US3859226A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Secondary ion mass spectroscopy
Assignee: Leybold Heraeus Verwaltung GmbH
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Filing: 1973-11-12
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Granted: 1975-01-07
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Expires: 1993-11-12
Abstract
Abstract In a secondary ion mass spectroscopic instrument including a source of ions to be measured and a quadrupole mass analyzer, a baffle is disposed in the instrument between the source and the analyzer so as to block direct line-of-sight communication therebetween and thereby prevent fast neutral particles, photons and fast electrons and reflected fast ions from reaching the analyzer.
Inventors
- 👤 Helmut Schillalies
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 00:23
CPC Classifications
H; H01; H01J; H01J49/00; H01J49/02; H01J49/06; H01J49/067; H01J49/004; H01J49/04; H01J49/0431; H01J49/044; H01J49/26; H01J49/34; H01J49/42; H01J49/4205; H01J49/421; H01J49/4215; H01J49/44; H01J49/46; H01J49/48
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
66 words
In a secondary ion mass spectroscopy apparatus composed of a probe from which the ions to be measured emanate, a quadrupole mass analyzer presenting an entrance plane for the ions, and a secondary electron multiplier for receiving the ions to be measured, the improvement comprising baffle means disposed between said probe and said entrance plane of said quadrupole mass analyzer for blocking direct line-of-sight communication therebetween.
Claim 2
Dependent Claim
66 words
In a secondary ion mass spectroscopy apparatus composed of a probe from which the ions to be measured emanate, a quadrupole mass analyzer presenting an entrance plane for the ions, and a secondary electron multiplier for receiving the ions to be measured, the improvement comprising baffle means disposed between said probe and said entrance plane of said quadrupole mass analyzer for blocking direct line-of-sight communication therebetween.
Claim 3
Dependent Claim
33 words
An arrangement as defined in claim 1 wherein the apparatus further includes an electrostatic lens disposed between said probe and said quadrupole mass analyzer, and said baffle means is located in said lens.
Claim 4
Dependent Claim
44 words
An arrangement as defined in claim 2 wherein said lens comprises three successive tubes which define two successive tubular lenses, and said baffle means is disposed in the center one of said tube and is placed at the same potential as said center tube.
Claim 5
Dependent Claim
51 words
An arrangement as defined in claim 3 wherein said probe has an ion emission surface disposed in the focal plane of that one of said tubular lenses which is nearer said probe and the focal plane of the other said lens lies in said Entrance plane of said quadrupole mass analyzer.
Claim 6
Dependent Claim
22 words
An arrangement as defined in claim 3 wherein said lenses are given focal lengths which are sufficiently short to produce energy-dependent deflections.
Claim 7
Dependent Claim
34 words
An arrangement as defined in claim 1 wherein the apparatus further includes an energy analyzer disposed between said probe and said quadrupole mass analyzer, and said baffle means is disposed in said energy analyzer.
Claim 8
Dependent Claim
17 words
An arrangement as defined in claim 6 wherein said energy analyzer constitutes means for focusing slow particles.
Claim 9
Dependent Claim
21 words
An arrangement as defined in claim 7 further comprising ion deceleration means disposed between said energy analyzer and said mass analyzer.
References Cited (Backward Citations)
US3501630A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-01-06 | 1978-07-08 | 1979-01-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-01-06 | 1982-07-08 | 1983-01-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-01-06 | 1986-07-08 | 1987-01-07 | $7700.00 | Window Closed / Lapsed |