US3868271A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of cleaning a glass substrate by ionic bombardment in a wet active gas
Assignee: International Business Machines Corp
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Filing: 1973-06-13
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Granted: 1975-02-25
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Expires: 1993-06-13
Abstract
Abstract An improved method of cleaning a glass substrate prior to evaporation of chrome metal electrodes upon it. The substrate is cleaned by the use of glow discharge in a wet active gas, preferably air or forming gas.
Inventors
- 👤 Neil M Poley
- 👤 Howard L Whitaker
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 15:11
CPC Classifications
C; C03; C03C; C03C23/00; C03C23/0075
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
68 words
IN A METHOD FOR CLEANING A GLASS SUBSTRATE, THE STEPS OF: PLACING SAID SUBSTRATE WITHIN AN IONIC BOMOBARDMENT APPARATUS, SUBSTANTIALLY FILLING EAID APARATUS WITH A WET ACTIVE GAS UNDER LOW PRESSURE, SAID WET ACTIVE GAS BEING SUBSTANTIALLY SATURATED WITH WATER AT 22*C, AND APPLYING AN ELECTRICAL POTENTIAL BETWEEN AN ANODE AND A CATHODE WITHIN SAID APPARATUS TO CAUSE IONIC BOMBARDMENT OF SAID SUBSTRATE IN SAID WET ACTIVE GAS.
Claim 2
Dependent Claim
68 words
IN A METHOD FOR CLEANING A GLASS SUBSTRATE, THE STEPS OF: PLACING SAID SUBSTRATE WITHIN AN IONIC BOMOBARDMENT APPARATUS, SUBSTANTIALLY FILLING EAID APARATUS WITH A WET ACTIVE GAS UNDER LOW PRESSURE, SAID WET ACTIVE GAS BEING SUBSTANTIALLY SATURATED WITH WATER AT 22*C, AND APPLYING AN ELECTRICAL POTENTIAL BETWEEN AN ANODE AND A CATHODE WITHIN SAID APPARATUS TO CAUSE IONIC BOMBARDMENT OF SAID SUBSTRATE IN SAID WET ACTIVE GAS.
Claim 3
Dependent Claim
11 words
The method of claim 1 wherein said active gas is air.
Claim 4
Dependent Claim
12 words
The method of claim 1 wherein said active gas is forming gas.
Claim 5
Dependent Claim
30 words
The method of claim 1 wherein said active gas is made wet by the additional step of bubbling it through water prior to its introduction into said ionic bombardment apparatus.
Claim 6
Dependent Claim
12 words
The method of claim 4 wherein said active gas is forming gas.
Claim 7
Dependent Claim
11 words
The method of claim 4 wherein said active gas is air.
Claim 8
Dependent Claim
67 words
In a method for cleaning a soda lime silica glass substrate prior to deposition of chromium thereupon, the steps of: placing said substrate within a glow discharge apparatus; substantially saturating an active gas by bubbling it through water at approximately 22*C; introducing said saturated active gas into said glow discharge apparatus; and causing ionic bombardment of said substrate within said glow discharge apparatus in said active gas.
Claim 9
Dependent Claim
67 words
In a method for cleaning a soda lime silica glass substrate prior to deposition of chromium thereupon, the steps of: placing said substrate within a glow discharge apparatus; substantially saturating an active gas by bubbling it through water at approximately 22*C; introducing said saturated active gas into said glow discharge apparatus; and causing ionic bombardment of said substrate within said glow discharge apparatus in said active gas.
Claim 10
Dependent Claim
20 words
The method of claim 7 wherein said active gas is selected from the group consisting of air and forming gas.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-02-24 | 1978-08-26 | 1979-02-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-02-24 | 1982-08-26 | 1983-02-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-02-24 | 1986-08-26 | 1987-02-25 | $7700.00 | Window Closed / Lapsed |