US3864597A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Device for increasing the accuracy of addressing an electron beam striking a target
Assignee: Thales SA
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Filing: 1973-04-13
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Granted: 1975-02-04
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Expires: 1993-04-13
Abstract
Abstract The present invention relates to systems which utilise a very thin electron beam (diameter one-tenth of a micron or less) to reach a point upon a given surface or to write-in an information there or to read one information therefrom. The object of the invention is to achieve a relative accuracy in the order of 10 5 to 10 6. Two scales are marked at two adjacent sides of a square or rectangular target. They comprise studs or spots of metal having a high secondary electron emission coefficient, these electrons being detected by an auxiliary electrode. These studs define a cross-ruled arrangement on the target, which serves for coarse guidance or location. Fine adjustment is obtained by interpolation within a small square of the cross-ruled arrangement.
Inventors
- 👤 Jacques Trotel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 14:20
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/04; H01J37/147; H01J37/1471; H01J29/00; H01J29/46; H01J29/70; H01J37/30; H01J37/304; H01J37/3045; Y; Y10; Y10S; Y10S505/00; Y10S505/825; Y10S505/872
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
117 words
A device for increasing the accuracy of addressing an electron beam striking a surface, comprising in an evacuated enclosure a cathode capable of emitting an electron beam in an electric field; an electron beam deflection system; an anode consisting of a target surface; two levelling-rods perpendicular to one another said levelling rods respectively having graduations, said graduations being made of a substance responding to electron impact, in another manner than that of the remainder of the rods; means for detecting the response to said electron impact; means for adressing a predetermined point of said target, by scanning successively in the directions of one rod, and of the other, for impinging upon the corresponding graduation of the rods.
Claim 2
Independent Claim
117 words
A device for increasing the accuracy of addressing an electron beam striking a surface, comprising in an evacuated enclosure a cathode capable of emitting an electron beam in an electric field; an electron beam deflection system; an anode consisting of a target surface; two levelling-rods perpendicular to one another said levelling rods respectively having graduations, said graduations being made of a substance responding to electron impact, in another manner than that of the remainder of the rods; means for detecting the response to said electron impact; means for adressing a predetermined point of said target, by scanning successively in the directions of one rod, and of the other, for impinging upon the corresponding graduation of the rods.
Claim 3
Dependent Claim
15 words
A device as claimed in claim 1, wherein said response is secondary emission of electrons.
Claim 4
Dependent Claim
39 words
A device as claimed in claim 1, wherein said deflection system comprises a servodevice which causes the beam to displace to a position astride a predetermined edge of an arbitrary graduation on one or the other of said levelling-rods.
Claim 5
Dependent Claim
19 words
A device as claimed in claim 1, wherein said substance is gold, the remainder of said levelling-rods being chromium.
Claim 6
Dependent Claim
39 words
A device as claimed in claim 1, wherein said enclosure further comprises around said cathode a screen which is rendered superconductive by thermic contact with a cryogenic source consisting of a reservoir containing a liquid gas surrounding said screen.
Claim 7
Dependent Claim
50 words
A device as claimed in claim 1, wherein said deflection means comprise a first and a second unit; said first unit serving to move the beam into the neighbourhood of a predetermined graduation, an said second unit serving to locate the beam astride one of the edges of said graduation.
Claim 8
Dependent Claim
156 words
A method of addressing an electron beam utilising a device as claimed in claim 1, comprising the following stages: a. Identification of a predetermined point on said target surface, by its coordinates X Nx + x Y Ny + y where Nx and Ny represent the number of intervals between graduations on each of levelling-rods arranged on the reference axes of the system (X,Y), and the quantities x and y represent fractions of such an interval which is taken as unity; b. control of the deflection in order to bring the impact point of the beam to: Xo Nx Y O c. control of the deflection in order to bring the impact point of the beam to: X O Yo Ny d. control of the deflection in order to bring the impact point the beam to the point: Xo Nx Yo Ny e. control of the deflection in order to achieve the final point (X, Y).
Claim 9
Dependent Claim
12 words
A cathode ray tube comprising a device as claimed in claim 1.
Claim 10
Dependent Claim
11 words
An electron microscope incorporating a device as claimed in claim 1.
Claim 11
Dependent Claim
12 words
An electronic mask-making device comprising a device as claimed in claim 1.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-02-03 | 1978-08-05 | 1979-02-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-02-03 | 1982-08-05 | 1983-02-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-02-03 | 1986-08-05 | 1987-02-04 | $7700.00 | Window Closed / Lapsed |