US3858049A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for sem specimen coating and transfer
Assignee: Etec Systems Inc
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Filing: 1973-09-17
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Granted: 1974-12-31
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Expires: 1993-09-17
Abstract
Abstract An improved method and apparatus for facilitating specimen handling during freezing, coating and transfer to and from the main chamber of an SEM. A unique specimen shuttle manipulable by a control rod permits transfer of a specimen between the main chamber and an auxiliary air lock chamber alternatively defined by an air lock housing and a coating apparatus housing. Either housing is removably attached to an entrance flange communicating via a gate valve assembly with the main chamber and is provided with a sealable access aperture for enabling transfer of both frozen and unfrozen specimens to and from the airlock chamber. The specimen manipulator enables specimen attachment and removal from the shuttle and has a frost shield for eliminating frost formation on the specimen surface during handling after freezing. The coating apparatus has a shuttle rotating platform and a removable oscillating filament assembly for enabling deposition of a layer of electrically conductive material on the specimen surface at the SEM site. A heat conducting path provides shuttle cooling in the main chamber to maintain a frozen specimen at a low temperature. The entrance flange is coupled to a vacuum pump to permit independent evacuation and backfilling of the airlock chamber in order to eliminate main chamber pressurization during specimen transfer.
Inventors
- 👤 G Koch
- 👤 C Petersen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 19:40
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/20; H01J37/18
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
145 words
A method for transferring a specimen to an evacuated SEM chamber having an airlock chamber in communication therewith via a valved aperture, said airlock chamber having an associated normally sealed access aperture having an area substantially less than the area of said valved aperture, said method comprising the steps of: a. mounting said specimen on a specimen cap; b. releasably attaching said specimen cap to a specimen manipulator; c. unsealing said access aperture; d. inserting the portion of said manipulator bearing said specimen cap into said airlock chamber via said normally sealed access aperture; e. attaching said specimen cap to a specimen shuttle located in said airlock chambEr; f. withdrawing said specimen manipulator from said airlock chamber via said access aperture; g. re-sealing said access aperture; h. evacuating said airlock chamber; and j. transferring said shuttle to said evacuated SEM chamber via said valved aperture.
Claim 2
Independent Claim
145 words
A method for transferring a specimen to an evacuated SEM chamber having an airlock chamber in communication therewith via a valved aperture, said airlock chamber having an associated normally sealed access aperture having an area substantially less than the area of said valved aperture, said method comprising the steps of: a. mounting said specimen on a specimen cap; b. releasably attaching said specimen cap to a specimen manipulator; c. unsealing said access aperture; d. inserting the portion of said manipulator bearing said specimen cap into said airlock chamber via said normally sealed access aperture; e. attaching said specimen cap to a specimen shuttle located in said airlock chambEr; f. withdrawing said specimen manipulator from said airlock chamber via said access aperture; g. re-sealing said access aperture; h. evacuating said airlock chamber; and j. transferring said shuttle to said evacuated SEM chamber via said valved aperture.
Claim 3
Dependent Claim
45 words
The method of claim 1 wherein said step (b) of attahcing is followed by the steps of: i. submerging said specimen in a cooling fluid contained in an associated cooling tank; and ii. shielding said specimen from ambient with an overlying pool of cooling fluid.
Claim 4
Dependent Claim
53 words
The method of claim 1 wherein said step (a) of mounting is preceded by the steps of: i. chilling said shuttle in said evacuated SEM chamber; ii. evacuating said airlock chamber; iii. transferring said shuttle to said airlock chamber via said valved aperture; and iv. backfilling said airlock chamber to substantially ambient pressure.
Claim 5
Dependent Claim
29 words
The method of claim 1 wherein said step (j) of transferring is preceded by the step of coating said specimen in said airlock chamber with an electrically conductive material.
Claim 6
Dependent Claim
39 words
The method of claim 4 wherein said step of coating includes the steps of: i. rotating said specimen and ii. cyclically oscillating the source of said material along an arcuate path having said specimen as the center of rotation.
Claim 7
Dependent Claim
75 words
The method of claim 1 further including the steps of: k. transferring said shuttle to said airlock chamber via said valved aperture; l. backfilling said airlock chamber to substantially ambient pressure; m. unsealing said access aperture; n. inserting the attachment end of said manipulator into said airlock chamber; o. releasably attaching said specimen cap to said manipulator; and p. withdrawing said manipulator with said specimen attached thereto from said airlock chamber via said access aperture.
Claim 8
Dependent Claim
23 words
The method of claim 6 wherein said step (p) of removing is followed by steps (a) - (j) performed with a different specimen.
Claim 9
Dependent Claim
49 words
The method of claim 1 further including the steps of: k. transferring said shuttle to said airlock chamber via said valved aperture; p. coating said specimen in said airlock chamber with an electrically conductive material; and q. transferring said shuttle to said evacuated SEM chamber via said valved aperture.
Claim 10
Dependent Claim
199 words
In combination: an enclosure defining an SEM chamber, said enclosure having a wall providing an access aperture; a shuttle mounting platform mounted in said SEM chamber; a housing mounted on said wall in sealing relation thereto, said housing including an outwardly extending flange defining an entrance tunnel terminating adjacent said access aperture, said flange having sealing means adjacent the outer end thereof; a gate valve assembly carried by said housing for sealing said access aperture when in a closed position; an airlock housing defining an airlock chamber operatively associated with said flange and said sealing means in sealing relation thereto, said airlock housing having sealable means for providing access to said airlock chamber; a specimen shuttle; means for transferring said shuttle between said airlock chamber and said shuttle mounting platform; said shuttle including support means operatively associated with said transfer means for providing a low friction sliding support during transfer of said shuttle when said transfer means is coupled thereto in a first operative position and for providing a biasing force to secure said shuttle to said mounting platform when said transfer means is withdrawn from said first operative position; and a specimen cap detachably mounted to said shuttle.
Claim 11
Dependent Claim
199 words
In combination: an enclosure defining an SEM chamber, said enclosure having a wall providing an access aperture; a shuttle mounting platform mounted in said SEM chamber; a housing mounted on said wall in sealing relation thereto, said housing including an outwardly extending flange defining an entrance tunnel terminating adjacent said access aperture, said flange having sealing means adjacent the outer end thereof; a gate valve assembly carried by said housing for sealing said access aperture when in a closed position; an airlock housing defining an airlock chamber operatively associated with said flange and said sealing means in sealing relation thereto, said airlock housing having sealable means for providing access to said airlock chamber; a specimen shuttle; means for transferring said shuttle between said airlock chamber and said shuttle mounting platform; said shuttle including support means operatively associated with said transfer means for providing a low friction sliding support during transfer of said shuttle when said transfer means is coupled thereto in a first operative position and for providing a biasing force to secure said shuttle to said mounting platform when said transfer means is withdrawn from said first operative position; and a specimen cap detachably mounted to said shuttle.
Claim 12
Dependent Claim
20 words
The combination of claim 9 further including means for independently evacuating and backfilling said SEM chamber and said airlock chamber.
Claim 13
Dependent Claim
59 words
The combination of claim 9 wherein said shuttle includes mounting means in thermal contact with said specimen cap and a portiOn of said mounting platform when said shuttle is secured thereto, and further including a heat sink and means for providing a high thermal conductivity path from said shuttle mounting platform to said heat sink to cool said specimen.
Claim 14
Dependent Claim
20 words
The combination of claim 9 wherein said airlock housing includes means for coating said specimen with an electrically conductive material.
Claim 15
Dependent Claim
43 words
The combination of claim 12 wherein said coating means includes means for rotating said specimen, a filament assembly for providing said conductive material, and means for cyclically oscillating said filament assembly along an arcuate path having said specimen as the center of rotation.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-12-30 | 1978-07-01 | 1978-12-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-12-30 | 1982-07-01 | 1982-12-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-12-30 | 1986-07-01 | 1986-12-31 | $7700.00 | Window Closed / Lapsed |