US3801327A
Expired / Lapsed
US
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O-dithialane-photosensitive compositions
Assignee: International Business Machines Corp
•
Filing: 1970-07-02
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Granted: 1974-04-02
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Expires: 1990-07-02
Abstract
Abstract A photoresist composition for use in photolithographic and photomechanical processes comprising organic solvent-soluble colloids sensitized with 1,2 dithiacycloalkane compounds, as well as photosensitive compositions comprising 1,2 dithiacycloalkane alkanoate esters of hydroxy containing colloids; and light sensitive elements coated with such compositions.
Inventors
- 👤 W Moreau
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 22:54
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/038; C; C07; C07D; C07D339/00; C07D339/02; C07D339/04; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/106; Y10S430/109; Y10S430/11; Y10S430/114; Y10S430/122; Y10S430/123
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
27 words
The composition of claim 1 wherein said 1,2-dithiacycloalkane has a four to seven member ring structure containing two adjacent sulfur groups and two to five methylene groups.
Claim 2
Dependent Claim
13 words
The composition of claim 1 wherein the second said constituent has the formula
Claim 3
Dependent Claim
14 words
A light sensitive composition comprising an unsaturated organic solvent-soluble colloid and a 1,2-dithiacycloalkane compound.
Claim 4
Dependent Claim
26 words
The composition of claim 4 wherein said 1,2-dithiacycloalkane has a four to seven ring structure containing two adjacent sulfur groups and two to five methylene groups.
Claim 5
Dependent Claim
11 words
The composition of claim 4 wherein said compound has the formula
Claim 6
Dependent Claim
36 words
The composition of claim 4 wherein the second said constituent comprised a 1,2-dithiacycloalkanoate side chain of said colloid constituent, wherein said colloid is a member selected from the group consisting of polyvinyl alcohols and hydroxy alkyds.
Claim 7
Dependent Claim
13 words
The composition of claim 7 which includes an unsaturated organic solvent-soluble second colloid.
Claim 8
Dependent Claim
17 words
The composition of claim 1 where both said constituents comprise a 1,2-dithiacycloalkanoate of a hydroxy containing colloids.
Claim 9
Dependent Claim
13 words
The composition of claim 9 which includes an unsaturated organic solvent-soluble second colloid.
Claim 10
Dependent Claim
13 words
The composition of claim 9 wherein said alkanoate has the acyl radical structure
Claim 11
Dependent Claim
13 words
The composition of claim 11 which includes an unsaturated organic solvent-soluble second colloid.
Claim 12
Dependent Claim
10 words
The composition of claim 11 wherein said alkanoate is 1,2-dithiacyclopentane-3-pentanoate.
Claim 13
Dependent Claim
13 words
The composition of claim 13 which includes an unsaturated organic solvent-soluble second colloid.
Claim 14
Dependent Claim
24 words
A light sensitive element comprising a support and a coating thereon of a composition comprising an organic solvent-soluble colloid constituent and a 1,2-dithiacycloalklane constituent.
Claim 15
Dependent Claim
36 words
The element of claim 15 wherein said support comprises a semiconductor substrate and the second said constituent has a four to seven member ring structure containing two adjacent sulfur groups and two to five methylene groups.
Claim 16
Dependent Claim
23 words
The element of claim 15 wherein said support comprises a semiconductor substrate and the second said constituent is an acid of the formula
Claim 17
Dependent Claim
11 words
The element of claim 17 wherein said acid is 1,2-dithiacyclopentane-3-pentanoic acid.
Claim 18
Dependent Claim
24 words
A light sensitive element comprising a support and a coating thereof of a composition comprising an unsaturated organic solvent-soluble colloid and a 1,2-dithiacycloalkane compound.
Claim 19
Dependent Claim
34 words
The element of claim 19 wherein said support comprises a semiconductor substrate and said compound has a four to seven member ring structure containing two adjacent sulfur groups and two to five methylene groups.
Claim 20
Dependent Claim
21 words
The element of claim 19 wherein said support comprises a semiconductor substrate and said compound is an acid of the formula
Claim 21
Dependent Claim
11 words
The element of claim 21 wherein said acid is 1,2-dithiacyclopentane-3-pentanoic acid.
Claim 22
Dependent Claim
27 words
The element of claim 15 wherein the second said constituent comprises a 1,2-dithiacycloalkanoate side chain of said colloid constituent wherein said colloid is a hydroxy containing colloid.
Claim 23
Dependent Claim
13 words
The element of claim 23 which includes an unsaturated organic solvent-soluble second colloid.
Claim 24
Dependent Claim
17 words
The element of claim 15 wherein both said constituents comprise a 1,2-dithiacycloalkanoate of a hydroxy containing colloid.
Claim 25
Dependent Claim
13 words
The element of claim 25 which includes an unsaturated organic solvent-soluble second colloid.
Claim 26
Dependent Claim
13 words
The element of claim 25 wherein said alkanoate has the acyl radical structure
Claim 27
Dependent Claim
13 words
The element of claim 27 which includes an unsaturated organic solvent-soluble second colloid.
Claim 28
Dependent Claim
11 words
The element of claim 27 wherein said alkanoate is a 1,2-dithiacyclopentane-3-pentanoate.
Claim 29
Dependent Claim
13 words
The element of claim 29 which includes an unsaturated organic solvent-soluble second colloid.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-04-01 | 1977-10-01 | 1978-04-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-04-01 | 1981-10-01 | 1982-04-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-04-01 | 1985-10-01 | 1986-04-02 | $7700.00 | Window Closed / Lapsed |