US3801355A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Plasma deposition of thin layers on substrates
Assignee: Alcatel CIT SA
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Filing: 1972-04-20
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Granted: 1974-04-02
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Expires: 1992-04-20
Abstract
Abstract A method for producing thin layers of coating substances on substrates by plasma evaporation, comprising shaping a coating substance as a hollow body, passing a non-reactive gas through the body and subjecting the gas while in the body to an electromagnetic field to form a plasma. Coating material is vaporized from the interior of the body by the plasma, entrained in the gas and carried by the gas to a substrate on which it is deposited in a thin layer.
Inventors
- 👤 Cakenberghe J Van
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 07:38
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/228; C23C14/34; C23C14/3471; H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/34; H01J37/3411; H01J37/3414; H01J37/342
Claims Analysis
Total Claims: 1
Claim 1
Independent Claim
37 words
The method of claim 1 wherein the substance of the coating consists essentially of the material of said hollow body and the gas used to form the plasma for vaporizing the material is non-reactive with said substance.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-04-01 | 1977-10-01 | 1978-04-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-04-01 | 1981-10-01 | 1982-04-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-04-01 | 1985-10-01 | 1986-04-02 | $7700.00 | Window Closed / Lapsed |