Patent US3267162A successfully refreshed from Google Patents.
US3787696A
Expired / Lapsed
US
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Scanning electron microscope electron-optical column construction
Assignee: Etec Systems Inc
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Filing: 1972-03-15
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Granted: 1974-01-22
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Expires: 1992-03-15
Abstract
Abstract A scanning electron microscope in which the electron-optical column is formed by a plurality of magnetic coils disposed around a removable tube, an electron beam being directed axially through the tube. The tube is suitably sealed at respective ends to the electron gun and specimen-containing portions of the electronoptical column, and thus functions to contain the vacuum thereon. Preferably, the tube comprises a thin, non-magnetic stainless steel tube having a wall thickness of less than 10 mils, to prevent electrostatic charging while minimizing eddy current losses. Alternatively, the tube may comprise a thin metallic layer or inner tube within an insulating, reinforcing outer tube, to impart strength and rigidity to the tube structure.
Inventors
- 👤 J Dao
- 👤 N Yew
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 07:22
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/16; H01J37/04; H01J37/09
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
201 words
A scanning electron microscope comprising an electron source housing, electron source means for emitting a beam of electrons disposed interior of said electron source housing, an electronoptical column including a plurality of magnetic coils having a bore therethrough, said electron source housing being removably mounted to one end of said electron-optical column, a chamber for containing a specimen, said chamber being mounted to the other end of said electron-optical column, detector means for detecting electrons emitted or reflected by said specimen, a unitary tube removably disposed interior of said electron-optical column interconnecting said electron source housing and said chamber, said beam of electrons bEing directed through said tube to said specimen, mounting means for removable mounting and sealing said tube at one end thereof, self-sealing means for nonmanipulatively self-sealing said tube at the other end thereof, said other end of said tube being dimensioned smaller than said bore to permit removal of said tube through said bore without manual manipulation or disassembly at said other end, means for evacuating the interior of said electron source housing and of said tube and of said chamber, and means for energizing said coils for focus and scan said beam of electrons on said specimen.
Claim 2
Dependent Claim
201 words
A scanning electron microscope comprising an electron source housing, electron source means for emitting a beam of electrons disposed interior of said electron source housing, an electronoptical column including a plurality of magnetic coils having a bore therethrough, said electron source housing being removably mounted to one end of said electron-optical column, a chamber for containing a specimen, said chamber being mounted to the other end of said electron-optical column, detector means for detecting electrons emitted or reflected by said specimen, a unitary tube removably disposed interior of said electron-optical column interconnecting said electron source housing and said chamber, said beam of electrons bEing directed through said tube to said specimen, mounting means for removable mounting and sealing said tube at one end thereof, self-sealing means for nonmanipulatively self-sealing said tube at the other end thereof, said other end of said tube being dimensioned smaller than said bore to permit removal of said tube through said bore without manual manipulation or disassembly at said other end, means for evacuating the interior of said electron source housing and of said tube and of said chamber, and means for energizing said coils for focus and scan said beam of electrons on said specimen.
Claim 3
Dependent Claim
48 words
Apparatus according to claim 1 wherein said self-sealing means comprises a resilient seal longitudinally disposed beyond said other end of said tube and wherein said mounting means comprises means longitudinally urging said tube toward said other end for vacuum sealing engagement of said other end and said seal.
Claim 4
Dependent Claim
38 words
Apparatus according to claim 2 comprising a flange disposed on said other end of said tube, said flange having a diameter smaller than the bore of said electron-optical column, said flange including an annular groove containing said seal.
Claim 5
Dependent Claim
37 words
Apparatus according to claim 1 wherein said self-sealing means comprises a resilient seal radially disposed around said other end of said tube, said seal having a nominal inner diameter smaller than the outer diameter of said tube.
Claim 6
Dependent Claim
38 words
Apparatus according to claim 1 wherein said self-sealing means comprises a resilient seal radially disposed interior of the other end of said tube, said seal having a nominal outer diameter greater than the inner diameter of said tube.
Claim 7
Dependent Claim
18 words
Apparatus according to claim 1 wherein said one end of said tube is adjacent said electron source housing.
Claim 8
Dependent Claim
32 words
Apparatus according to claim 1 comprising a helical metal ribbon having a nominal outer diameter greater than the inner diameter of said tube, disposed in said tube to form a spray aperture.
Claim 9
Dependent Claim
14 words
Apparatus according to claim 1 comprising a spray aperture disposed interior of said tube.
Claim 10
Dependent Claim
21 words
Apparatus according to claim 8 wherein said spray aperture comprises mounting means resiliently radially urging against the interior of said tube.
Claim 11
Dependent Claim
138 words
In a scanning electron microscope having an electron source housing, electron source means for emitting a beam of electrons disposed interior of said electron source housing, an electron-optical column including a plurality of magnetic coils, said electron source housing being removably mounted to one end of said electron-optical column, a chamber for containing a specimen, said chamber being mounted to the other end of said electron-optical column, a unitary tube disposed interior said electron-optical column, said beam of electrons being directed through said tube to said specimen, means for evacuating the interior of said electron source housing and of said tube and said chamber, detector means for detecting electrons emitted or reflected by said specimen, the improvement comprising: a spray aperture disposed interior of said tube having mounting means resiliently radially urging against the interior of said tube.
Claim 12
Dependent Claim
138 words
In a scanning electron microscope having an electron source housing, electron source means for emitting a beam of electrons disposed interior of said electron source housing, an electron-optical column including a plurality of magnetic coils, said electron source housing being removably mounted to one end of said electron-optical column, a chamber for containing a specimen, said chamber being mounted to the other end of said electron-optical column, a unitary tube disposed interior said electron-optical column, said beam of electrons being directed through said tube to said specimen, means for evacuating the interior of said electron source housing and of said tube and said chamber, detector means for detecting electrons emitted or reflected by said specimen, the improvement comprising: a spray aperture disposed interior of said tube having mounting means resiliently radially urging against the interior of said tube.
Claim 13
Dependent Claim
27 words
Apparatus according to claim 10 wherein said spray aperture comprises a helical metal ribbon having a nominal outer diameter greater than the inner diameter of said tube.
Claim 14
Dependent Claim
179 words
In a scanning electron microscope having an electron source housing, electron source means for emitting a beam of electrons disposed interior of said electron source housing, an electron-optical column including a plurality of magnetic coils having a bore therethrough, said electron source housing being removably mounted to one end of said electron-optical column, a chamber for containing a specimen, said chamber being mounted to the other end of said electron-optical column, detector means for detecting electrons emitted or reflected by said specimen, a unitary tube disposed interior of said electron-optical column, said beam of electrons being directed through said tube to said specimen, means for evacuating The interior of said electron source housing and of said tube and of said chamber, the improvement comprising: mounting means for removably mounting and sealing said tube at one end thereof and self-sealing means for sealing said tube at the other end thereof, said other end of said tube being dimensioned smaller than said bore to permit removal of said tube through said bore without disassembly or manual manipulation at said other end.
Claim 15
Dependent Claim
179 words
In a scanning electron microscope having an electron source housing, electron source means for emitting a beam of electrons disposed interior of said electron source housing, an electron-optical column including a plurality of magnetic coils having a bore therethrough, said electron source housing being removably mounted to one end of said electron-optical column, a chamber for containing a specimen, said chamber being mounted to the other end of said electron-optical column, detector means for detecting electrons emitted or reflected by said specimen, a unitary tube disposed interior of said electron-optical column, said beam of electrons being directed through said tube to said specimen, means for evacuating The interior of said electron source housing and of said tube and of said chamber, the improvement comprising: mounting means for removably mounting and sealing said tube at one end thereof and self-sealing means for sealing said tube at the other end thereof, said other end of said tube being dimensioned smaller than said bore to permit removal of said tube through said bore without disassembly or manual manipulation at said other end.
Claim 16
Dependent Claim
48 words
Apparatus according to claim 12 wherein said self-sealing means comprises a resilient seal longitudinally disposed beyond said other end of said tube and wherein said mounting means comprises means longitudinally urging said tube toward said other end for vacuum sealing engagement of said other end and said seal.
Claim 17
Dependent Claim
37 words
Apparatus according to claim 12 wherein said self-sealing means comprises a resilient seal radially disposed around said other end of said tube, said seal having a nominal inner diameter smaller than the outer diameter of said tube.
Claim 18
Dependent Claim
38 words
Apparatus according to claim 12 wherein said self-sealing means comprises a resilient seal radially disposed interior of the other end of said tube, said seal having a nominal outer diameter greater than the inner diameter of said tube.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-01-21 | 1977-07-23 | 1978-01-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-01-21 | 1981-07-23 | 1982-01-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-01-21 | 1985-07-23 | 1986-01-22 | $7700.00 | Window Closed / Lapsed |