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US3850686A Expired / Lapsed US ⏱️ 0.0 years remaining

Passivating method

Assignee: Teledyne Semiconductor Inc
•
Filing: 1972-11-06
•
Granted: 1974-11-26
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Expires: 1992-11-06
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Abstract

Abstract A formulation and method for conditioning, gettering and sealing unglassed semiconductor devices. Fine particles of glass powder are dispersed in a conditioning and gettering solution of certain synergistic oxides. The formulation is applied and dried to condition, getter, seal and otherwise passivate the device surface.

Inventors

  • 👤 D Flowers

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-01 02:37
CPC Classifications
H; H10; H10W; H10W76/00; H10W76/40; H10W76/42; H10W76/48; H10W74/00; H10W74/10; H10W74/131; Y; Y10; Y10S; Y10S438/00; Y10S438/958

Claims Analysis

Total Claims: 11
Claim 1
Independent Claim 100 words
IN A METHOD FOR PASSIVATING A SEMICONDUCTOR DEVICE WHICH INCLUDES THE STEPS OF APPLYING TO A SURFACE THEREOF TO BE PASSIVATED A FORMULATION OF A PASSIVATING AMOUNT OF AT LEAST ONE OXIDE OF AN ELEMENT SELECTED FROM GROUPS IIA, IIB, IIIA, IIIB, IVA, VA, VB, VIA AND VIB OF THE PERIODIC TABLE, IN A SOLVENT FOR DISSOLVING SAID OXIDE, SAID SOLVENT BEING SUBSTANTIALLY FREE OF CARBONYL GROUPS AND CONSTITUTED TO WET SAID SURFACE, AND HEATING SAID SURFACE WITH SAID APPLIED OXIDE THEREON, THE IMPROVEMENT ACCORDING TO WHICH THERE IS ADDED TO SAID FORMULATION ABOUT 0.1-50 PARTS OF GLASS PARTICLES PER
Claim 2
Dependent Claim 100 words
IN A METHOD FOR PASSIVATING A SEMICONDUCTOR DEVICE WHICH INCLUDES THE STEPS OF APPLYING TO A SURFACE THEREOF TO BE PASSIVATED A FORMULATION OF A PASSIVATING AMOUNT OF AT LEAST ONE OXIDE OF AN ELEMENT SELECTED FROM GROUPS IIA, IIB, IIIA, IIIB, IVA, VA, VB, VIA AND VIB OF THE PERIODIC TABLE, IN A SOLVENT FOR DISSOLVING SAID OXIDE, SAID SOLVENT BEING SUBSTANTIALLY FREE OF CARBONYL GROUPS AND CONSTITUTED TO WET SAID SURFACE, AND HEATING SAID SURFACE WITH SAID APPLIED OXIDE THEREON, THE IMPROVEMENT ACCORDING TO WHICH THERE IS ADDED TO SAID FORMULATION ABOUT 0.1-50 PARTS OF GLASS PARTICLES PER
Claim 3
Dependent Claim 28 words
The improvement according to claim 1 in which the amount of said glass particles added to said formulation is about 0.5-10 parts per 1,000 parts of said formulation.
Claim 4
Dependent Claim 84 words
The improvement according to claim 1 in which said oxide is an oxide of a Group VA element, said passivating amount thereof is about 0.01-10 weight percent of said solution and is soluble in said solvent and said solution additionally contains at least 0.1 part per part of said Group VA oxide of an oxide of a second element, which additional oxide alone is insoluble alone in said solvent but which is soluble in said solvent in the presence of said Group VA oxide.
Claim 5
Dependent Claim 65 words
The improvement according to claim 3 in which said solution additionally contains at least 0.01 part of an oxide of a thrid element per part of said Group VA oxide, said third oxide being insoluble in said solvent in the presence alone of said Group VA oxide, but soluble in the presence in said solvent of both said Group VA oxide and said second oxide.
Claim 6
Dependent Claim 18 words
The improvement according to claim 3 in which said Group VA metal oxide is an oxide of phosphorus.
Claim 7
Dependent Claim 29 words
The improvement according to claim 5 in which said solution additionally contains at least 0.1 part of oxide of boron per part by weight of said oxide of phosphorus.
Claim 8
Dependent Claim 30 words
The improvement according to claim 6 in which said solution additionally contains at least 0.005 part of an oxide of vanadium per part by weight of said oxide of phosphorus.
Claim 9
Dependent Claim 13 words
The method according to claim 1 in which said solvent is an alcohol.
Claim 10
Dependent Claim 26 words
The method according to claim 1 in which said surface to be passivated is substantially unglassed and said device is heated at about 300*C or higher.
Claim 11
Dependent Claim 16 words
The method according to claim 1 in which said surface to be passivated is substantially glassed.

References Cited (Backward Citations)

US3476620A Cited
US3476619A Cited
US3637425A Cited
US3507709A Cited
US3669693A Cited
US3701696A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1977-11-25 1978-05-27 1978-11-26 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1981-11-25 1982-05-27 1982-11-26 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1985-11-25 1986-05-27 1986-11-26 $7700.00 Window Closed / Lapsed

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