Coating machine having an adjustable rotation system

Claim 2

In a coating machine having an adjustable double rotation system, a vacuum chamber, at least one coating source disposed in the vacuum chamber, a plurality of spindle assemblies mounted in the chamber and each having a rotatable spindle, a substrate holder carried by each spindle and adapted to receive at least one substrate which can receive coating material from the coating source, means for orbiting the spindle assemblies about the coating source, means for rotating the spindles about their own axes of rotation during the time that they are being rotated about the source and means for adjusting the spacing of the spindle assemblies sUbstantially along the radial extent toward and away from the axis of rotation of the spindle assemblies about the source, said means for adjusting including a shaft extending radially of the chamber and drive means slidably mounted on said shaft and driving said spindle and means in the chamber for driving said shaft.

Claim 3

A machine as in claim 1 together with means for adjusting the angle of the spindle with respect to the position of the coating source.

Claim 4

A machine as in claim 1 wherein said means for rotating the spindles of the spindle assemblies about their own axes includes a bevel gear mounted on the spindle and bevel gear means for driving the bevel gear on the spindle.

Claim 5

A machine as in claim 3 wherein said bevel gear means includes bevel gears having abutting circumferential surfaces which are inclined at angles with respect to each other.

Claim 6

A machine as in claim 1 wherein said drive means includes gearing means.

Claim 7

A machine as in claim 5 wherein said means within said chamber includes a planetary gear mounted on said shaft and a stationary sun gear having its axis coincident with the axis of rotation for the spindle assemblies about the source and engaging the gear mounted on the shaft.

Claim 8

A machine as in claim 5 together with a stem mounted in said chamber, a housing rotatably mounted on said stem, means carried by said housing for supporting said shafts in a generally horizontal position and means for rotating said housing.

Claim 9

In a coating chamber having an adjustable double rotation system, a vacuum chamber, at least one coating source disposed in the vacuum chamber, a stem mounted in the vacuum chamber, a housing rotatably mounted on the stem, a plurality of radially extending spoke assemblies mounted on said housing, bearing means carried by said spoke assemblies, a generally horizontal shaft mounted in each of the bearing assemblies, a planetary gear carried by the shaft, a stationary sun gear disposed within the chamber and engaging the planetary gear, means for causing rotation of said housing about said stem and to cause rotation of said spoke assemblies and the shafts carried thereby about the axis of said stem so that said shaft is rotated about its axis, a drive member slidably mounted on said shaft, spindle carrier means associated with said drive member and movable longitudinally of the shaft with said drive member, a spindle assembly, means mounting said spindle assembly on said spindle carrier, said spindle assembly including a spindle rotatably mounted therein and driven means adapted to engage the drive member and engaging the spindle for causing rotation of the spindle as the drive member is rotated upon rotation of said shaft, said spindle being adapted to carry a substrate holder for carrying substrates which are to be coated with material emanating from the coating source.

Claim 10

In a coating chamber having an adjustable double rotation system, a vacuum chamber, at least one coating source disposed in the vacuum chamber, a stem mounted in the vacuum chamber, a housing rotatably mounted on the stem, a plurality of radially extending spoke assemblies mounted on said housing, bearing means carried by said spoke assemblies, a generally horizontal shaft mounted in each of the bearing assemblies, a planetary gear carried by the shaft, a stationary sun gear disposed within the chamber and engaging the planetary gear, means for causing rotation of said housing about said stem and to cause rotation of said spoke assemblies and the shafts carried thereby about the axis of said stem so that said shaft is rotated about its axis, a drive member slidably mounted on said shaft, spindle carrier means associated with said drive member and movable longitudinally of the shaft with said drive member, a spindle assembly, means mounting said spindle assembly on said spindle carrier, said spindle assembly including a spindle rotatably mounted therein and driven means adapted to engage the drive member and engaging the spindle for causing rotation of the spindle as the drive member is rotated upon rotation of said shaft, said spindle being adapted to carry a substrate holder for carrying substrates which are to be coated with material emanating from the coating source.

Claim 11

A machine as in claim 8 together with means for retaining said spindle carrier means in predetermined positions extending longitudinally of the shaft.

Claim 12

A machine as in claim 9 together with means for pivotally mounting said spindle assembly on said spindle carrier means whereby the angle of the spindle with respect to the source can be adjusted.

Claim 13

A machine as in claim 10 wherein the angle can be varied from vertical to 32* from the vertical.

Claim 14

A machine as in claim 8 wherein said drive member is in the form of a bevel gear having teeth with abutting circumferential surfaces inclined at an angle with respect to each other.

Claim 15

A machine as in claim 10 wherein said means for adjusting the angle of the spindle assembly includes a member secured to the spindle carrier means to hold the spindle assembly in the desired angular position.

Claim 16

A machine as in claim 13 together with additional means for locking said spindle assembly in the desired angular position.