US3878442A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electrical conductor having a high resistance to electromigration
Assignee: Individual
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Filing: 1971-10-01
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Granted: 1975-04-15
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Expires: 1991-10-01
Abstract
Abstract This disclosure is directed to an improved semiconductor device, electrical conductor, thin film conductor, and fabrication methods therefor. An aluminum-aluminum oxide alloy conductor is disclosed which has a high resistance to electromigration and hence, a conductor lifetime greater by at least a factor of 10 than unalloyed aluminum conductors. Semiconductor devices utilizing this aluminum alloy in the thin film conductive stripes interconnecting different conductivity regions or devices located in the semiconductor substrate are significantly improved and more reliable.
Inventors
- 👤 Harshad J Bhatt
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 16:44
CPC Classifications
H; H10; H10D; H10D99/00; H10D30/00; H10D30/60; H10D64/00; H10D64/01; H10D64/011; H10P; H10P95/00; H10W; H10W20/00; H10W20/40; H10W72/00; H10W72/20; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
42 words
AN ELECTRICAL CONDUCTOR COMPRISING AN ALUMINUM ALLOY HAVING A HIGH RESISTANCE TO ELECTROMIGRATION, SAID ALUMINUM ALLOY BEING COMPOSED OF ALUMINUM AND ALUMINUM OXIDE, SAID ALUMINUM OXIDE IS IN THE RANGE FROM ABOUT 0.01 PERCENT TO ABOUT 5 PERCENT OF SAID ALUMINUM ALLOY.
Claim 2
Dependent Claim
42 words
AN ELECTRICAL CONDUCTOR COMPRISING AN ALUMINUM ALLOY HAVING A HIGH RESISTANCE TO ELECTROMIGRATION, SAID ALUMINUM ALLOY BEING COMPOSED OF ALUMINUM AND ALUMINUM OXIDE, SAID ALUMINUM OXIDE IS IN THE RANGE FROM ABOUT 0.01 PERCENT TO ABOUT 5 PERCENT OF SAID ALUMINUM ALLOY.
Claim 3
Dependent Claim
68 words
An electron current carrying thin film conductive stripe comprising an aluminum alloy layer having a high resistance to electromigration, said aluminum alloy layer being composed of aluminum and aluminum oxide, said aluminum oxide is in the range of from about 0.01 percent to about 17 percent of said aluminum alloy, said stripe having a thickness in the range of from about several hundred Angstroms to about 20,000 Angstroms.
Claim 4
Dependent Claim
68 words
An electron current carrying thin film conductive stripe comprising an aluminum alloy layer having a high resistance to electromigration, said aluminum alloy layer being composed of aluminum and aluminum oxide, said aluminum oxide is in the range of from about 0.01 percent to about 17 percent of said aluminum alloy, said stripe having a thickness in the range of from about several hundred Angstroms to about 20,000 Angstroms.
Claim 5
Dependent Claim
31 words
A thin film conductive stripe in accordance with claim 2 wherein said aluminum oxide is in the range of from about 0.5 percent to about 14 percent of said aluminum alloy.
Claim 6
Dependent Claim
29 words
A thin film conductive stripe in accordance with claim 3 wherein said aluminum oxide is in the range from about 6 to about 8 percent of said aluminum alloy.
Claim 7
Dependent Claim
28 words
A thin film conductive stripe in accordance with claim 2 wherein said stripe having a width in the range of from about 0.1 mils to about 2 mils.
Claim 8
Dependent Claim
28 words
A thin film conductive stripe in accordance with claim 5 wherein said stripe having a width in the range of from about 0.2 mils to about 0.4 mils.
Claim 9
Dependent Claim
28 words
A thin film conductive stripe in accordance with claim 2 wherein said stripe having a thickness in the range of from about 5,000 Angstroms to about 15,000 Angstroms.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-04-14 | 1978-10-14 | 1979-04-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-04-14 | 1982-10-14 | 1983-04-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-04-14 | 1986-10-14 | 1987-04-15 | $7700.00 | Window Closed / Lapsed |