US3890535A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Ion sources
Assignee: Bpifrance Financement SA
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Filing: 1972-10-11
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Granted: 1975-06-17
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Expires: 1992-10-11
Abstract
Abstract The ion source comprises a primary plasma generator constituted by a hot cathode and an anode, between which an arc is produced, and by an intermediate electrode enclosing the arc in proximity to an extraction orifice pierced in the anode. Magnetic field creating means are provided between the intermediate electrode and the extraction orifice, which has a relative small crosssection so that the pressure of the gases occurring inside the primary plasma generator is independent of the pressure existing downstream of the extraction orifice. This pressure downstream of extraction orifice is less than the pressure inside the primary plasma generator. On the downstream side there is an extraction electrode. A fifth electrode is arranged downstream of the extraction orifice of the anode and upstream of the extraction electrode and means are provided for applying to this fifth electrode a positive potential with respect to that of the anode and of adjustable value, which is small in absolute value with respect to the potential of the extraction electrode.
Inventors
- 👤 Guy Gautherin
- 👤 Jean Aubert
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 14:34
CPC Classifications
H; H01; H01J; H01J27/00; H01J27/02; H01J27/08; H01J27/10
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
186 words
Ion source comprising a primary plasma generator constituted by a hot cathode and an anode, between which an arc is produced, said anode defining an extraction orifice, and by an intermediate electrode pinching the arc in proximity to said extraction orifice in the anode, magnetic field producing means creating a magnetic field between the intermediate electrode and the extraction orifice, an extraction Electrode downstream of said anode, said extraction orifice of the anode having a relatively small cross-section so that the pressure of the gases occurring inside said primary plasma generator is independent of the pressure existing downstream of said extraction orifice, said pressure downstream of the extraction orifice being less than said pressure inside the primary plasma generator, said generator comprising a fifth electrode arranged downstream of the extraction orifice of the anode and upstream of the extraction electrode and means for applying to said fifth electrode a potential positive with respect to that of the anode and of adjustable value, said positive potential being small in absolute value compared to the potential of the extraction electrode with respect to that of said fifth electrode.
Claim 2
Dependent Claim
186 words
Ion source comprising a primary plasma generator constituted by a hot cathode and an anode, between which an arc is produced, said anode defining an extraction orifice, and by an intermediate electrode pinching the arc in proximity to said extraction orifice in the anode, magnetic field producing means creating a magnetic field between the intermediate electrode and the extraction orifice, an extraction Electrode downstream of said anode, said extraction orifice of the anode having a relatively small cross-section so that the pressure of the gases occurring inside said primary plasma generator is independent of the pressure existing downstream of said extraction orifice, said pressure downstream of the extraction orifice being less than said pressure inside the primary plasma generator, said generator comprising a fifth electrode arranged downstream of the extraction orifice of the anode and upstream of the extraction electrode and means for applying to said fifth electrode a potential positive with respect to that of the anode and of adjustable value, said positive potential being small in absolute value compared to the potential of the extraction electrode with respect to that of said fifth electrode.
Claim 3
Dependent Claim
18 words
Ion source according to claim 1, wherein the cross-section of said extraction orifice is less than 5 mm2.
Claim 4
Dependent Claim
39 words
Ion source according to claim 2, wherein the fifth electrode is in the form of an enclosure including an inlet aperture, arranged adjacent the extraction orifice without intervening expansion space but leaving an insulation space, and an outlet aperture.
Claim 5
Dependent Claim
40 words
Ion source according to claim 1, wherein the fifth electrode is in the form of an enclosure including an inlet aperture, arranged adjacent the extraction orifice without an intervening expansion space but leaving an insulation space, and an outlet aperture.
Claim 6
Dependent Claim
15 words
Ion source according to claim 4, comprising means for creating magnetic induction inside said enclosure.
Claim 7
Dependent Claim
32 words
Ion source according to claim 4, comprising means arranged downstream of said outlet aperture for separating secondary ions formed in said enclosure from the primary ions formed in said primary plasma generator.
Claim 8
Dependent Claim
25 words
Ion source according to claim 1, comprising means arranged downstream of the fifth electrode, for separating the electrons from the ions produced by said source.
Claim 9
Dependent Claim
190 words
Ion source comprising a primary plasma generator constituted by a hot cathode and an anode, between which an arc is produced, said anode defining an extraction orifice, and by an intermediate electrode pinching the arc in proximity to said extraction orifice in the anode, magnetic field producing means creating a magnetic field between the intermediate electrode and the extraction orifice, said extraction orifice having a relatively small cross-section so that the pressure of the gases occurring inside said primary plasma generator is independent of the pressure existing downstream of said extraction orifice, said pressure downstream of the extraction orifice being less than said pressure inside the primary plasma generator, said generator comprising an additional electrode arranged downstream of said extraction orifice of the anode, said additional electrode being in the form of an enclosure including an inlet aperture arranged adjacent the extraction orifice without an intervening expansion space but leaving an insulation space, and an outlet aperture, means for applying to said additional electrode a potential positive with respect to that of the anode and of adjustable value, and means for introducing a gas or a vapor into said enclosure.
Claim 10
Dependent Claim
190 words
Ion source comprising a primary plasma generator constituted by a hot cathode and an anode, between which an arc is produced, said anode defining an extraction orifice, and by an intermediate electrode pinching the arc in proximity to said extraction orifice in the anode, magnetic field producing means creating a magnetic field between the intermediate electrode and the extraction orifice, said extraction orifice having a relatively small cross-section so that the pressure of the gases occurring inside said primary plasma generator is independent of the pressure existing downstream of said extraction orifice, said pressure downstream of the extraction orifice being less than said pressure inside the primary plasma generator, said generator comprising an additional electrode arranged downstream of said extraction orifice of the anode, said additional electrode being in the form of an enclosure including an inlet aperture arranged adjacent the extraction orifice without an intervening expansion space but leaving an insulation space, and an outlet aperture, means for applying to said additional electrode a potential positive with respect to that of the anode and of adjustable value, and means for introducing a gas or a vapor into said enclosure.
Claim 11
Dependent Claim
190 words
Ion source comprising a primary plasma generator constituted by a hot cathode and an anode, between which an arc is produced, said anode defining an extraction orifice, and by an intermediate electrode pinching the arc in proximity to said extraction orifice in the anode, magnetic field producing means creating a magnetic field between the intermediate electrode and the extraction orifice, said extraction orifice having a relatively small cross-section so that the pressure of the gases occurring inside said primary plasma generator is independent of the pressure existing downstream of said extraction orifice, said pressure downstream of the extraction orifice being less than said pressure inside the primary plasma generator, said generator comprising an additional electrode arranged downstream of saiD extraction orifice of the anode, said additional electrode being in the form of an enclosure including an inlet aperture arranged adjacent the extraction orifice without an intervening expansion space but leaving an insulation space, and an outlet aperture, means for applying to said additional electrode a potential positive with respect to that of the anode and of adjustable value, and heating means for vaporizing a solid substance present inside said enclosure.
Claim 12
Dependent Claim
190 words
Ion source comprising a primary plasma generator constituted by a hot cathode and an anode, between which an arc is produced, said anode defining an extraction orifice, and by an intermediate electrode pinching the arc in proximity to said extraction orifice in the anode, magnetic field producing means creating a magnetic field between the intermediate electrode and the extraction orifice, said extraction orifice having a relatively small cross-section so that the pressure of the gases occurring inside said primary plasma generator is independent of the pressure existing downstream of said extraction orifice, said pressure downstream of the extraction orifice being less than said pressure inside the primary plasma generator, said generator comprising an additional electrode arranged downstream of saiD extraction orifice of the anode, said additional electrode being in the form of an enclosure including an inlet aperture arranged adjacent the extraction orifice without an intervening expansion space but leaving an insulation space, and an outlet aperture, means for applying to said additional electrode a potential positive with respect to that of the anode and of adjustable value, and heating means for vaporizing a solid substance present inside said enclosure.
Claim 13
Dependent Claim
187 words
Ion source comprising a primary plasma generator constituted by a hot cathode and an anode, between which an arc is produced, said anode defining an extraction orifice, and by an intermediate electrode pinching the arc in proximity to said extraction orifice in the anode, magnetic field producing means creating a magnetic field between the intermediate electrode and the extraction orifice, said extraction orifice having a relatively small cross-section so that the pressure of the gases occurring inside said primary plasma generator is independent of the pressure existing downstream of said extraction orifice, said pressure downstream of the extraction orifice being less than said pressure inside the primary plasma generator, said generator comprising an additional electrode arranged downstream of said extraction orifice of the anode, said additional electrode being in the form of an enclosure including an inlet aperture arranged adjacent the extraction orifice without an intervening expansion space but leaving an insulation space, and an outlet aperture, means for applying to said additional electrode a potential positive with respect to that of the anode and of adjustable value, and means for creating magnetic induction inside said enclosure.
Claim 14
Dependent Claim
187 words
Ion source comprising a primary plasma generator constituted by a hot cathode and an anode, between which an arc is produced, said anode defining an extraction orifice, and by an intermediate electrode pinching the arc in proximity to said extraction orifice in the anode, magnetic field producing means creating a magnetic field between the intermediate electrode and the extraction orifice, said extraction orifice having a relatively small cross-section so that the pressure of the gases occurring inside said primary plasma generator is independent of the pressure existing downstream of said extraction orifice, said pressure downstream of the extraction orifice being less than said pressure inside the primary plasma generator, said generator comprising an additional electrode arranged downstream of said extraction orifice of the anode, said additional electrode being in the form of an enclosure including an inlet aperture arranged adjacent the extraction orifice without an intervening expansion space but leaving an insulation space, and an outlet aperture, means for applying to said additional electrode a potential positive with respect to that of the anode and of adjustable value, and means for creating magnetic induction inside said enclosure.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-06-16 | 1978-12-16 | 1979-06-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-06-16 | 1982-12-16 | 1983-06-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-06-16 | 1986-12-16 | 1987-06-17 | $7700.00 | Window Closed / Lapsed |