US3889361A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Short wavelength waveguides
Assignee: Thales SA
•
Filing: 1974-02-28
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Granted: 1975-06-17
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Expires: 1994-02-28
Abstract
Abstract A light waveguide is formed by atomising under vacuum and deposition upon a substrate, of a metal such for example as tantalum, in an atomsphere comprising a gas capable, in association with the metal, of forming a chemical combination, oxygen in the case of tantalum. The deposit is a complex compound of the metal and of the gas if the gas pressure is insufficient to produce the desired chemical combination (tantalum pentoxide Ta2O5); the assembly, after appropriate masking, is subjected to a chemical process which converts the unprotected parts into said combination.
Inventors
- 👤 Michel Croset
- 👤 Gonzalo Velasco
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 22:51
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/122; G02B6/125; C; C23; C23C; C23C14/00; C23C14/0021; C23C14/0036; G02B6/13; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49016
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
108 words
A METHOD OF MANUFACTURING A WAVEGUIDE FOR SUPRA HIGH FREQUENCY COMPRISING THE FOLLOWING STEPS: A. THE PRODUCTION UNDER VACUO OF A STREAM OF PARTICLES OF A METAL, IN THE PRESENCE OF PARTICLES OF A SECOND BODY, SAID GASEOUS ELEMENT BEING INSUFFICIENT IN QUANTITY TO PRODUCE A PREDETERMINED CHEMICAL, COMBINATION, AND THE DEPOSITION OF THE RESULTANT COMPOUND UPON A SUBSTRATE, IN ORDER TO OBTAIN A THIN FILM OF A COMPLEX COMPOUND; B. THE DEPOSITION UPON THE FREE FACE OF SAID FILM OF A PROTECTIVE MASK FOLLOWING A PREDETERMINED PATTERN; C. THE SUBJECTING OF THE ASSEMBLY TO A CHEMICAL TREATMENT DESIGNED TO CONVERT THE UNMASKED PORTIONS INTO SAID CHEMICAL COMBINATION.
Claim 2
Independent Claim
108 words
A METHOD OF MANUFACTURING A WAVEGUIDE FOR SUPRA HIGH FREQUENCY COMPRISING THE FOLLOWING STEPS: A. THE PRODUCTION UNDER VACUO OF A STREAM OF PARTICLES OF A METAL, IN THE PRESENCE OF PARTICLES OF A SECOND BODY, SAID GASEOUS ELEMENT BEING INSUFFICIENT IN QUANTITY TO PRODUCE A PREDETERMINED CHEMICAL, COMBINATION, AND THE DEPOSITION OF THE RESULTANT COMPOUND UPON A SUBSTRATE, IN ORDER TO OBTAIN A THIN FILM OF A COMPLEX COMPOUND; B. THE DEPOSITION UPON THE FREE FACE OF SAID FILM OF A PROTECTIVE MASK FOLLOWING A PREDETERMINED PATTERN; C. THE SUBJECTING OF THE ASSEMBLY TO A CHEMICAL TREATMENT DESIGNED TO CONVERT THE UNMASKED PORTIONS INTO SAID CHEMICAL COMBINATION.
Claim 3
Dependent Claim
34 words
A method as claimed in claim 1, wherein said first body is a metal chosen in the group tantalum, zirconium and said second body is oxygen, said combination being an oxide of the metal.
Claim 4
Dependent Claim
15 words
A method as claimed in claim 2, wherein the protective mask is made of aluminium.
References Cited (Backward Citations)
US3589794A
Cited
US3659915A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-06-16 | 1978-12-16 | 1979-06-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-06-16 | 1982-12-16 | 1983-06-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-06-16 | 1986-12-16 | 1987-06-17 | $7700.00 | Window Closed / Lapsed |