US3873384A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of stabilizing a silicon base mos device with zinc
Assignee: Individual
•
Filing: 1972-09-08
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Granted: 1975-03-25
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Expires: 1992-09-08
Abstract
Abstract A silicon/silicon dioxide device, of the MOS type, for example, in which zinc is diffused through the silicon dioxide layer to the interface between the silicon base and the silicon dioxide layer.
Inventors
- 👤 Chun-Yen Chang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 14:14
CPC Classifications
H; H10; H10P; H10P32/00; H10P32/10; H10P32/14; H10D; H10D99/00; Y; Y10; Y10S; Y10S438/00; Y10S438/91
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
52 words
A METHOD OF MANUFACTURING A SEMI-CONDUCTOR DEVICE HAVING IMPROVED STABILITY, WHICH COMPRISES PROVIDING A BASE OF SEMI-CONDUCTIVE SILICON MATERIAL, FORMING A SILICON DIOXIDE LAYER ON SAID BASE, DEPOSITING HIGH-PURITY ZINC METAL UPON SAID LAYER, AND DIFFUSING NEGATIVE ZINC IONS INTO SAID LAYER BY RAISING THE TEMPERATURE THEREOF TO THE ORDER OF 1,000*C.
Claim 2
Independent Claim
52 words
A METHOD OF MANUFACTURING A SEMI-CONDUCTOR DEVICE HAVING IMPROVED STABILITY, WHICH COMPRISES PROVIDING A BASE OF SEMI-CONDUCTIVE SILICON MATERIAL, FORMING A SILICON DIOXIDE LAYER ON SAID BASE, DEPOSITING HIGH-PURITY ZINC METAL UPON SAID LAYER, AND DIFFUSING NEGATIVE ZINC IONS INTO SAID LAYER BY RAISING THE TEMPERATURE THEREOF TO THE ORDER OF 1,000*C.
Claim 3
Dependent Claim
20 words
A method in accordance with claim 1, wherein said layer contains positive ions which are neutralized by said negative ions.
Claim 4
Dependent Claim
22 words
A method in accordance with claim 1, wherein the zinc ions are diffused into the interface of said base and said layer.
References Cited (Backward Citations)
US3402081A
Cited
US3485684A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-03-24 | 1978-09-23 | 1979-03-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-03-24 | 1982-09-23 | 1983-03-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-03-24 | 1986-09-23 | 1987-03-25 | $7700.00 | Window Closed / Lapsed |