Abstract Apparatus for the treatment and growth of an at least partially volatile crystallisable material includes a chamber of the type in which the walls remain fixed relative to each other during the treatment and growth of the material, means for establishing a liquid seal sensitive to a pressure difference across the walls of the chamber and means responsive to the liquid seal for limiting the pressure difference across the walls of the chamber to achieve a pressure balance. The apparatus may be used, for example, for vertical crystal pulling or horizontal zone melting. The means responsive to the liquid seal may include a sensor responsive to the position of liquid in the means for establishing a liquid seal, and a control valve responsive to the sensor and under the control of which gas may be admitted to or withdrawn from a further chamber surrounding the first mentioned chamber.
Apparatus as claimed in claim 1 and wherein the liquid sealing means includes a tube containing liquid, the position of which within the tube is dependent on the pressure difference between the interior of the inner chamber and the pressure chamber.
Claim 2
Dependent Claim
44 words
Apparatus as claimed in claim 2 wherein the pressure balancing means includes a sensor responsive to the position of the liquid in the tube, and control valve means responsive to the sensor for adjusting the pressure between the main chamber and the inner chamber.
Claim 3
Dependent Claim
69 words
Apparatus as claimed in claim 2 and wherein the tube has a U-shaped first portion of relatively small cross-section for containing the liquid, and a second portion of relatively large cross-section into which the liquid is driven by an appropriate pressure difference between the interior of the inner chamber and the main chamber, so that gas is allowed to flow past the liquid seal and relieve the pressure difference.
Claim 4
Dependent Claim
46 words
Apparatus as claimed in claim 1 wherein the pressure balancing means includes an inverted J-shaped tube having one end in communication with the interior of the inner chamber and the other end in a well in the seal block containing material for providing a liquid seal.
Claim 5
Dependent Claim
44 words
Apparatus as claimed in claim 1 wherein the pressure balancing means includes a sensor responsive to the position of the liquid in the well and control valve means responsive to the sensor for adjusting the pressure inside the main chamber outside the inner chamber.
Claim 6
Dependent Claim
27 words
Apparatus as claimed in claim 1 wherein the means for establishing a liquid seal includes a heating means for melting the material for providing a liquid seal.
Claim 7
Dependent Claim
242 words
Apparatus for the treatment and growth of an at least partly volatile crystallizable material in a sealed two-compartment chamber arrangement having an improved sealing relationship comprising: an inner growth chamber containing a volatile gas and having the walls thereof remaining fixed relative to each other during treatment and growth of the material; a larger main pressure chamber containing within it the inner growth chamber, the main pressure chamber filled with an inert gas; liquid sealing means positioned and providing fluid communication between the inner chamber and the main pressure chamber, said liquid sealing means including a pull rod moveable in rotational and longitudinal directions, a seal block provided with a screw-threaded bore to receive the pull rod, and a well at one end of the bore to receive material for providing the liquid seal, the screw-threaded bore cooperating with the pull rod when the rod is rotated to retain the material of the liquid seal within the seal block and thus maintain the seal, thereby separating the volatile and inert gases and sensitive to a pressure difference between the interior of the inner chamber and the surrounding main pressure chamber; pressure balancing means responsive to the liquid sealing means for effectively substantially equalizing the pressure of the volatile gas inside the inner chamber and the pressure of the inert gas of the main pressure chamber, whereby the pressure in the inner growth chamber and the main pressure chamber are maintained nearly equal.