US3869313A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for automatic chemical processing of workpieces, especially semi-conductors
Assignee: Henley Group Inc
•
Filing: 1973-05-21
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Granted: 1975-03-04
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Expires: 1993-05-21
Abstract
Abstract Apparatus for automatically and continuously treating workpieces, especially semi-conductor devices, with liquids, provides for a plurality of liquid treatment operations including at least one dipping step and one spraying step. Metering pumps are provided for maintaining the composition of a liquid mixture in at least one dipping step within predetermined limits and a controlled heater is employed for controlling the temperature of the liquid mixture therein. A conveyor automatically transfers workpieces from one treatment chamber to another according to a predetermined time cycle. The apparatus is useful for a number of liquid treating operations including various cleaning, stripping, etching, rinsing and drying operations such as are frequently used in the manufacture of semi-conductor devices.
Inventors
- 👤 Harold F Jones
- 👤 David L Ousterling
- 👤 Roland W Anderson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 20:33
CPC Classifications
B; B65; B65G; B65G49/00; B65G49/02; B65G49/04; B65G49/0409; B65G49/0436; B65G49/044; B65G49/0445; Y; Y10; Y10S; Y10S134/00; Y10S134/902
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
119 words
Apparatus for continuously treating workpieces with liquids comprising: a. a plurality of treatment chambers b. at least one of which is a dip chamber adapted to contain a liquid and c. at least one of which is a spray chamber equipped with means to spray liquid on workpieces suspended within said chamber, d. means for controlling the temperature of the treating liquid in at least one dip chamber, e. means for maintaining the composition of a liquid mixture in at least one dip chamber within predetermined limits, and f. conveyor means for automatically transferring the workpieces from treatment chamber to treatment chamber and lowering the workpieces through the top of the treatment chambers according to a predetermined timed cycle.
Claim 2
Dependent Claim
119 words
Apparatus for continuously treating workpieces with liquids comprising: a. a plurality of treatment chambers b. at least one of which is a dip chamber adapted to contain a liquid and c. at least one of which is a spray chamber equipped with means to spray liquid on workpieces suspended within said chamber, d. means for controlling the temperature of the treating liquid in at least one dip chamber, e. means for maintaining the composition of a liquid mixture in at least one dip chamber within predetermined limits, and f. conveyor means for automatically transferring the workpieces from treatment chamber to treatment chamber and lowering the workpieces through the top of the treatment chambers according to a predetermined timed cycle.
Claim 3
Dependent Claim
20 words
Apparatus according to claim 1 in which the conveyor means is adapted to transport the workpieces in wafer boat carriers.
Claim 4
Dependent Claim
24 words
Apparatus according to claim 2 in which the first and second treatment chambers are dip chambers and a third chamber is a spray chamber.
Claim 5
Dependent Claim
25 words
Apparatus according to claim 3 in which at least one spray chamber is equipped with means for recirculating the treating liquid sprayed in that chamber.
Claim 6
Dependent Claim
27 words
Apparatus according to claim 3 which includes means to provide an atmosphere of clean filtered air in the vicinity where the workpieces are unloaded from the apparatus.
Claim 7
Dependent Claim
20 words
Apparatus according to claim 1 in which the treatment chambers are removable modules which can be interchanged with one another.
Claim 8
Dependent Claim
12 words
Apparatus according to claim 1 which includes at least two dip chambers.
Claim 9
Dependent Claim
24 words
Apparatus according to claim 1 which includes means to automatically maintain the volume of liquid within the dip chamber or chambers within predetermined limits.
Claim 10
Dependent Claim
27 words
Apparatus according to claim 1 which includes means to provide an atmosphere of clean filtered air in the vicinity where the workpieces are unloaded from the apparatus.
Claim 11
Dependent Claim
15 words
Apparatus according to claim 1 in which the first treatment chamber is a dip chamber.
Claim 12
Dependent Claim
24 words
Apparatus according to claim 1 in which the first and second treatment chambers are dip chambers and a third chamber is a spray chamber.
References Cited (Backward Citations)
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US2510912A
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US2591681A
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US2896640A
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Cited
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-03-03 | 1978-09-02 | 1979-03-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-03-03 | 1982-09-02 | 1983-03-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-03-03 | 1986-09-02 | 1987-03-04 | $7700.00 | Window Closed / Lapsed |