Stabilized cathode ray-sensitive coating film
Abstract
Abstract A COATING FILM FOR FORMING A DESIRED PATTERN BY BEING EXPOSED TO A CATHODE RAY IN ACCORDANCE WITH THE DESIRED PATTERN, SAID FILM BEING PARTICULARLY USEFUL AS A RESIST MASK IN THE MAUNFACTURING PROCESS OF AN INTEGRATED CIRCUIT AND ADAPTED TO BE HARDENED BY CATHODE RAY EXPOSURE. THIS COATING FILM IS CHARACTERIZED IN THAT IT IS MADE OF A MATRIX OF AN ORGANIC POLYMER HAVING AT LEAST THREE EPOXY GROUPS WITHIN A MOLECULE, AND THE POLYMER MATRIX CONTAINS AN ELECTROLYTE SUCH AS A QUATERNARY ALKYL AMMONIUM COMPOUND; A HALIDE, HYDROXIDE OR CARBONATE OF AN ALKALI METAL. THE PRESENCE OF THE ELECTROLYTE MATERIAL IS EFFECTIVE FOR KEEPING THE FILM IN A CHEMICALLY STABLE STATE OVER A LONG PERIOD OF TIME, AND ALSO FOR RECORDING A CATHODE RAY IMAGE AT HIGH CLARITY, SO THAT IT IS VERY EFFECTIVE FOR IMPROVING THE WELL-KNOWN CATHODE RAY-SENSITIVE COATING FILM MADE OF THE ORGANIC POLYMER BEARING EPOXY GROUPS WITHIN A MOLECULE.
Inventors
- 👤 S Nonogaki
- 👤 H Morishita
- 👤 T Hirai
Bibliographic Details
Claims Analysis
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