US3821020A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of deposition of silicon by using pyrolysis of silane
Assignee: Panasonic Holdings Corp
•
Filing: 1971-12-27
•
Granted: 1974-06-28
•
Expires: 1991-12-27
Abstract
Abstract An improved method of deposition of silicon by using pyrolysis of silane, which employs a carrier gas of a mixture of hydrogen gas and an inert gas such as argon, helium, neon, krypton, xenon, radon and nitrogen.
Inventors
- 👤 T Hara
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 03:31
CPC Classifications
C; C30; C30B; C30B29/00; C30B29/02; C30B29/06; C30B25/00; C30B25/02; Y; Y10; Y10S; Y10S117/00; Y10S117/906; Y10S148/00; Y10S148/007; Y10S148/079; Y10S438/00; Y10S438/909
Claims Analysis
Total Claims: 0
No claims parsed yet. Click Sync Now above to re-index claims from Google Patents.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-06-27 | 1977-12-27 | 1978-06-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-06-27 | 1981-12-27 | 1982-06-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-06-27 | 1985-12-27 | 1986-06-28 | $7700.00 | Window Closed / Lapsed |