§
Luxuse
Patent Intelligence
Sign In
← Back to Patent Explorer
US3797943A Expired / Lapsed US ⏱️ 0.0 years remaining

Surface inspecting apparatus

Assignee: Toshiba Corp
•
Filing: 1972-08-21
•
Granted: 1974-03-19
•
Expires: 1992-08-21
📄 Original PDF 🌐 Google Patents 🔄 Sync Now

Abstract

Abstract A surface inspecting apparatus is provided and includes a light source which illuminates the surface of an object to be inspected. A slit plate having a plurality of slits of different shape which determine the field of vision for the object is provided and is arranged in the path of the reflected light from the object to be inspected. A plurality of photo-electric conversion devices are provided for converting the reflected light from the object to be inspected which passes through the slits. Further means are provided for scanning the field of vision. By detecting the change of the light quantity of the reflected light from the object to be inspected which passes through the slits by the photo-electric conversion devices, it can be readily determined whether defects in the object to be inspected exist or not. Also by comparing the output of each of the photo-electric conversion devices, the shape of any defect can be determined.

Inventors

  • 👤 Y Nagao
  • 👤 C Fukazawa

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-26 13:06
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/89

Claims Analysis

Total Claims: 7
Claim 1
Independent Claim 135 words
A surface inspecting apparatus comprising: means for illuminating the surface of an object to be inspected; a slit plate having a plurality of slits of different shape, said slit plate rigidly positioned in the path of the reflected light from the object to be inspected, and slits determining the field of vision for the object to be inspected; a plurality of photo-electric conversion devices corresponding in number to said plurality of slits, each of said photoelectric devices positioned to receive the reflected light passing through one of said slits for converting the reflected light from the field of vision of the object to be inspected into a corresponding electrical signal; and means for comparing said electrical signals from said plurality of photo-electric conversion devices whereby the nature of any defect detected thereby can be determined.
Claim 2
Dependent Claim 135 words
A surface inspecting apparatus comprising: means for illuminating the surface of an object to be inspected; a slit plate having a plurality of slits of different shape, said slit plate rigidly positioned in the path of the reflected light from the object to be inspected, and slits determining the field of vision for the object to be inspected; a plurality of photo-electric conversion devices corresponding in number to said plurality of slits, each of said photoelectric devices positioned to receive the reflected light passing through one of said slits for converting the reflected light from the field of vision of the object to be inspected into a corresponding electrical signal; and means for comparing said electrical signals from said plurality of photo-electric conversion devices whereby the nature of any defect detected thereby can be determined.
Claim 3
Dependent Claim 24 words
A surface inspecting apparatus according to claim 1, wherein said slit plate comprises a plurality of polygon slits of different sizes from each other.
Claim 4
Dependent Claim 28 words
A surface inspecting apparatus according to claim 2, in which said plurality of slits are composed of a square one, a rectangular one and a rectangular strip one.
Claim 5
Dependent Claim 25 words
A surface inspecting apparatus according to claim 1, in which said slit plate comprises a plurality of circular slits of different sizes from each other.
Claim 6
Dependent Claim 18 words
A surface inspecting apparatus according to claim 1, which further includes means for scanning the field of vision.
Claim 7
Dependent Claim 61 words
A surface inspecting apparatus according to claim 1, further includes means for processing an output signal of the photo-electric conversion devices, said means for processing having a preamplifier for amplifying said output of said photo-electric conversion devices and a wave height discriminator circuit for discriminating between a signal due to a defect in the object to be inspected and other signals.

References Cited (Backward Citations)

US3058004A Cited
US3257563A Cited
US3334238A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1977-03-18 1977-09-17 1978-03-19 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1981-03-18 1981-09-17 1982-03-19 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1985-03-18 1985-09-17 1986-03-19 $7700.00 Window Closed / Lapsed

Assigned Categories & Tags

No categories assigned to this patent yet.

Assign Category Tag