Electrolyte and process for electro-depositing copper

Abstract

Abstract IN ACCORDANCE WITH CERTAIN OF ITS ASPECTS, THIS INVENTION RELATES TO NOVEL COMPOSITION AND TO A PROCESS FOR ELECTRODEPOSITING BRIGHT, STRONGLY LEVELED, DUCTILE COPPER FROM AN AQUEOUS ACIDIC COPPER PLATING BATH CONTAINING CHLORIDE ION AND AT LEAST ONE MEMBER INDEPENDENTLY SELECTED FROM EACH OF THE FOLLOWING GROUPS: (A) A POLYSULFIDE COMPOUND OF THE FORMULA R''-(S)N-R-SO3M; (B) A HETEROCYCLIC SULFUR COMPOUND CONTAINING THE GROUPING -N(=O)Z=C(-S-R")-C(-)< WHERE R"'' IS HYDROGEN, AN ALKYL GROUP OF 1-6 CARBON ATOMS, ARYL, ALKARYL OR ARALKYL GROUP. -C(=N-R"'')-N(-R"'')2, -C(=N-R"'')-R"'' OR -C(=S)-N(-R"'')2 AND/OR TAUTOMERS THEREOF, WHERE THE NITROGEN ATOM AND THE TWO CARBON ATOMS ARE PART OF A HETEROCYCLIC RING; AND (C) A POLYETHER CONTAINING AT LEAST 5 ETHER OXYGEN ATOMS PER MOLECULE; WHEREIN R IS INDEPENDENTLY A DIVALENT ALIPHATIC OR AROMATIC NON-HETEROCYCLIC GROUP OF 1-10 CARBON ATOM; R'' IS HYDROGEN, A METAL CATION, A MONOVALENT ALIPHATIC OR AROMATIC GROUP OF 1-20 CARBON ATOMS, OR THE GROUPS -R-SC3M OR -R-(S)Q-RSO3M WHEREIN Q IS AN INTEGER 2-5; M IS A CATION; Z IS 0 OR 1; R" IS HYDROGEN, A METAL ION OR ONE OF THE GROUPS

Inventors

• 👤 O Kardos
• 👤 S Valayil
• 👤 D Arcilesi

Bibliographic Details