US3859956A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Multiworkpiece condensation coating apparatus
Assignee: AT&T Inc
•
Filing: 1974-01-10
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Granted: 1975-01-14
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Expires: 1994-01-10
Abstract
Abstract The disclosed apparatus permits the successive condensation coating of both sides of several substrate wafers from the vapor phase without intermediate manipulation of each wafer. Each wafer holder is pivotally mounted in a main frame in a state of unbalance. After the coating of one side of each wafer, the main frame is rotated to a second position so as to expose the other side of each wafer to the vapor source. The main frame is supplied with stops to limit the motion of each wafer holder such that in either position of the main frame, each wafer is held perpendicular to the incident vapor flux. This tends to minimize shadowing produced by nonperpendicular incidence of the vapor flux through an aperture mask and to enhance coating uniformity across each substrate wafer.
Inventors
- 👤 Carl Ralph Paola
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 19:11
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/50
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
243 words
Apparatus for coating a plurality of workpieces, in which each workpiece is held in one of two angular positions relative to an incident vapor flux, each workpiece possessing at least a first planar surface and a second planar surface, which apparatus comprises: a. a support member; b. a main frame rotationally mounted to the support member; c. means for rotating the main frame relative to the support member from a first orientation to a second Orientation; d. a first set of stopping members and a second set of stopping members affixed to the main frame; e. a plurality of workpiece holders freely pivotally mounted to the main frame in an unbalanced state such that, when the main frame is in the first orientation each workpiece holder abutts at least one stopping member of the first set, and when the main frame is in the second orientation each workpiece holder abutts at least one stopping member of the second set; wherein the relative positioning of the elements is selected such that, when the main frame is in the first orientation, each workpiece holder comes to rest with the first planar surface of its workpiece perpendicular to the incident vapor flux and when the main frame is in the second orientation, each workpiece holder comes to rest with the second planar surface of its workpiece perpendicular to the incident vapor flux; whereby rotation of the main frame serves to simultaneously reorient each of the workpieces.
Claim 2
Dependent Claim
243 words
Apparatus for coating a plurality of workpieces, in which each workpiece is held in one of two angular positions relative to an incident vapor flux, each workpiece possessing at least a first planar surface and a second planar surface, which apparatus comprises: a. a support member; b. a main frame rotationally mounted to the support member; c. means for rotating the main frame relative to the support member from a first orientation to a second Orientation; d. a first set of stopping members and a second set of stopping members affixed to the main frame; e. a plurality of workpiece holders freely pivotally mounted to the main frame in an unbalanced state such that, when the main frame is in the first orientation each workpiece holder abutts at least one stopping member of the first set, and when the main frame is in the second orientation each workpiece holder abutts at least one stopping member of the second set; wherein the relative positioning of the elements is selected such that, when the main frame is in the first orientation, each workpiece holder comes to rest with the first planar surface of its workpiece perpendicular to the incident vapor flux and when the main frame is in the second orientation, each workpiece holder comes to rest with the second planar surface of its workpiece perpendicular to the incident vapor flux; whereby rotation of the main frame serves to simultaneously reorient each of the workpieces.
Claim 3
Dependent Claim
21 words
Apparatus of claim 1 adapted for holding workpieces in which the first planar surface is parallel to the second planar surface.
Claim 4
Dependent Claim
29 words
Apparatus of claim 1 in which the unbalanced state of the workpiece holders is produced by displacing the pivot axis from the axis of symmetry of the workpiece holder.
Claim 5
Dependent Claim
13 words
Apparatus of claim 1 including at least one source of the incident flux.
Claim 6
Dependent Claim
11 words
Apparatus of claim 4 including means for thermally vaporizing source material.
Claim 7
Dependent Claim
12 words
Apparatus of claim 4 including means for ion beam sputtering source material.
Claim 8
Dependent Claim
18 words
Apparatus of claim 4 including means for evacuating the space between the source material and the workpiece holders.
Claim 9
Dependent Claim
15 words
Apparatus of claim 1 in which each workpiece holder includes at least one pattern mask.
References Cited (Backward Citations)
US2912351A
Cited
US3396696A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-01-13 | 1978-07-15 | 1979-01-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-01-13 | 1982-07-15 | 1983-01-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-01-13 | 1986-07-15 | 1987-01-14 | $7700.00 | Window Closed / Lapsed |