Coating semiconductor surfaces

Claim 2

A SEMICONDUCTOR BODY OF AN ELEMENT OF GROUP 1V OF THE PERIODIC WHICH TABLE OR A COMPOUN OF ELEMENTS OF GROUPS III AND V OF THE PERIODIC TABLE HAVING A SUSRFACE COATED WITH A PROTECTIVE OXIDE LAYER INCLUDING AT LEAST ONE ORGANIC COLOURING AGENT, THE COLORING AGENT HAVING A MOLECULAR CONFIGURATION WITH CONJUGATED DOUBLE BONDS AND BEING A MOLECULAR OF A CLASS WHICH PROMOTES OXIDATION ON EXPOSURE TO LIGHT RADIATION HAVING A WAVELENGTH OF FROM 0.01 MICRON TO 1 MICRON.

Claim 3

A coated semiconductor surface according to claim 1 wherein the oxide layer further includes a chelate-forming substance or chelate with ionizable foreign matter.

Claim 4

A coated semiconductor surface according to claim 1 wherein on the oxide layer is a layer of a polymeric or polycondensate substance including an organic coloring agent and at least on chelate former.

Claim 5

A coated semiconductor surface according to claim 2 wherein at least one organic coloring agent which promotes oxidation is also a chelate-former.

Claim 6

A process for providing a protective oxide coating on a surface of a semiconductor body of an element of Group IV of the periodic table or a compound of elements of Groups III and V of the periodic table comprising the steps of: wetting said surface of said semiconductor body with a liquid solvent containing molecUlar oxygen and having dissolved therein at least one organic coloring agent which has a molecular configuration with conjugated double bonds, promotes oxidation of the semiconductor surface on exposure to light energy and is soluble in the liquid solvent to the extent of about 10 2 mol per liter or less; and oxidizing the semiconductor surface by exposing the organic coloring agent dissolved in the liquid solvent to the light energy required for oxidation.

Claim 7

A process for providing a protective oxide coating on a surface of a semiconductor body of an element of Group IV of the periodic table or a compound of elements of Groups III and V of the periodic table comprising the steps of: wetting said surface of said semiconductor body with a liquid solvent containing molecUlar oxygen and having dissolved therein at least one organic coloring agent which has a molecular configuration with conjugated double bonds, promotes oxidation of the semiconductor surface on exposure to light energy and is soluble in the liquid solvent to the extent of about 10 2 mol per liter or less; and oxidizing the semiconductor surface by exposing the organic coloring agent dissolved in the liquid solvent to the light energy required for oxidation.

Claim 8

A process according to claim 5 wherein the liquid solvent is a member selected from the group consisting of water, di(lower)alkylketone and lower alkanol.

Claim 9

A process according to claim 5 wherein the light energy comprises radiation having a wavelength in the range of from 0.01 micron to 1 micron.

Claim 10

A coated semiconductor surface according to claim 1 wherein said organic coloring agent which promotes oxidation is a member selected from the group consisting of a porphyrin coloring agent, a polymethine coloring agent, a thiazine coloring agent and a fluorane coloring agent.

Claim 11

A process according to claim 5 wherein the liquid solvent has dissolved therein at least one organic additive means for binding foreign ions by forming a chelate therewith and further comprising heating the semiconductor surface.

Claim 12

A process according to claim 5 wherein said at least one coloring agent which promotes oxidation is also a chelate-former.

Claim 13

A process according to claim 5 which comprises exposing the organic coloring agent dissolved in the liquid solvent to the light energy required for oxidation and then heat-treating the thus-exposed product, and wherein the organic coloring agent photosensitizes oxidation of the semiconductor surface, and the liquid solvent has a capacity for containing molecular oxygen, is a solvent for the organic coloring agent, is capable of transmitting light of a wavelength suitable for activating the organic coloring agent and contains a sufficient supply of oxygen for reaction with the organic coloring agent.

Claim 14

A process according to claim 5 wherein said at least one organic coloring agent which promotes oxidation is a member selected from the group consisting of a porphyrin coloring agent, a polymethine coloring agent, a thiazine coloring agent and a fluorane coloring agent.