Liquid phase epitaxy of alxga1-xas
Abstract
Abstract 1. IN A METHOD FOR CONTROLLING THE COMPOSITION OF A SINGLE CRYSTALLINF TERNARY COMPOUND SUCH AS ALXGA1-XAS DURING LIQUID PHASE EPITAXIAL GROWTH COMPRISING THE STEP OF: PROVIDING AN EQUILIBRIUM LIQUID SOLUTION AT AN ELEVATED TEMPERATURE CONSISTING OF THE COMPONENTS OF ALGA1-XAS WITH AN N-TYPE DOPANT THEREIN; PROVIDING A SINGLE CRYSTALLING SOLID SUBSTRATE IN SAID LIQUID IN EQUILIBRIUM WITH SAID LIQUID AT SAID TEMPERATURE; COOLING THE SYSTEM OF SAID LIQUID AND SAID SOLID AT A UNIFORM RATE TO A PREDETERMINED TEMPERATURE TO GROW BY LIQUID PHASE EPITAXY A LAYER OF SAID N-TYPE CONDUCTIVITY; HEATING SAID SOLUTION TO A TEMPERATURE SUFFICIENTLY ABOVE SASAID PREDETERMINED TEMPERATURE AND MAINTAINING SUCH ELEVATED TEMPERATURE FOR SUFFICIENT TIME SO AS TO PERFORM A REMELTING OF A THIN SURFACE LAYER OF THE EPITAXIAL OVERGROWTH, AND UNIFORMLY COOLING SAID MELT TO THE VICINITY OF SAID PREDETERMINED TEMPERATURE TO REGROW ANOTHER THIN LAYER OF EPITAXIAL OVERGROWTH OVER THAT LAYER OBTAINED DURING SAID HEATING STEP, WHEREBY SUCH REGROWTH LAYER IS OF THE ORDER OF A FRACTION TO FIVE MICRONS THICK.
Inventors
- 👤 J Blum
- 👤 K Shih
Bibliographic Details
Claims Analysis
Total Claims: 2References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-11-04 | 1978-05-06 | 1978-11-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-11-04 | 1982-05-06 | 1982-11-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-11-04 | 1986-05-06 | 1986-11-05 | $7700.00 | Window Closed / Lapsed |