLUBILITY IN AN AZEOTROPE OF SAID ALCOHOLS AND WATER,
Claim 2
Dependent Claim
53 words
A PHOTOSENSITIVE MATERIAL SUITABLE FOR USE AS A PHOTORESIST AND CONSISTING ESSENTIALLY OF THE FOLLOWING MTERIALS DISSOLVED IN A RESIN BINDER EXHIBITING A GOOD DEGREE OF SOLUBILITY IN AN ALKANOL SELECTED FROM THE GROUP CONSISTING OF METHANOL, ETHANOL AND PROPANOLS, AND AT LEAST 2% SOLUBILITY IN AN AZEOTROPE OF SAID ALCOHOLS AND WATER,
Claim 3
Dependent Claim
6 words
AT LEAST ONE POLYMERIZABLE N-VINYL MONOMER,
Claim 4
Dependent Claim
6 words
AT LEAST ONE POLYMERIZABLE N-VINYL MONOMER,
Claim 5
Dependent Claim
89 words
AT LEAST ONE ACTIVATOR FOR ENCHANTING THE EFFECT OF EXPOSING SAID MONOMER TO A SUITABLE DOSE OF ELECTROMAGNETIC READIATION AT LEAST SUFFICIENLY TO INTIATE POLYMERIZATION OF SAID MONOMER, SAID ACTIVATOR BEING SELECTED FROM THE GROUP CONSISTING OF: ORGANIC HALOGEN COMPOUNDS IN WHICH AT LEAST THREE HALOGEN ATOMS SELECTED FROM THE GROUP CONSISTING OF CL, BR AND 1 ARE ATTACHED TO A SINGLE CARBON ATOM, SULFONYL CHLORIDES, SULFONYL BROMIDES, SULFENYL CHLORIDES, SULFENYL BROMIDES AND MERCAPTO COMPOUNDS WHEREIN THE MARCAPTO GROUP IS ATTACHED TO ACARBON ATOM IN A HETEROCYCLIC NUCLEUS, AND
Claim 6
Dependent Claim
89 words
AT LEAST ONE ACTIVATOR FOR ENCHANTING THE EFFECT OF EXPOSING SAID MONOMER TO A SUITABLE DOSE OF ELECTROMAGNETIC READIATION AT LEAST SUFFICIENLY TO INTIATE POLYMERIZATION OF SAID MONOMER, SAID ACTIVATOR BEING SELECTED FROM THE GROUP CONSISTING OF: ORGANIC HALOGEN COMPOUNDS IN WHICH AT LEAST THREE HALOGEN ATOMS SELECTED FROM THE GROUP CONSISTING OF CL, BR AND 1 ARE ATTACHED TO A SINGLE CARBON ATOM, SULFONYL CHLORIDES, SULFONYL BROMIDES, SULFENYL CHLORIDES, SULFENYL BROMIDES AND MERCAPTO COMPOUNDS WHEREIN THE MARCAPTO GROUP IS ATTACHED TO ACARBON ATOM IN A HETEROCYCLIC NUCLEUS, AND
Claim 7
Dependent Claim
90 words
at least one activator for enhancing the effect of exposing said monomer to a suitable dose of electromagnetic radiation at least sufficiently to initiate polymerization of said monomer, said activator being selected from the group consisting of: organic halogen compounds in which at least three halogen atoms selected from the group consisting of Cl, Br and I are attached to a single carbon atom, sulfonyl chlorides, sulfonyl bromides, sulfenyl chlorides, sulfenyl bromides and mercapto compounds wherein the mercapto group is attached to a carbon atom in a heterocyclic nucleus; and
Claim 8
Dependent Claim
90 words
at least one activator for enhancing the effect of exposing said monomer to a suitable dose of electromagnetic radiation at least sufficiently to initiate polymerization of said monomer, said activator being selected from the group consisting of: organic halogen compounds in which at least three halogen atoms selected from the group consisting of Cl, Br and I are attached to a single carbon atom, sulfonyl chlorides, sulfonyl bromides, sulfenyl chlorides, sulfenyl bromides and mercapto compounds wherein the mercapto group is attached to a carbon atom in a heterocyclic nucleus; and
Claim 9
Dependent Claim
26 words
The photosensitive material of claim 1 including in addition a triaryl compound of an element selected from the group consisting of Sb, Bi, As and P.
Claim 10
Dependent Claim
14 words
The photosensitive material of claim 1 including in addition at least one optical sensitizer.
Claim 11
Dependent Claim
8 words
a substituted phenol represented by the general formula:
Claim 12
Dependent Claim
8 words
a substituted phenol represented by the general formula:
Claim 13
Dependent Claim
8 words
A SUBSTITUTED PHENOL REPRESENTED BY THE GENERAL FORMULA:
Claim 14
Dependent Claim
8 words
A SUBSTITUTED PHENOL REPRESENTED BY THE GENERAL FORMULA:
Claim 15
Dependent Claim
15 words
The photosensitive material of claim 1 including in addition at least one color forming dye.
Claim 16
Dependent Claim
14 words
The photosensitive material of claim 1 wherein the polymerizable monomer is an N-vinyl carbazole.
Claim 17
Dependent Claim
38 words
The photosensitive material of claim 1 wherein the activator is an organic halogen compound in which at least three halogen atoms selected from the group consisting of Cl, Br and I are attached to a single carbon atom.
Claim 18
Dependent Claim
11 words
The photosenssitive material of claim 6 wherein the activator is CHI3.
Claim 19
Dependent Claim
18 words
The photosensitive material of claim 1 dissolved in up to 10, 000 parts by weight of a solvent.
Claim 20
Dependent Claim
28 words
The photosensitive material of claim 1 wherein the binder comprises at least about twice the weight of the sum of the weights of constituents (1), (2) and (3).
Claim 21
Dependent Claim
33 words
The photosensitive material of claim 1 wherein the binder is a polyvinyl resin with a molecular weight in excess of about 100, 000 selected from the group consisting of polyvinylbutyral, polyvinylpropionate and polyvinylbutyrate.
Claim 22
Dependent Claim
17 words
The photosensitive material of claim 1 wherein the binder is a copolymer of vinyl alcohol and vinylacetate.
Claim 23
Dependent Claim
17 words
The photosensitive material of claim 1 wherein the binder is a copolymer of vinyl chloride and vinylacetate.
Claim 24
Dependent Claim
18 words
The photosensitive material of claim 1 wherein the binder is a copolymer vinyl butyral, vinylalcohol and vinyl acetate.
Claim 25
Dependent Claim
17 words
The photosensitive material of claim 1 wherein the binder is a copolymer of vinyl ketone and styrene.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-08-11 | 1979-02-10 | 1979-08-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-08-11 | 1983-02-10 | 1983-08-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-08-11 | 1987-02-10 | 1987-08-12 | $7700.00 | Window Closed / Lapsed |