US3846294A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of coating the interior walls of through-holes
Assignee: RCA Corp
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Filing: 1974-01-11
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Granted: 1974-11-05
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Expires: 1994-01-11
Abstract
Abstract 1. A METHOD FOR SELECTIVELY COATING INTERIOR WALLS OF THROUGH-HOLES IN A SUBSTRATE WITH A THIN FILM OF A MATERIAL BY SPUTTERING, COMPRISING: (A) PROVIDING A TARGET WITH A SURFACE COMPRISED OF SAID MATERIAL TO BE SPUTTERED, (B) DISPOSING AGAINST SAID SURFACE OF SAID TARGET A SUBSTRATE IN WHICH THE THROUGH-HOLES TO BE COATED ARE FORMED, (C) INCLUDING A GLOW DISCHARGE IN AN IONIZABLE GAS PLASMA, AND (D) SPUTTERING SAID MATERIAL FROM SAID TARGET SURFACE ONTO SAID THROUGH-HOLE WALLS.
Inventors
- 👤 J Vossen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 11:28
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/04; C23C14/046
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
78 words
A METHOD FOR SELECTIVELY COATING INTERIOR WALLS OF THROUGH-HOLES IN A SUBSTRATE WITH A THIN FILM OF A MATERIAL BY SPUTTERING, COMPRISING: (A) PROVIDING A TARGET WITH A SURFACE COMPRISED OF SAID MATERIAL TO BE SPUTTERED, (B) DISPOSING AGAINST SAID SURFACE OF SAID TARGET A SUBSTRATE IN WHICH THE THROUGH-HOLES TO BE COATED ARE FORMED, (C) INCLUDING A GLOW DISCHARGE IN AN IONIZABLE GAS PLASMA, AND (D) SPUTTERING SAID MATERIAL FROM SAID TARGET SURFACE ONTO SAID THROUGH-HOLE WALLS.
Claim 2
Independent Claim
78 words
A METHOD FOR SELECTIVELY COATING INTERIOR WALLS OF THROUGH-HOLES IN A SUBSTRATE WITH A THIN FILM OF A MATERIAL BY SPUTTERING, COMPRISING: (A) PROVIDING A TARGET WITH A SURFACE COMPRISED OF SAID MATERIAL TO BE SPUTTERED, (B) DISPOSING AGAINST SAID SURFACE OF SAID TARGET A SUBSTRATE IN WHICH THE THROUGH-HOLES TO BE COATED ARE FORMED, (C) INCLUDING A GLOW DISCHARGE IN AN IONIZABLE GAS PLASMA, AND (D) SPUTTERING SAID MATERIAL FROM SAID TARGET SURFACE ONTO SAID THROUGH-HOLE WALLS.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-11-04 | 1978-05-06 | 1978-11-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-11-04 | 1982-05-06 | 1982-11-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-11-04 | 1986-05-06 | 1986-11-05 | $7700.00 | Window Closed / Lapsed |