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US3790781A Expired / Lapsed US ⏱️ 0.0 years remaining

Cathodoluminescence device for scanning electron microscopes

Assignee: Oesterreichische Studiengesellschaft fuer Atomenergie GmbH
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Filing: 1972-09-28
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Granted: 1974-02-05
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Expires: 1992-09-28
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Abstract

Abstract A cathodoluminescence device for scanning electron microscopes which comprises a hollow space for arranging a specimen therein, and said hollow space having at least one focus and provided with a reflecting cover.

Inventors

  • 👤 E Horl
  • 👤 P Scholze
  • 👤 E Mugschl

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-04 22:42
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/22; H01J37/226; H01J37/228; H01J37/244; H01J2237/00; H01J2237/244; H01J2237/2445; H01J2237/245; H01J2237/24507

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 97 words
An electron-microscope cathodoluminescence device, comprising a support having a face, a block disposed on said face of said support and forming a hollow space having a semi-ellipsoidal surface of revolution and having two foci on said face, means for positioning a specimen at one of said foci, a light reflecting layer at least partially coating said semiellipsoidal surface, said block being formed with a bore, electron ray means for passing an electron ray through said bore onto said specimen, and a detector means for detecting light emitted by said specimen disposed at the other of said foci.
Claim 2
Dependent Claim 97 words
An electron-microscope cathodoluminescence device, comprising a support having a face, a block disposed on said face of said support and forming a hollow space having a semi-ellipsoidal surface of revolution and having two foci on said face, means for positioning a specimen at one of said foci, a light reflecting layer at least partially coating said semiellipsoidal surface, said block being formed with a bore, electron ray means for passing an electron ray through said bore onto said specimen, and a detector means for detecting light emitted by said specimen disposed at the other of said foci.
Claim 3
Dependent Claim 38 words
The device, as set forth in claim 1, wherein said detector means comprises, a light conductor having an end disposed at said other of said foci, and a detector in communication with another end of said light conductor.
Claim 4
Dependent Claim 25 words
The device, as set forth in claim 1, further comprising a shutter having an aperture, the latter disposed coinciding with said other of said foci.
Claim 5
Dependent Claim 22 words
The device, as set forth in claim 1, wherein said reflecting layer and block comprise a material having a low atomic number.
Claim 6
Dependent Claim 23 words
The device, as set forth in claim 1, further comprising a thin aluminum foil disposed in the radiation path of said electron ray.
Claim 7
Dependent Claim 90 words
An electron-microscope cathodoluminescence device, comprising a support having a face, a block disposed on said face of said support and forming a hollow space having a hemispherical surface and having one focus on said face, means for arranging a specimen eccentric to said focus, a light reflecting layer at least partially coating said hemispherical surface, said block being formed with a bore, electron ray means for passing an electron ray through said bore onto said specimen, a detector means for detecting light emitted by said specimen positioned at said focus.
Claim 8
Dependent Claim 90 words
An electron-microscope cathodoluminescence device, comprising a support having a face, a block disposed on said face of said support and forming a hollow space having a hemispherical surface and having one focus on said face, means for arranging a specimen eccentric to said focus, a light reflecting layer at least partially coating said hemispherical surface, said block being formed with a bore, electron ray means for passing an electron ray through said bore onto said specimen, a detector means for detecting light emitted by said specimen positioned at said focus.

References Cited (Backward Citations)

US3319071A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1977-02-04 1977-08-06 1978-02-05 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1981-02-04 1981-08-06 1982-02-05 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1985-02-04 1985-08-06 1986-02-05 $7700.00 Window Closed / Lapsed

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