US3879746A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Gate metallization structure
Assignee: AT&T Inc
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Filing: 1973-12-17
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Granted: 1975-04-22
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Expires: 1993-12-17
Abstract
Abstract A technique for reducing the interdiffusion rates and inhibiting intermetallic compound formation between thin film titaniumplatinum metallizations involves incorporating a titanium nitride layer intermediate the titanium and platinum.
Inventors
- 👤 Paul Richard Fournier
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 06:24
CPC Classifications
H; H10; H10W; H10W74/00; H10W74/40; H10W74/43; C; C23; C23C; C23C28/00; C23C28/02; C23C28/023; H10D; H10D99/00; H10P; H10P95/00; Y; Y10; Y10S; Y10S257/00; Y10S257/915
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
76 words
A GATE METALLIZATION STRUCTURE FOR AN INSULATED GATE FIELD EFFECT RRANSISTOR WHICH COMPRISES A SUBSTRATE OF SILICON HAVING A FIRST DIELECTRIC LAYER OF SILICON DIOXIDE FORMED ON A SURFACE OF THE SUBSTRATE, A SECOND DIELECTRIC LAYER OF ALUMINUM OXIDE FORMED ON THE SURFACE; OF THE FIRST DIELECTRIC LAYER, AND A METAL PATTERN FORMED ON THE SURFACE OF THE ALUMINUM OXIDE LAYER, CHARACTERIZED IN THAT SAID METAL PATTERN COMPRISES SECCESSIVELY TITANIUM NITRIDE, TITANIUM, TITANIUM NITRIDE AND PLATINUM.
Claim 2
Dependent Claim
76 words
A GATE METALLIZATION STRUCTURE FOR AN INSULATED GATE FIELD EFFECT RRANSISTOR WHICH COMPRISES A SUBSTRATE OF SILICON HAVING A FIRST DIELECTRIC LAYER OF SILICON DIOXIDE FORMED ON A SURFACE OF THE SUBSTRATE, A SECOND DIELECTRIC LAYER OF ALUMINUM OXIDE FORMED ON THE SURFACE; OF THE FIRST DIELECTRIC LAYER, AND A METAL PATTERN FORMED ON THE SURFACE OF THE ALUMINUM OXIDE LAYER, CHARACTERIZED IN THAT SAID METAL PATTERN COMPRISES SECCESSIVELY TITANIUM NITRIDE, TITANIUM, TITANIUM NITRIDE AND PLATINUM.
References Cited (Backward Citations)
US3642548A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-04-21 | 1978-10-21 | 1979-04-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-04-21 | 1982-10-21 | 1983-04-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-04-21 | 1986-10-21 | 1987-04-22 | $7700.00 | Window Closed / Lapsed |