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US3786318A Expired / Lapsed US ⏱️ 0.0 years remaining

Semiconductor device having channel preventing structure

Assignee: Hitachi Ltd
•
Filing: 1967-10-10
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Granted: 1974-01-15
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Expires: 1987-10-10
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Abstract

Abstract A semiconductor device, wherein a plurality of light doped ptype silicon regions are formed separately in an island form on a heavily doped P type silicon substrate in contact therewith, semiconductor circuit elements like diodes, transistors, resistors, capacitors etc. are formed in the principal surfaces of the P regions and the exposed surface parts of the P substrate and P regions are covered with silicon oxide films. This invention provides a stabilized semiconductor device capable of high voltage operation, wherein the leakage current is small and the interaction between the circuits elements is small.

Inventors

  • 👤 T Momoi
  • 👤 I Homma

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-01 08:08
CPC Classifications
H; H10; H10D; H10D62/00; H10D62/10; H10D62/102; H10D62/103; H10D62/104; H10D84/00; H10D84/40; H10D84/401; H10D84/403; H10D99/00; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6302; H10P14/6304; H10P14/6306; H10P14/6308; H10P14/6309; H10P14/6322; H10W; H10W10/00; H10W10/01; H10W10/021; H10W10/20

Claims Analysis

Total Claims: 5
Claim 1
Independent Claim 189 words
An insulated gate type field effect transistor comprising a P type silicon substrate having a low resistivity; a P type silicon layer formed on said substrate and having a resistivity higher than that of said substrate; a source and a drain diffused region of N type formed in said P type layer; a ditch formed in said P type layer so as to completely surround said source and drain regions and extend to said substrate to expose the surface of said substrate; an insulating film having an inherent channel producing tendency covering the entire surface of said substrate exposed by said ditch and the surfaces of said P type layer and said source and drain regions; a source and a drain electrode ohmically connected to said source and drain regions through holes formed on said insulating film, respectively; and a gate electrode formed on said insulatIng film covering said substrate surface between said source and drain regions, wherein the resistivity of said P type silicon substrate is sufficiently low to prevent the conductivity type of the surface of said substrate under said insulating film from inverting to N type.
Claim 2
Dependent Claim 189 words
An insulated gate type field effect transistor comprising a P type silicon substrate having a low resistivity; a P type silicon layer formed on said substrate and having a resistivity higher than that of said substrate; a source and a drain diffused region of N type formed in said P type layer; a ditch formed in said P type layer so as to completely surround said source and drain regions and extend to said substrate to expose the surface of said substrate; an insulating film having an inherent channel producing tendency covering the entire surface of said substrate exposed by said ditch and the surfaces of said P type layer and said source and drain regions; a source and a drain electrode ohmically connected to said source and drain regions through holes formed on said insulating film, respectively; and a gate electrode formed on said insulatIng film covering said substrate surface between said source and drain regions, wherein the resistivity of said P type silicon substrate is sufficiently low to prevent the conductivity type of the surface of said substrate under said insulating film from inverting to N type.
Claim 3
Dependent Claim 27 words
An insulated gate field effect transistor according to claim 1, wherein the resistivity of the P type silicon substrate is not more than 0.1. Omega - cm.
Claim 4
Dependent Claim 27 words
An insulated gate field effect transitor according to claim 1, wherein the resistivity of the P type silicon substrate is not more than 0.01 Omega - cm.
Claim 5
Dependent Claim 29 words
An insulated gate field effect transistor according to claim 3, which further comprises a substrate electrode ohmically connected to the surface of said substrate opposing said P type layer.

References Cited (Backward Citations)

US3315096A Cited
GB1015588A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1977-01-14 1977-07-16 1978-01-15 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1981-01-14 1981-07-16 1982-01-15 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1985-01-14 1985-07-16 1986-01-15 $7700.00 Window Closed / Lapsed

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