US3883679A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vapor source assembly
Assignee: Airco Inc
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Filing: 1974-05-06
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Granted: 1975-05-13
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Expires: 1994-05-06
Abstract
Abstract A vapor source assembly is described which incorporates a magnetic shield for preventing at least some of the lines of force in a magnetic field from passing through the crucible.
Inventors
- 👤 Robert L Shrader
- 👤 Kazumi N Tsujimoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 17:48
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/305; H01J37/3053; C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/28; C23C14/30
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
123 words
A vapor source assembly comprising means forming a crucible for containing material to be vaporized, an electron beam gun for producing an electron beam, deflecting means for producing at least one magnetic field having lines of force extending transversely of the path of the electron beam to deflect the electron beam through an arcuate path from said electron beam gun to said crucible, said deflecting means including a pair of pole members positioned on opposite sides of said crucible and between which the lines of force of the magnetic field extend, and magnetic shield means positioned between said pole members and said crucible for preventing at least some of the lines of force extending between said pole members from passing through said crucible.
Claim 2
Dependent Claim
123 words
A vapor source assembly comprising means forming a crucible for containing material to be vaporized, an electron beam gun for producing an electron beam, deflecting means for producing at least one magnetic field having lines of force extending transversely of the path of the electron beam to deflect the electron beam through an arcuate path from said electron beam gun to said crucible, said deflecting means including a pair of pole members positioned on opposite sides of said crucible and between which the lines of force of the magnetic field extend, and magnetic shield means positioned between said pole members and said crucible for preventing at least some of the lines of force extending between said pole members from passing through said crucible.
Claim 3
Dependent Claim
23 words
A vapor source assembly according to claim 1 wherein said magnetic shield means comprise a wall of magnetic material coaxially of said crucible.
Claim 4
Dependent Claim
22 words
A vapor source assembly according to claim 2 wherein said crucible is of circular cross section and wherein said wall is cylindrical.
Claim 5
Dependent Claim
32 words
A vapor source assembly according to claim 1 wherein said deflecting means include means for steering the electron beam to vary the position of impact thereof on material contained in said crucible.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-05-12 | 1978-11-11 | 1979-05-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-05-12 | 1982-11-11 | 1983-05-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-05-12 | 1986-11-11 | 1987-05-13 | $7700.00 | Window Closed / Lapsed |