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US3820935A Expired / Lapsed US ⏱️ 0.0 years remaining

Method and device for the production of tubular members of silicon

Assignee: Siemens AG
•
Filing: 1972-09-25
•
Granted: 1974-06-28
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Expires: 1992-09-25
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Abstract

Abstract A method and device for the production of silicon tubes by deposition of self-supporting silicon layers from the gas-phase onto tubular heated carriers of graphite whereby two such vertical carriers are supported along the periphery of their lower ends by electrodes and are connected at their upper ends by a bridge of conductive material, whereby the tubular shaped carriers, as well as the supporting electrodes and the connecting bridge are so designed with respect to each other that the respective values for the product of the shortest circumference with the smallest current carrying cross-section and the specific conductivity for the electrodes and connecting bridge are at least five times, preferably ten times as large as the values of such products for the tubular carriers, and stopping the production of such layers when the temperature differential between the tubular carriers and the supporting elements, i.e., electrodes and connecting bridge, drops to 300*C.

Inventors

  • 👤 W Dietze

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 02:46
CPC Classifications
C; C30; C30B; C30B29/00; C30B29/02; C30B29/06; C23; C23C; C23C16/00; C23C16/01; C23C16/22; C30B25/00; C30B25/02; C30B29/60

Claims Analysis

Total Claims: 6
Claim 1
Independent Claim 172 words
A device for the production of tubular members of silicon by deposition of self-supporting silicon layers from the gas phase upon heated tubular carriers from which the silicon layers forming the desired tubes are removed, comprising a reaction vessel in which are disposed a pair of parallel tubular carriers supported in vertical position by electrodes which contact the carriers along their periphery at their lower ends, a bridge of conductive material connecting said carriers at their upper ends, means in the reaction container for supplying thereto a reaction gas flow comprising halogenized silane and hydrogen, and means forming a discharge for exhausted gas, the two electrodes supporting the carriers being adapted to be conductively connected to opposite sides of a current supply source, the values of the products of the shortest circumference with the smallest current conducting cross-section and the specific conductivity of the connecting electrodes and connecting bridge respectively being at least five times, preferably at least 10 times, that of the value of such product for the respective tubular carriers.
Claim 2
Independent Claim 172 words
A device for the production of tubular members of silicon by deposition of self-supporting silicon layers from the gas phase upon heated tubular carriers from which the silicon layers forming the desired tubes are removed, comprising a reaction vessel in which are disposed a pair of parallel tubular carriers supported in vertical position by electrodes which contact the carriers along their periphery at their lower ends, a bridge of conductive material connecting said carriers at their upper ends, means in the reaction container for supplying thereto a reaction gas flow comprising halogenized silane and hydrogen, and means forming a discharge for exhausted gas, the two electrodes supporting the carriers being adapted to be conductively connected to opposite sides of a current supply source, the values of the products of the shortest circumference with the smallest current conducting cross-section and the specific conductivity of the connecting electrodes and connecting bridge respectively being at least five times, preferably at least 10 times, that of the value of such product for the respective tubular carriers.
Claim 3
Dependent Claim 22 words
A device according to claim 1, wherein the tubular carriers, connecting bridge and electrodes supporting the carriers are constructed of conductive carbon.
Claim 4
Dependent Claim 20 words
A device according to claim 2, wherein the tubular carriers connecting bridge and electrodes are constructed of highly pure graphite.
Claim 5
Dependent Claim 24 words
A device according to claim 1, comprising in further combination, means for supplying an inert cooling gas to the interior of the tubular carriers.
Claim 6
Dependent Claim 36 words
A device according to claim 1, comprising in further combination, means for supplying a quantity of the same reaction gas, utilized for the deposition operation, to the interior of the tubular carriers for cooling the same.

References Cited (Backward Citations)

No citation records indexed.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1977-06-27 1977-12-27 1978-06-28 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1981-06-27 1981-12-27 1982-06-28 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1985-06-27 1985-12-27 1986-06-28 $7700.00 Window Closed / Lapsed

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