Method of making a photoresist

Claim 2

THE PROCESS WHICH COMPRISES: PREPARING A SOLUTION OF A PHOTOSENSITIVE MATERIAL IN A SOLVENT, SAID PHOTOSENSITIVE MATERIAL CONSISTING ESSENTIALLY OF THE FOLLOWING MATERIALS;

Claim 3

AT LEAST ONE POLYMERIZABLE N-VINYL MONOMER;

Claim 4

AT LEAST ONE POLYMERIZABLE N-VINYL MONOMER;

Claim 5

AT LEAST ONE ACTIVATOR FOR ENCHANCING THE EFFECT OF EXPOSING SAID MONOMER TO A SUITABLE DOSE OF ELECTROMAGNETIC RADIATION AT LEAST SUFFICIENT TO INITIATE POLYMERIZATION OF SAID MONOMER, SAID ACTIVATOR BEING SELECTED FROM THE GROUP CONSISTING OF: ORGANIC HALOGEN COMPOUNDS IN WHICH AT LEAST THREE HALOGEN ATOMS FROM THE GROUPS CONSISTING OF CL, BR AND I ARE ATTACHED TO A SINGLE CARBON ATOM; SULFONYL CHLORIDES, SULFONYL BROMIDES, SULFENYL CHLORIDES, SULFENYL BROMIDES AND MERCAPTO COMPOUNDS WHEREIN THE MERCAPTO GROUP IS ATTACHED TO A CARBON ATOM IN A HETEROCYCLIC NUCLEUS; AND

Claim 6

AT LEAST ONE ACTIVATOR FOR ENCHANCING THE EFFECT OF EXPOSING SAID MONOMER TO A SUITABLE DOSE OF ELECTROMAGNETIC RADIATION AT LEAST SUFFICIENT TO INITIATE POLYMERIZATION OF SAID MONOMER, SAID ACTIVATOR BEING SELECTED FROM THE GROUP CONSISTING OF: ORGANIC HALOGEN COMPOUNDS IN WHICH AT LEAST THREE HALOGEN ATOMS FROM THE GROUPS CONSISTING OF CL, BR AND I ARE ATTACHED TO A SINGLE CARBON ATOM; SULFONYL CHLORIDES, SULFONYL BROMIDES, SULFENYL CHLORIDES, SULFENYL BROMIDES AND MERCAPTO COMPOUNDS WHEREIN THE MERCAPTO GROUP IS ATTACHED TO A CARBON ATOM IN A HETEROCYCLIC NUCLEUS; AND

Claim 7

at least one activator for enhancing the effect of exposing said monomer to a suitable dose of electromagnetic radiation at least sufficient to initiate polymerization of said monomer, said activator being selected from the group consisting of: organic halogen compounds in which at least three halogen atoms from the groups consisting of Cl, Br and I are attached to a single carbon atom; sulfonyl chlorides, sulfonyl bromides, sulfenyl chlorides, sulfenyl bromides and mercapto compounds wherein the mercapto group is attached to a carbon atom in a heterocyclic nucleus; and

Claim 8

at least one activator for enhancing the effect of exposing said monomer to a suitable dose of electromagnetic radiation at least sufficient to initiate polymerization of said monomer, said activator being selected from the group consisting of: organic halogen compounds in which at least three halogen atoms from the groups consisting of Cl, Br and I are attached to a single carbon atom; sulfonyl chlorides, sulfonyl bromides, sulfenyl chlorides, sulfenyl bromides and mercapto compounds wherein the mercapto group is attached to a carbon atom in a heterocyclic nucleus; and

Claim 9

The process of claim 1 in which the development alcohol is selected from the group consisting of methyl, ethyl, and propyl alcohols.

Claim 10

The process of claim 1 including subsequent removal of the polymerized coating by use of a chorinated alkaline.

Claim 11

at least one substituted phenol represented by the general formula

Claim 12

at least one substituted phenol represented by the general formula

Claim 13

AT LEAST ONE SUBSTITUTED PHENOL REPRESENTED BY THE GENERAL FORMULA

Claim 14

AT LEAST ONE SUBSTITUTED PHENOL REPRESENTED BY THE GENERAL FORMULA

Claim 15

A RESIN WHICH EXHIBITS A GOOD DEGREE OF SOLUBILITY IN AN ALKANOL SELECTED FROM THE GROUP CONSISTING OF METHANOL, ETHANOL AND PROPANOLS AND AT LEAST SOME SOLUBILITY IN THE AZEOTROPE OF SAID ALCHOLS AND WATER; COATING THE SOLUTION ONTO A SOLID SUBSTRATE; DRYING THE COATING; PHOTOGRAPHICALLY EXPOSING THE COATING TO SUITABLE RADIATION; HEATING TO COMPLETE POLYMERIZATION OF THE EXPOSED PORTIONS OF THE COATING; AND DEVELOPING THE RESULTING RESIST WITH AN ALCOHOL OR ALCOHOLWATER AZEOTROPE.

Claim 16

A RESIN WHICH EXHIBITS A GOOD DEGREE OF SOLUBILITY IN AN ALKANOL SELECTED FROM THE GROUP CONSISTING OF METHANOL, ETHANOL AND PROPANOLS AND AT LEAST SOME SOLUBILITY IN THE AZEOTROPE OF SAID ALCHOLS AND WATER; COATING THE SOLUTION ONTO A SOLID SUBSTRATE; DRYING THE COATING; PHOTOGRAPHICALLY EXPOSING THE COATING TO SUITABLE RADIATION; HEATING TO COMPLETE POLYMERIZATION OF THE EXPOSED PORTIONS OF THE COATING; AND DEVELOPING THE RESULTING RESIST WITH AN ALCOHOL OR ALCOHOLWATER AZEOTROPE.

Claim 17

a resin which exhibits a good degree of solubility in an alkanol selected from the group consisting of methanol, ethanol and propanols and at least some solubility in the azeotrope of said alcohols and water; coating the solution onto a solid substrate; drying the coating; photographically exposing the coating to suitable radiation; heating to complete polymerization of the exposed portions of the coating; and developing the resulting resist with an alcohol or alcohol-water azeotrope.

Claim 18

a resin which exhibits a good degree of solubility in an alkanol selected from the group consisting of methanol, ethanol and propanols and at least some solubility in the azeotrope of said alcohols and water; coating the solution onto a solid substrate; drying the coating; photographically exposing the coating to suitable radiation; heating to complete polymerization of the exposed portions of the coating; and developing the resulting resist with an alcohol or alcohol-water azeotrope.