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US3820871A Expired / Lapsed US ⏱️ 0.0 years remaining

Short wavelength waveguides formed of metal oxides

Assignee: Thales SA
•
Filing: 1972-08-10
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Granted: 1974-06-28
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Expires: 1992-08-10
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Abstract

Abstract A light waveguide is formed by atomising under vacuum and deposition upon a substrate, of a metal such for example as tantalum, in an atmosphere comprising a gas capable, in association with the metal, of forming a chemical combination, oxygen in the case of tantalum. The deposit is a complex compound of the metal and of the gas if the gas pressure is insufficient to produce the desired chemical combination (tantalum pentoxide Ta2O5); the assembly, after appropriate masking, is subjected to a chemical process which converts the unprotected parts into said combination.

Inventors

  • 👤 M Croset

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-27 10:59
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/13; G02B6/132; G02B6/122; G02B6/125

Claims Analysis

Total Claims: 7
Claim 1
Independent Claim 14 words
A waveguide as claimed in claim 1, wherein said solid element is a metal.
Claim 2
Dependent Claim 54 words
A waveguide as claimed in claim 2, wherein said metal has a higher refractive index than said chemical combination, and said compound has a refractive index which decreases when the proportion of gas in said compound increases, up to the point at which the stoechiometric ratio for the formation of said combination is reached.
Claim 3
Dependent Claim 19 words
A waveguide as claimed in claim 3, wherein said metal is tantalum, the gas oxygen, the combination tantalum pentoxide.
Claim 4
Dependent Claim 20 words
A waveguide as claimed in claim 3, wherein said metal is zirconium the gas oxygen, the combination zirconium oxide ZrO2.
Claim 5
Dependent Claim 21 words
A system of identical waveguides in accordance with claim 2, integrated into one and the same layer of said chemical combination.
Claim 6
Dependent Claim 35 words
A system as claimed in claim 6, comprising two waveguides having parallel rectilinear portions of the same length located opposite one another and separated by an interval in order thus to form a directional coupler.
Claim 7
Dependent Claim 15 words
A waveguide as claimed in claim 1, characterized in that its cross-section is substantially rectangular.

References Cited (Backward Citations)

No citation records indexed.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1977-06-27 1977-12-27 1978-06-28 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1981-06-27 1981-12-27 1982-06-28 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1985-06-27 1985-12-27 1986-06-28 $7700.00 Window Closed / Lapsed

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