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US3856579A
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Sputtered magnetic materials comprising rare-earth metals and method of preparation
Assignee: Battelle Development Corp
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Filing: 1972-12-04
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Granted: 1974-12-24
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Expires: 1992-12-04
Abstract
Abstract Magnetic materials of the transition metal-rare-earth metal type are formed by high-rate sputter-deposition techniques which permit formation of thick bodies of magnetic materials having new and unique properties.
Inventors
- 👤 R Allen
- 👤 R Nelson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 10:52
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3411; H01J37/3414; H01J37/3426; H01F; H01F10/00; H01F10/08; H01F10/10; H01F10/12; H01F10/126; H01F41/00; H01F41/14; H01F41/18
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
85 words
A SPUTTERED-DEPOSIT OF A MAGNETIC MATERIAL CONSISTING ESSENTIALLY OF A RARE-EARTH METAL (R) SELECTED FROM THE CLASS CONSISTING OF YTRIUM AND ELEMENTS OF ATOMIC NUMBER OF 57 TO 71, INCLUSIVE, AND MIXTURES THEREOF, AND A TRANSITION METAL (M) SELECTED FROM THE CLASS CONSISTING OF COBALT, IRON AND NICKEL AND MIXTURES THEREOF, SAID DEPOSIT HAVING A THICKNESS GREATER THAN 0.001 INCH AND HAVING BEEN FORMED AT A DEPOSITION RATE IN EXCESS OF 0.5 MIL PER HOUR, SAID MATERIAL HAVING A GRAIN SIZE LESS THAN 10 MICRONS.
Claim 2
Dependent Claim
85 words
A SPUTTERED-DEPOSIT OF A MAGNETIC MATERIAL CONSISTING ESSENTIALLY OF A RARE-EARTH METAL (R) SELECTED FROM THE CLASS CONSISTING OF YTRIUM AND ELEMENTS OF ATOMIC NUMBER OF 57 TO 71, INCLUSIVE, AND MIXTURES THEREOF, AND A TRANSITION METAL (M) SELECTED FROM THE CLASS CONSISTING OF COBALT, IRON AND NICKEL AND MIXTURES THEREOF, SAID DEPOSIT HAVING A THICKNESS GREATER THAN 0.001 INCH AND HAVING BEEN FORMED AT A DEPOSITION RATE IN EXCESS OF 0.5 MIL PER HOUR, SAID MATERIAL HAVING A GRAIN SIZE LESS THAN 10 MICRONS.
Claim 3
Dependent Claim
51 words
A magnetic material as set forth in claim 1 having permanent magnetic properties, R being selected from the class consisting of yttrium and elements of atomic number of 57 through 63, inclusive, and mixtures thereof, and M is a metal selected from the class of cobalt and iron and mixtures thereof.
Claim 4
Dependent Claim
32 words
A magnetic material as set forth in claim 2 wherein R and M are in a ratio of between about 4 to 10 parts M per part R on a mol basis.
Claim 5
Dependent Claim
26 words
A magnetic material as set forth in claim 2 wherein M is a mixture of cobalt and iron containing at least about 25 mol percent cobalt.
Claim 6
Dependent Claim
13 words
A magnetic material as set forth in claim 2 wherein M is cobalt.
Claim 7
Dependent Claim
13 words
A magnetic material as set forth in claim 2 having the composition RM5.
Claim 8
Dependent Claim
22 words
A magnetic material as set forth in claim 6 wherein R is selected from the class consisting of samarium, praseodymium, and yttrium.
Claim 9
Dependent Claim
13 words
A magnetic material as set forth in claim 2 having the composition R2M17.
Claim 10
Dependent Claim
13 words
A magnetic material as set forth in claim 6 having the composition SmCo5.
Claim 11
Dependent Claim
13 words
A magnetic material as set forth in claim 6 having the composition PrCo5.
Claim 12
Dependent Claim
52 words
A magnetic material as set forth in claim 1 consisting essentially of a sputtered deposit including a rare-earth metal selected from the class consisting of elements of atomic number 64 to 71, inclusive, and mixtures thereof, and a transition metal selected from the class consisting of iron and nickel and mixtures thereof.
Claim 13
Dependent Claim
15 words
A magnetic material as set forth in claim 11 wherein the transition metal is iron.
Claim 14
Dependent Claim
15 words
A magnetic material as set forth in claim 11 wherein the transition metal is nickel.
Claim 15
Independent Claim
92 words
The method of forming magnetic materials which comprises forming a target consisting essentially of a rare-earth metal selected from the class comprising yttrium and elements of atomic number 57 to 71, inclusive or mixtures thereof, and, a transition metal selected from the class consisting of iron, cobalt and nickel, and mixtures thereof, sputtering said target upon a substrate in an inert atmosphere under conditions to deposit the sputtered mixture at a rate in excess of 0.5 mil per hour, until a deposit is obtained of at least about 0.001 inch in thickness.
Claim 16
Independent Claim
92 words
The method of forming magnetic materials which comprises forming a target consisting essentially of a rare-earth metal selected from the class comprising yttrium and elements of atomic number 57 to 71, inclusive or mixtures thereof, and, a transition metal selected from the class consisting of iron, cobalt and nickel, and mixtures thereof, sputtering said target upon a substrate in an inert atmosphere under conditions to deposit the sputtered mixture at a rate in excess of 0.5 mil per hour, until a deposit is obtained of at least about 0.001 inch in thickness.
Claim 17
Dependent Claim
18 words
The method of claim 14 wherein the material deposited upon said substrate is heated to anneal the same.
Claim 18
Dependent Claim
31 words
The method of claim 14 wherein said substrate and depositing material are maintained at a temperature not in excess of room temperature during deposition and the mixture deposited is subsequently annealed.
Claim 19
Dependent Claim
19 words
The method of claim 16 wherein the deposited material is SmCo5, and said annealing is performed at 600* C.
Claim 20
Dependent Claim
19 words
The method of claim 16 wherein the deposited material is PrCo5 and the deposit is annealed at 600* C.
Claim 21
Dependent Claim
20 words
The method of claim 14 wherein said target is formed of a mixture of finely divided rare-earth and transition metals.
Claim 22
Dependent Claim
23 words
The method of claim 14 wherein said target is formed as an array of discrete bodies of the rare-earth metal and transition metal.
Claim 23
Dependent Claim
19 words
The method of claim 14 wherein said target comprises an intermetalliC compound of the rare-earth metal and transition metal.
Claim 24
Dependent Claim
18 words
The method of claim 14 wherein said target comprises an alloy of the rare-earth metal and transition metal.
Claim 25
Dependent Claim
19 words
The method of claim 14 wherein a magnetic field is applied to the area of deposition on said substrate.
Claim 26
Dependent Claim
18 words
The method of claim 14 wherein the rate of deposit is at least about 1.5 mils per hour.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-12-23 | 1978-06-24 | 1978-12-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-12-23 | 1982-06-24 | 1982-12-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-12-23 | 1986-06-24 | 1986-12-24 | $7700.00 | Window Closed / Lapsed |