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US3837855A Expired / Lapsed US ⏱️ 0.0 years remaining

Pattern delineation method and product so produced

Assignee: AT&T Inc
•
Filing: 1973-05-09
•
Granted: 1974-09-24
•
Expires: 1993-05-09
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Abstract

Abstract A process for the fabrication of a supported iron oxide pattern involves electromagnetic wave irradiation of a blank. The blank consists of a layer of iron oxide which is soluble in, for example, an acid medium. Irradiation results in insolubilization so that delineation is accomplished by immersing the processed blank in a suitable solvent.

Inventors

  • 👤 D Rousseau
  • 👤 W Sinclair

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-27 05:33
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/54; G03F7/00; G03F7/004; G03F7/0042; G03F7/0043; G03F7/20; G03F7/2037; H; H05; H05K; H05K3/00; H05K3/0002; H05K2203/00; H05K2203/05; H05K2203/0548; H05K2203/056

Claims Analysis

Total Claims: 10
Claim 1
Independent Claim 20 words
Procedure of claim 1 in which the pattern delineated portions are defined by the apertured part of a shadow mask.
Claim 2
Dependent Claim 22 words
Procedure of claim 2 in which the electromagnetic wave energy simultaneously is incident upon substantially the entirety of the said shadow mask.
Claim 3
Dependent Claim 13 words
Procedure of claim 1 in which the electromagnetic wave energy is substantially collimated.
Claim 4
Dependent Claim 29 words
Procedure of claim 4 in which the substantially collimated electromagnetic wave energy is caused to scan successive portions of the region of the film corresponding with the desired pattern
Claim 5
Dependent Claim 28 words
Procedure of claim 5 in which the amplitude of the said wave energy is sharply decreased at intervals with decrease corresponding with the limits of the desired pattern.
Claim 6
Dependent Claim 21 words
Procedure of claim 1 in which the said electromagnetic wave energy is of a wavelength within the infrared and visible spectra.
Claim 7
Dependent Claim 20 words
Procedure of claim 7 in which the said wave energy is of a maximum wavelength of approximately 5,600 Angstrom units.
Claim 8
Dependent Claim 66 words
Procedure in accordance with claim 8 in which the said wave energy is partially focused and has a spot size within the range from 1 Mu m2 to several square millimeters, exposure or any part of the desired pattern integrating to a time within the range of from 50 nanoseconds to 5 minutes in which the power density in the spot is at least 1 watt/mm2.
Claim 9
Dependent Claim 50 words
Procedure in accordance with claim 9 in which said wave energy is essentially focused wherein said energy is scanned at a speed within the range of at least 0.1 centimeter per second and in which the power density of the said wave energy is at least 3 X 102 watts/mm2.
Claim 10
Dependent Claim 42 words
Procedure in accordance with claim 10 in which the scanning speed is within the range of from 0.1 to 2,000 centimeters per second and in which the power density is within the range of 3 X 102 watts/mm2 to 105 watts/mm2 .

References Cited (Backward Citations)

US3445356A Cited
US3637379A Cited
US3681227A Cited
US3695908A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1977-09-23 1978-03-25 1978-09-24 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1981-09-23 1982-03-25 1982-09-24 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1985-09-23 1986-03-25 1986-09-24 $7700.00 Window Closed / Lapsed

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