US3849283A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Sputtering apparatus
Assignee: ERA Patents Ltd
•
Filing: 1972-05-01
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Granted: 1974-11-19
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Expires: 1992-05-01
Abstract
Abstract Sputtering apparatus for use with a radio-frequency supply source includes a double electrode arrangement within an evacuable enclosure and in which the individual electrodes are electrically isolated by means of separate walls surrounding each electrode system so as to separate the electric fields associated with the two electrode systems. The walls may define two separately evacuable chambers and these may be interconnected for evacuation by a single pump if required. Separate magnetic field coils may surround each electrode system.
Inventors
- 👤 G Brackley
- 👤 D Satchell
- 👤 G Jackson
- 👤 R Pickard
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 18:09
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/35; H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3402
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
93 words
Sputtering apparatus for use with a radio frequency supply source, said apparatus inclUding an evacuable enclosure, a double electrode arrangement including two individual electrodes within said enclosure having means affording connection of said electrodes to opposite terminals of a radio frequency source respectively, and wall means arranged to electrically isolate the individual electrodes of said arrangement by separating the electric fields associated with said electrodes when said radio frequency source is energized and defining two electrically separate sputtering areas, and two work supporting table means, one located in each of said areas respectively.
Claim 2
Dependent Claim
93 words
Sputtering apparatus for use with a radio frequency supply source, said apparatus inclUding an evacuable enclosure, a double electrode arrangement including two individual electrodes within said enclosure having means affording connection of said electrodes to opposite terminals of a radio frequency source respectively, and wall means arranged to electrically isolate the individual electrodes of said arrangement by separating the electric fields associated with said electrodes when said radio frequency source is energized and defining two electrically separate sputtering areas, and two work supporting table means, one located in each of said areas respectively.
Claim 3
Dependent Claim
16 words
Sputtering apparatus according to claim 1, and including separate magnetic field coils surrounding each electrode system.
Claim 4
Dependent Claim
13 words
Sputtering apparatus according to claim 1 including separate walls surrounding each electrode system.
Claim 5
Dependent Claim
21 words
Sputtering apparatus according to claim 3, in which the walls define two separate chambers, said chambers being adapted for independent evacuation.
Claim 6
Dependent Claim
26 words
Sputtering apparatus according to claim 4, including means interconnecting said chambers said means having a connection whereby both chambers may be evacuated by a single pump.
Claim 7
Dependent Claim
20 words
Sputtering apparatus according to claim 1 including separate ungrounded shielding associated with each individual electrode and means interconnecting said shielding.
Claim 8
Dependent Claim
34 words
Sputtering apparatus according to claim 4, in which said separate chambers are arranged side-by-side said chambers being formed with corresponding openings whereby to permit the continuous passage through them of substrates to be coated.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-11-18 | 1978-05-20 | 1978-11-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-11-18 | 1982-05-20 | 1982-11-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-11-18 | 1986-05-20 | 1986-11-19 | $7700.00 | Window Closed / Lapsed |