US3892571A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Photomasks
Assignee: Zlafop Pri Ban of
•
Filing: 1973-07-05
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Granted: 1975-07-01
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Expires: 1993-07-05
Abstract
Abstract A photographic material is produced for use in the direct production of photomasks with photographic material comprises I. A GLASS SUBSTRATE; II. A LAYER OF METAL OR METAL OXIDE DEPOSITED ON SAID GLASS SUBSTRATE; III. A PHOTORESIST DEPOSITED ON SAID LAYER OF METAL OR METAL OXIDE; IV. A LAYER OF SYNTHETIC RESIN DEPOSITED ON SAID PHOTORESIST; AND V. A LAYER OF LIGHT-SENSITIVE SILVER HALIDE DEPOSITED BY EVAPORATION ON THE SYNTHETIC RESIN.
Inventors
- 👤 Vasil Dragomirov Simeonov
- 👤 Borislav Dimitrov Mednikarov
- 👤 Jordan Petrov Malinowski
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 03:34
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/20; G03F7/2002; G03F7/2014; G03F7/2016; G03C; G03C1/00; G03C1/494; G03C1/496; G03C1/4965; G03F1/00; G03F1/50; G03F7/004; G03F7/09; G03F7/095; G03F7/0952; H; H05; H05K; H05K3/00; H05K3/0002; Y; Y10; Y10S; Y10S430/00; Y10S430/136; Y10T; Y10T428/00; Y10T428/26; Y10T428/263; Y10T428/264; Y10T428/265
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
89 words
A PROTOGRAPHIC MATERIAL FOR USE IN THE DIRECT PRODUCTION OF PHOTOMASKS WHICH PHOTOGRAPHIC MATERIAL COMPRISES: I. A GLASS SUBSTRATE, II. A LAYER OF METAL OR METAL OXIDE SELECTED FROM THE GROUP CONSISTING OF NICKEL, CHROMIUM, NICHROME AND IRON OXIDE DEPOSITED ON SAID GLASS SUBSTRATE, III. A PHOTORESIST DEPOSITED ON SAID LAYER OF METAL OR METAL OXIDE, IV. A LAYER OF PHENOL-FORMALDEHYDE RESIN DEPOSITED ON SAID PHOTORESIST, AND V. A LAYER OF OPTICALLY HOMOGENOUS LIGHT-SENSITIVE SILVER HALIDE FROM 0.1 TO 1 MICRON THICK DEPOSITED BY EVAPORATION ON THE SYNTHETIC RESIN.
Claim 2
Dependent Claim
89 words
A PROTOGRAPHIC MATERIAL FOR USE IN THE DIRECT PRODUCTION OF PHOTOMASKS WHICH PHOTOGRAPHIC MATERIAL COMPRISES: I. A GLASS SUBSTRATE, II. A LAYER OF METAL OR METAL OXIDE SELECTED FROM THE GROUP CONSISTING OF NICKEL, CHROMIUM, NICHROME AND IRON OXIDE DEPOSITED ON SAID GLASS SUBSTRATE, III. A PHOTORESIST DEPOSITED ON SAID LAYER OF METAL OR METAL OXIDE, IV. A LAYER OF PHENOL-FORMALDEHYDE RESIN DEPOSITED ON SAID PHOTORESIST, AND V. A LAYER OF OPTICALLY HOMOGENOUS LIGHT-SENSITIVE SILVER HALIDE FROM 0.1 TO 1 MICRON THICK DEPOSITED BY EVAPORATION ON THE SYNTHETIC RESIN.
Claim 3
Dependent Claim
27 words
A photographic material as claimed in claim 1 in which the layer of metal or metal oxide which has been deposited on the glass substrate by evaporation.
Claim 4
Dependent Claim
28 words
A photographic material as claimed in claim 1 in which the layer of metal or metal oxide which has been deposited on the glass substrate by cathode sputtering.
Claim 5
Dependent Claim
29 words
A photographic material as claimed in claim 1, in which the photoresist is a positive photoresist and the synthetic resin is a phenol-formaldehyde resin which is soluble in hydrocarbons.
Claim 6
Dependent Claim
32 words
A photographic material as claimed in claim 1, in which the photoresist is a negative photoresist and the synthetic resin is a phenol-formaldehyde resin which is soluble in ketones, others and alcohols.
Claim 7
Dependent Claim
27 words
A photographic material as claimed in claim 1, in which the layer of synthetic resin contains a dye which absorbs light of wavelength longer than 450 nm.
Claim 8
Dependent Claim
20 words
A photographic material as claimed in claim 6 in which the dye absorbs light of wavelength longer than 400 nm.
Claim 9
Dependent Claim
21 words
A photographic material as claimed in claim 7 in which the dye is an azo-dye, a polymethin or a pyrazolon dye.
Claim 10
Dependent Claim
17 words
A photographic material as claimed in claim 8 in which the dye is chrysoidine, auramine or tartrazin.
Claim 11
Dependent Claim
35 words
A photographic material as claimed in claim 1, in which the silver halide is silver bromide, silver chloride or silver iodide or a combination thereof sensitized with gold-iridium salts or a monoatomic layer of silver.
Claim 12
Dependent Claim
72 words
A method of forming a photographic material as claimed in claim 1 which method comprises depositing on a glass substrate a thin layer of a metal or metal oxide selected from the group consisting of nickel, chromium, Nichrome and iron oxIde, depositing on the metal or metal oxide a photoresist, depositing on the photoresist a layer of phenolformaldehyde resin and depositing by evaporation on the synthetic resin a optically homogenous light-sensitive halide.
Claim 13
Dependent Claim
20 words
A method according to claim 11 in which the thin layer of metal or metal oxide is applied by evaporation.
Claim 14
Dependent Claim
21 words
A method according to claim 11 in which the thin layer of metal or metal oxide is applied by cathode sputtering.
Claim 15
Dependent Claim
16 words
A method according to claim 11 which comprises depositing the photoresist by whirling, dipping or spraying.
Claim 16
Dependent Claim
17 words
A method according to claim 11 which comprises depositing the synthetic resin by whirling, dipping or spraying.
Claim 17
Dependent Claim
22 words
A method according to claim 11 which comprises vacuum evaporating a monoatomic layer of a metal to sensitize the silver halide layer.
Claim 18
Dependent Claim
12 words
A method according to claim 16 in which the metal is silver.
Claim 19
Dependent Claim
25 words
A method according to claim 11 which comprises treating the silver halide layer with a solution of gold-iridium salts to sensitize the silver halide layer.
Claim 20
Dependent Claim
86 words
A method of producing a photomask from a photographic material as claimed in claim 1 which comprises exposing the photographic material, developing on the light-sensitive silver halide layer an image which masks areas of the photoresist, again exposing the photographic material, removing the developed silver and the synthetic resin and developing on the photoresist an image which reveals areas of the metal or metal oxide layer, etching the metal or metal oxide layer and then removing the remainder of the photoresist, to obtain the desired photomask.
Claim 21
Dependent Claim
17 words
The photographic material of claim 1, wherein said silver halide layer is 0.2 to 0.5 microns thick.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-06-30 | 1978-12-30 | 1979-07-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-06-30 | 1982-12-30 | 1983-07-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-06-30 | 1986-12-30 | 1987-07-01 | $7700.00 | Window Closed / Lapsed |