US3880009A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Pressure transducer
Assignee: Bunker Ramo Corp
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Filing: 1973-05-24
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Granted: 1975-04-29
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Expires: 1993-05-24
Abstract
Abstract Flexible conductive diaphragm is sealed to a flat dielectric substrate and spaced above a fixed plate on the substrate. Diaphragm and plate constitute a capacitor, the capacitance of which varies as the spacing between diaphragm and plate changes. The variable capacitor, coupled to associated circuitry mounted on the substrate, causes corresponding changes in the output signal from the circuit. A cap, sealed to the substrate, provides a chamber outside the diaphragm into which a pressure medium can be introduced through a tubing connection. A second tubing connection gives similar access to the space enclosed between the diaphragm and the substrate. The two connections permit the device to be used as a differential gage, as a normal gage, as a barometer, or as an absolute gage.
Inventors
- 👤 Samuel Andrew Johnston
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 01:39
CPC Classifications
G; G01; G01L; G01L13/00; G01L13/02; G01L13/025; G01L19/00; G01L19/14; G01L9/00; G01L9/0041; G01L9/0072
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
149 words
A variable capacitance type pressure transducer comprising: a substrate of dielectric material, a land of electrically conductive material affixed thereto, a flexible electrically conductive diaphragm covering said land, spaced therefrom, and sealed to said substrate, said land and said diaphragm forming two plates of a capacitor, a cap covering said diaphragm, spaced therefrom and sealed to said substrate, a port providing communication for a pressure medium to the otherwise closed volume surrounding said diaphragm and defined by said cap and said substrate, from the space external thereto, a port providing communication for a pressure medium to the otherwise closed volume defined by said diaphragm and said substrate, from the space external thereto, and electrical circuit means mounted on said substrate, connected to said diaphragm and to said land, and adapted to produce a signal having characteristics varying as a function of the capacitance between said diaphragm and said land.
Claim 2
Dependent Claim
149 words
A variable capacitance type pressure transducer comprising: a substrate of dielectric material, a land of electrically conductive material affixed thereto, a flexible electrically conductive diaphragm covering said land, spaced therefrom, and sealed to said substrate, said land and said diaphragm forming two plates of a capacitor, a cap covering said diaphragm, spaced therefrom and sealed to said substrate, a port providing communication for a pressure medium to the otherwise closed volume surrounding said diaphragm and defined by said cap and said substrate, from the space external thereto, a port providing communication for a pressure medium to the otherwise closed volume defined by said diaphragm and said substrate, from the space external thereto, and electrical circuit means mounted on said substrate, connected to said diaphragm and to said land, and adapted to produce a signal having characteristics varying as a function of the capacitance between said diaphragm and said land.
Claim 3
Dependent Claim
179 words
A variable capacitance type pressure transducer comprising: a substrate of electrically non-conductive material impermeable to gas, said substrate having first and second faces spaced apart by the thickness of said substrate, a land of electrically conductive material affixed to said first face, a thin flexible electrically conductive diaphragm impermeable to gas, hermetically sealed to said first face in spaced apart relation to and covering Said land, said land and said diaphragm forming two plates of an electrical capacitor, a cap comprised of a gas impermeable material hermetically sealed to said first face in spaced apart relation to and covering said diaphragm, an aperture running through the thickness of said substrate at a position on said first surface which is embraced by said diaphragm, gas porting means for the otherwise closed volume surrounding said diaphragm which is defined by said cap and said substrate, and electrical circuit means mounted on said substrate, connected to said land and said diaphragm, and adapted to produce a signal having characteristics varying as a function of the capacitance between said land and said diaphragm.
Claim 4
Dependent Claim
179 words
A variable capacitance type pressure transducer comprising: a substrate of electrically non-conductive material impermeable to gas, said substrate having first and second faces spaced apart by the thickness of said substrate, a land of electrically conductive material affixed to said first face, a thin flexible electrically conductive diaphragm impermeable to gas, hermetically sealed to said first face in spaced apart relation to and covering Said land, said land and said diaphragm forming two plates of an electrical capacitor, a cap comprised of a gas impermeable material hermetically sealed to said first face in spaced apart relation to and covering said diaphragm, an aperture running through the thickness of said substrate at a position on said first surface which is embraced by said diaphragm, gas porting means for the otherwise closed volume surrounding said diaphragm which is defined by said cap and said substrate, and electrical circuit means mounted on said substrate, connected to said land and said diaphragm, and adapted to produce a signal having characteristics varying as a function of the capacitance between said land and said diaphragm.
Claim 5
Dependent Claim
171 words
A variable capacitance type pressure transducer comprising: a substrate of electrically non-conductive material impermeable to gas, said substrate having first and second faces spaced apart by the thickness of said substrate, a land of electrically conductive material affixed to said first face, a thin flexible electrically conductive diaphragm impervious to gas, hermetically sealed to said first face in spaced apart relation to and covering said land, said land and said diaphragm forming two plates of an electrical capacitor, a cap comprised of a gas impermeable material hermetically sealed to said first face in spaced apart relation to and covering said diaphragm, a first aperture running through the thickness of said substrate at a position on said first face which is embraced by said diaphragm, a second aperture running through the thickness of said substrate at a position on said first face between the inner extremity of said cap and the outer extremity of said diaphragm, and tubular fittings mounted on said second face, each connecting respectively with one of said apertures.
Claim 6
Dependent Claim
171 words
A variable capacitance type pressure transducer comprising: a substrate of electrically non-conductive material impermeable to gas, said substrate having first and second faces spaced apart by the thickness of said substrate, a land of electrically conductive material affixed to said first face, a thin flexible electrically conductive diaphragm impervious to gas, hermetically sealed to said first face in spaced apart relation to and covering said land, said land and said diaphragm forming two plates of an electrical capacitor, a cap comprised of a gas impermeable material hermetically sealed to said first face in spaced apart relation to and covering said diaphragm, a first aperture running through the thickness of said substrate at a position on said first face which is embraced by said diaphragm, a second aperture running through the thickness of said substrate at a position on said first face between the inner extremity of said cap and the outer extremity of said diaphragm, and tubular fittings mounted on said second face, each connecting respectively with one of said apertures.
Claim 7
Dependent Claim
198 words
A variable capacitance type pressure transducer comprising: a substrate of electrically non-conductive material impermeable to gas, said substrate having first and second faces spaced apart by the thickness of said substrate, a land of electrically conductive material affixed to said first face, a thin flexible electrically conductive diaphragm impervious to gas, hermetically sealed to said first face in spaced apart relation to and covering said land, said land and said diaphragm forming two plates of an electrical capacitor, a cap comprised of a gas impermeable material hermetically sealed to said first face in spaced apart relation to and covering said diaphragm, a first aperture running through the thickness of said substrate at a position on said first face which is embraced by said diaphragm, a second aperture running through the thickness of said substrate at a position on said first face between the inner extremity of said cap and the outer extremity of said diaphragm, electrical components mounted on said substrate forming a circuit responsive to capacitance changes to develop an output signal the characteristics of which change as a function of capacitance change, and electrical conductors running from said land and said diaphragm to said electrical components.
Claim 8
Dependent Claim
198 words
A variable capacitance type pressure transducer comprising: a substrate of electrically non-conductive material impermeable to gas, said substrate having first and second faces spaced apart by the thickness of said substrate, a land of electrically conductive material affixed to said first face, a thin flexible electrically conductive diaphragm impervious to gas, hermetically sealed to said first face in spaced apart relation to and covering said land, said land and said diaphragm forming two plates of an electrical capacitor, a cap comprised of a gas impermeable material hermetically sealed to said first face in spaced apart relation to and covering said diaphragm, a first aperture running through the thickness of said substrate at a position on said first face which is embraced by said diaphragm, a second aperture running through the thickness of said substrate at a position on said first face between the inner extremity of said cap and the outer extremity of said diaphragm, electrical components mounted on said substrate forming a circuit responsive to capacitance changes to develop an output signal the characteristics of which change as a function of capacitance change, and electrical conductors running from said land and said diaphragm to said electrical components.
Claim 9
Dependent Claim
39 words
Apparatus according to claim 3 wherein said first aperture runs through the thickness of said substrate at a position on said first face which is embraced by said diaphragm and is immediately adjacent the outer periphery of said land.
Claim 10
Dependent Claim
199 words
A variable capacitance type pressure transducer comprising: a substrate of electrically nonconductive material impermeable to gas, said substrate having first and second faces spaced apart by the thickness of said substrate, a land of electrically conductive material affixed to said first face, a thin flexible electrically conductive diaphragm impervious to gas, hermetically sealed to said first face in spaced apart relation to and covering said land, said land and said diaphram forming two plates of an electrical capacitor, a cap comprised of a gas impermeable material hermetically sealed to said first face in spaced apart relation to and covering said diaphragm, a first aperture running through the thickness of said substrate at a position on said first face which is embraced by said diaphragm, a second aperture running through the thickness of said substrate at a position on said first face between the inner extremity of said cap and the outer extremity of said diaphragm, electrical components mounted on said substrate forming a circuit responsive to capacitance changes to develop an output signal the characteristics of which change as a function of capacitance change, and electrical conductors extending from said land and from said diaphragm to said electrical components.
Claim 11
Dependent Claim
199 words
A variable capacitance type pressure transducer comprising: a substrate of electrically nonconductive material impermeable to gas, said substrate having first and second faces spaced apart by the thickness of said substrate, a land of electrically conductive material affixed to said first face, a thin flexible electrically conductive diaphragm impervious to gas, hermetically sealed to said first face in spaced apart relation to and covering said land, said land and said diaphram forming two plates of an electrical capacitor, a cap comprised of a gas impermeable material hermetically sealed to said first face in spaced apart relation to and covering said diaphragm, a first aperture running through the thickness of said substrate at a position on said first face which is embraced by said diaphragm, a second aperture running through the thickness of said substrate at a position on said first face between the inner extremity of said cap and the outer extremity of said diaphragm, electrical components mounted on said substrate forming a circuit responsive to capacitance changes to develop an output signal the characteristics of which change as a function of capacitance change, and electrical conductors extending from said land and from said diaphragm to said electrical components.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-04-28 | 1978-10-28 | 1979-04-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-04-28 | 1982-10-28 | 1983-04-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-04-28 | 1986-10-28 | 1987-04-29 | $7700.00 | Window Closed / Lapsed |