US3791344A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for liquid phase epitaxy
Assignee: Telefunken Electronic GmbH
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Filing: 1972-08-14
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Granted: 1974-02-12
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Expires: 1992-08-14
Abstract
Abstract Apparatus for liquid phase exitaxy includes a refractory tubular vessel rotatable about it longitudinal axis and supportive of a substrate on an upper wall. A crucible is longitudinally movable from a position external to a confining wall of the vessel, whereby to be charged, to a position whereby to be sealed by said wall. Means rotate the vessel 180* and effect further inward movement of the crucible whereby to effect contact between the substrate and growth material.
Inventors
- 👤 W Gramann
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 03:59
CPC Classifications
C; C30; C30B; C30B19/00; C30B19/06; C30B19/061
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
103 words
An apparatus for liquid phase epitaxy, comprising a horizontally disposed refractory vessel rotatable through 180* and defining a pocket shaped recess for receiving a substrate, a storage receptacle for receiving a substance to form a melt and a substance for dissolution in the melt and which is to be precipitated epitaxially on said substrate, said vessel including a stopper for opening and closing said storage receptacle, and means for displacing said storage receptacle longitudinally inside the vessel for bringing said melt into contact with said substrate for epitaxial growth and for separating said melt from said substrate after termination of the growth process.
Claim 2
Independent Claim
103 words
An apparatus for liquid phase epitaxy, comprising a horizontally disposed refractory vessel rotatable through 180* and defining a pocket shaped recess for receiving a substrate, a storage receptacle for receiving a substance to form a melt and a substance for dissolution in the melt and which is to be precipitated epitaxially on said substrate, said vessel including a stopper for opening and closing said storage receptacle, and means for displacing said storage receptacle longitudinally inside the vessel for bringing said melt into contact with said substrate for epitaxial growth and for separating said melt from said substrate after termination of the growth process.
Claim 3
Dependent Claim
14 words
An apparatus as defined in claim 1, wherein said refractory vessel consists of graphite.
Claim 4
Dependent Claim
15 words
An apparatus as defined in claim 2, wherein said displacing means comprises a quartz rod.
Claim 5
Dependent Claim
30 words
An apparatus as defined in claim 1, wherein said storage receptacle is of a size sufficient to hold the necessary quantity of said substances for a plurality of epitaxial growth.
Claim 6
Dependent Claim
133 words
Apparatus for use in liquid phase epitaxy, comprising: a horizontally disposed refractory vessel having an extended upper wall; a substrate retained at an inner section of said upper wall; a storage receptacle for receiving a substance to form a melt and a substance to be precipitated on said substrate; means to move said receptacle longitudinally within said vessel from a position external of said upper wall, whereby to change said receptacle, to a position underlying a portion of said wall, whereby to seal said receptacle; the entire structure of said vessel and sealed receptacle being adapted to be inverted; and said means to move being adapted to further move the inverted receptacle along said wall to a position overlying said sustrate whereby to expose the substrate to the melt contained in the receptacle.
Claim 7
Dependent Claim
133 words
Apparatus for use in liquid phase epitaxy, comprising: a horizontally disposed refractory vessel having an extended upper wall; a substrate retained at an inner section of said upper wall; a storage receptacle for receiving a substance to form a melt and a substance to be precipitated on said substrate; means to move said receptacle longitudinally within said vessel from a position external of said upper wall, whereby to change said receptacle, to a position underlying a portion of said wall, whereby to seal said receptacle; the entire structure of said vessel and sealed receptacle being adapted to be inverted; and said means to move being adapted to further move the inverted receptacle along said wall to a position overlying said sustrate whereby to expose the substrate to the melt contained in the receptacle.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-02-11 | 1977-08-13 | 1978-02-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-02-11 | 1981-08-13 | 1982-02-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-02-11 | 1985-08-13 | 1986-02-12 | $7700.00 | Window Closed / Lapsed |