US3799792A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vapor deposition method
Assignee: Texas Instruments Inc
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Filing: 1971-12-14
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Granted: 1974-03-26
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Expires: 1991-12-14
Abstract
Abstract A METHOD IS DISCLOSED FOR DEPOSITING A PATTERN OF MATERIAL ONTO A SUBSTRATE. THE SUBSTRATE IS CONVEYED THROUGH A DEPOSITION STATION AT WHICH VAPORS OF THE VAPORIZZBLE MATERIAL ARE DIRECTED TOWARD A SURFACE OF THE SUBSTRATE. A MASK HAVING A PRESELECTED PATTERN OF APERTURES THEREIN IS ALSO CONVEYED THROUGH THE DEPOSITION STATION INTERMEDIATE THE ONE SURFACE OF THE SUBSTRATE AND THE VAPORS IN ORDER TO SELECTIVELY EXPOSE PRESELECTED PORTIONS OF THE SURFACE OF THE SUBSTRATE TO THE VAPORS TO PERMIT DEPOSITION OF THE VAPORS THEREON. THE MASK AND THE SUBSTRATE ARE MOVED THROUGH THE DEPOSITION STATION AT DIFFERENT RELATIVE VELOCITIES.
Inventors
- 👤 S Rying
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 04:06
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/56; C23C14/562; C23C14/04; C23C14/042
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-03-25 | 1977-09-24 | 1978-03-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-03-25 | 1981-09-24 | 1982-03-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-03-25 | 1985-09-24 | 1986-03-26 | $7700.00 | Window Closed / Lapsed |